JP2006215035A - ガス流中粒子の測定及び／又は分析のためのシステム及び方法 - Google Patents

ガス流中粒子の測定及び／又は分析のためのシステム及び方法 Download PDF

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Publication number
JP2006215035A
JP2006215035A JP2006027362A JP2006027362A JP2006215035A JP 2006215035 A JP2006215035 A JP 2006215035A JP 2006027362 A JP2006027362 A JP 2006027362A JP 2006027362 A JP2006027362 A JP 2006027362A JP 2006215035 A JP2006215035 A JP 2006215035A
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Japan
Prior art keywords
feed stream
gas feed
particle
gas
pressure
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Pending
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JP2006027362A
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English (en)
Japanese (ja)
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JP2006215035A5 (enExample
Inventor
Wayne Thomas Mcdermott
トーマス マクダーモット ウェイン
Richard Carl Ockovic
カール オッコビック リチャード
Dean V Roth
ブイ．ロス ディーン
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Air Products and Chemicals Inc
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Air Products and Chemicals Inc
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Filing date
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Priority claimed from US11/340,641 external-priority patent/US7867779B2/en
Application filed by Air Products and Chemicals Inc filed Critical Air Products and Chemicals Inc
Publication of JP2006215035A publication Critical patent/JP2006215035A/ja
Publication of JP2006215035A5 publication Critical patent/JP2006215035A5/ja
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/60—Specific sensors or sensor arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/70—Control means using a programmable logic controller [PLC] or a computer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G01N15/0625—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2006027362A 2005-02-03 2006-02-03 ガス流中粒子の測定及び／又は分析のためのシステム及び方法 Pending JP2006215035A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64949005P 2005-02-03 2005-02-03
US11/340,641 US7867779B2 (en) 2005-02-03 2006-01-27 System and method comprising same for measurement and/or analysis of particles in gas stream

Publications (2)

Publication Number Publication Date
JP2006215035A true JP2006215035A (ja) 2006-08-17
JP2006215035A5 JP2006215035A5 (enExample) 2006-12-07

Family

ID=36177683

Family Applications (1)

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JP2006027362A Pending JP2006215035A (ja) 2005-02-03 2006-02-03 ガス流中粒子の測定及び／又は分析のためのシステム及び方法

Country Status (4)

Country Link
EP (1) EP1688731A1 (enExample)
JP (1) JP2006215035A (enExample)
KR (3) KR20060093031A (enExample)
TW (1) TWI294517B (enExample)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009052981A (ja) * 2007-08-24 2009-03-12 Japan Organo Co Ltd 高圧流体中の微粒子測定システムおよび微粒子測定方法
JP2009052980A (ja) * 2007-08-24 2009-03-12 Japan Organo Co Ltd 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法
CN102252953A (zh) * 2010-05-21 2011-11-23 武汉新芯集成电路制造有限公司 用于液体颗粒测试的适配装置
JP2012214825A (ja) * 2011-03-31 2012-11-08 Taiyo Nippon Sanso Corp 珪素水素化物ガスの供給方法
US8510272B2 (en) 2007-04-20 2013-08-13 General Electric Company Decision support response systems and methods
JP2015036658A (ja) * 2013-08-14 2015-02-23 大陽日酸株式会社 試料ガス中の金属のサンプリング方法およびサンプリング装置
JP2016536608A (ja) * 2013-09-12 2016-11-24 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガスサンプリング装置、及び、このような装置を備えている充填ステーション
JP2017072593A (ja) * 2015-10-05 2017-04-13 新日鐵住金株式会社 微粒子分析方法
WO2018048292A1 (ko) * 2016-09-12 2018-03-15 연세대학교 산학협력단 포터블 바이오 에어로졸 포집 장치 및 분석방법
JP2018512581A (ja) * 2015-03-12 2018-05-17 プロフタガレン アクチエボラグＰｒｏｖｔａｇａｒｅｎ 流体流中の粒子および気相の有機および非有機成分の能動的または受動的なサンプリングの方法
KR20200018789A (ko) * 2017-06-27 2020-02-20 하이닥 악세서리즈 게엠베하 고압의 수소의 입자 로딩을 결정하기 위한 시험 장치
JP2020189264A (ja) * 2019-05-21 2020-11-26 Ckd株式会社 フィルタ装置
US11065056B2 (en) 2016-03-24 2021-07-20 Sofradim Production System and method of generating a model and simulating an effect on a surgical repair site

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KR100707963B1 (ko) * 2005-05-04 2007-04-16 김선태 가스상 배출물질의 발산속도를 측정하기 위하여 반도체센서를 사용하는 챔버 시스템
US20070261559A1 (en) * 2006-05-09 2007-11-15 Maroulis Peter J Analysis of a reactive gas such as silane for particle generating impurities
GB0808385D0 (en) * 2008-05-08 2008-06-18 Naneum Ltd A condensation apparatus
TWI385374B (zh) * 2009-01-21 2013-02-11 Taiwan Textile Res Inst 檢測裝置及檢測方法
DE102012005719A1 (de) * 2012-03-20 2013-09-26 Hydac Accessories Gmbh Prüfvorrichtung zum Ermitteln der Partikelbelastung von unter einem hohen Druck stehendem Wasserstoff
CN107436269B (zh) * 2017-09-14 2023-11-17 辽宁工程技术大学 一种挥发性颗粒物浓度检测装置、控制系统及方法
CN110880445B (zh) * 2018-09-06 2025-04-18 同方威视技术股份有限公司 一种基于脉冲采样的离子迁移谱仪及嗅探装置
US12270748B2 (en) 2018-09-12 2025-04-08 Lam Research Corporation Method and apparatus for measuring particles
CN109838686B (zh) * 2019-02-14 2025-01-28 昊华气体有限公司 一种钢瓶处理系统及其使用方法和应用
CN110187067B (zh) * 2019-06-21 2024-03-22 上海至纯系统集成有限公司 一种水氧颗粒自动分析系统及其分析方法
TWI712774B (zh) * 2019-06-27 2020-12-11 鄭慶煥 用於量測氣體的裝置及用於量測氣體的方法
CN116907927B (zh) * 2023-09-13 2023-11-14 上海兄弟微电子技术有限公司 一种半导体气体管道固体颗粒测试的气体取样装置

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JPH0298652A (ja) * 1988-10-05 1990-04-11 Mitsubishi Electric Corp ダストカウンタ
JPH02298302A (ja) * 1989-03-06 1990-12-10 L'air Liquide 高度に圧縮されたガス中の粒子から凝縮可能な蒸気を分離する方法
JPH04303738A (ja) * 1991-03-29 1992-10-27 Japan Electron Ind Dev Assoc<Jeida> 微粒子計
JPH0534260A (ja) * 1991-07-29 1993-02-09 Shimadzu Corp 表面積測定用試料セル
JPH08101116A (ja) * 1994-05-10 1996-04-16 L'air Liquide 圧縮ガス中の汚染粒子の分析方法
JPH08327509A (ja) * 1995-05-29 1996-12-13 Samsung Electron Co Ltd 半導体装置の製造過程で発生する汚染粒子の測定装置、測定方法及びその分析方法
JPH10253509A (ja) * 1997-03-11 1998-09-25 Shimadzu Corp エアロゾル中化学成分の捕集抽出装置
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WO2004046517A2 (en) * 2002-11-18 2004-06-03 Southwest Research Institute Apparatus and method for real-time measurement of mass, size and number of solid particles of particulate matter in engine exhaust
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US6248217B1 (en) * 1997-04-10 2001-06-19 The University Of Cincinnati Process for the enhanced capture of heavy metal emissions
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JPH0298652A (ja) * 1988-10-05 1990-04-11 Mitsubishi Electric Corp ダストカウンタ
JPH02298302A (ja) * 1989-03-06 1990-12-10 L'air Liquide 高度に圧縮されたガス中の粒子から凝縮可能な蒸気を分離する方法
JPH04303738A (ja) * 1991-03-29 1992-10-27 Japan Electron Ind Dev Assoc<Jeida> 微粒子計
JPH0534260A (ja) * 1991-07-29 1993-02-09 Shimadzu Corp 表面積測定用試料セル
JPH08101116A (ja) * 1994-05-10 1996-04-16 L'air Liquide 圧縮ガス中の汚染粒子の分析方法
JPH08327509A (ja) * 1995-05-29 1996-12-13 Samsung Electron Co Ltd 半導体装置の製造過程で発生する汚染粒子の測定装置、測定方法及びその分析方法
JPH10253509A (ja) * 1997-03-11 1998-09-25 Shimadzu Corp エアロゾル中化学成分の捕集抽出装置
JP2000180342A (ja) * 1998-12-14 2000-06-30 L'air Liquide ガス容器及び容器弁の評価方法
WO2004046517A2 (en) * 2002-11-18 2004-06-03 Southwest Research Institute Apparatus and method for real-time measurement of mass, size and number of solid particles of particulate matter in engine exhaust
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Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8510272B2 (en) 2007-04-20 2013-08-13 General Electric Company Decision support response systems and methods
US8725699B2 (en) 2007-04-20 2014-05-13 General Electric Company Decision support response systems and methods
JP2009052981A (ja) * 2007-08-24 2009-03-12 Japan Organo Co Ltd 高圧流体中の微粒子測定システムおよび微粒子測定方法
JP2009052980A (ja) * 2007-08-24 2009-03-12 Japan Organo Co Ltd 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法
CN102252953A (zh) * 2010-05-21 2011-11-23 武汉新芯集成电路制造有限公司 用于液体颗粒测试的适配装置
JP2012214825A (ja) * 2011-03-31 2012-11-08 Taiyo Nippon Sanso Corp 珪素水素化物ガスの供給方法
JP2015036658A (ja) * 2013-08-14 2015-02-23 大陽日酸株式会社 試料ガス中の金属のサンプリング方法およびサンプリング装置
JP2016536608A (ja) * 2013-09-12 2016-11-24 レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード ガスサンプリング装置、及び、このような装置を備えている充填ステーション
US10605704B2 (en) 2015-03-12 2020-03-31 Provtagaren Ab Method for active or passive sampling of particles and gas phase organic and non-organic components in a fluid flow
JP2018512581A (ja) * 2015-03-12 2018-05-17 プロフタガレン アクチエボラグＰｒｏｖｔａｇａｒｅｎ 流体流中の粒子および気相の有機および非有機成分の能動的または受動的なサンプリングの方法
JP2017072593A (ja) * 2015-10-05 2017-04-13 新日鐵住金株式会社 微粒子分析方法
US11065056B2 (en) 2016-03-24 2021-07-20 Sofradim Production System and method of generating a model and simulating an effect on a surgical repair site
US11903653B2 (en) 2016-03-24 2024-02-20 Sofradim Production System and method of generating a model and simulating an effect on a surgical repair site
WO2018048292A1 (ko) * 2016-09-12 2018-03-15 연세대학교 산학협력단 포터블 바이오 에어로졸 포집 장치 및 분석방법
KR20200018789A (ko) * 2017-06-27 2020-02-20 하이닥 악세서리즈 게엠베하 고압의 수소의 입자 로딩을 결정하기 위한 시험 장치
JP2020525759A (ja) * 2017-06-27 2020-08-27 ハイダック アクセサリーズ ゲゼルシャフト ミット ベシュレンクテル ハフツング 高圧下にある水素の粒子負荷を決定するための試験装置
KR102324299B1 (ko) 2017-06-27 2021-11-15 하이닥 악세서리즈 게엠베하 고압의 수소의 입자 로딩을 결정하기 위한 시험 장치
JP2020189264A (ja) * 2019-05-21 2020-11-26 Ckd株式会社 フィルタ装置
JP7045348B2 (ja) 2019-05-21 2022-03-31 Ckd株式会社 フィルタ装置

Also Published As

Publication number Publication date
KR100935384B1 (ko) 2010-01-06
EP1688731A1 (en) 2006-08-09
KR20070121631A (ko) 2007-12-27
KR100846408B1 (ko) 2008-07-16
TW200632303A (en) 2006-09-16
TWI294517B (en) 2008-03-11
KR20060093031A (ko) 2006-08-23
KR20080002724A (ko) 2008-01-04

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