KR20060093031A - 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법 - Google Patents

가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법 Download PDF

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Publication number
KR20060093031A
KR20060093031A KR1020060010832A KR20060010832A KR20060093031A KR 20060093031 A KR20060093031 A KR 20060093031A KR 1020060010832 A KR1020060010832 A KR 1020060010832A KR 20060010832 A KR20060010832 A KR 20060010832A KR 20060093031 A KR20060093031 A KR 20060093031A
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South Korea
Prior art keywords
feed stream
gas feed
particle
pressure
gas
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Ceased
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KR1020060010832A
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English (en)
Korean (ko)
Inventor
웨인 토마스 맥더모트
리차드 칼 오코빅
딘 브이. 로스
Original Assignee
에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
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Priority claimed from US11/340,641 external-priority patent/US7867779B2/en
Application filed by 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 filed Critical 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드
Publication of KR20060093031A publication Critical patent/KR20060093031A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/60—Specific sensors or sensor arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/70—Control means using a programmable logic controller [PLC] or a computer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G01N15/0625—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Sampling And Sample Adjustment (AREA)
KR1020060010832A 2005-02-03 2006-02-03 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법 Ceased KR20060093031A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US64949005P 2005-02-03 2005-02-03
US60/649,490 2005-02-03
US11/340,641 2006-01-27
US11/340,641 US7867779B2 (en) 2005-02-03 2006-01-27 System and method comprising same for measurement and/or analysis of particles in gas stream

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020070128305A Division KR100846408B1 (ko) 2005-02-03 2007-08-22 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법

Publications (1)

Publication Number Publication Date
KR20060093031A true KR20060093031A (ko) 2006-08-23

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Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020060010832A Ceased KR20060093031A (ko) 2005-02-03 2006-02-03 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법
KR1020070128305A Expired - Fee Related KR100846408B1 (ko) 2005-02-03 2007-08-22 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법
KR1020070132234A Expired - Fee Related KR100935384B1 (ko) 2005-02-03 2007-12-17 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법

Family Applications After (2)

Application Number Title Priority Date Filing Date
KR1020070128305A Expired - Fee Related KR100846408B1 (ko) 2005-02-03 2007-08-22 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법
KR1020070132234A Expired - Fee Related KR100935384B1 (ko) 2005-02-03 2007-12-17 가스 스트림 중 입자의 측정 및/또는 분석을 위한 시스템및 이를 포함하는 방법

Country Status (4)

Country Link
EP (1) EP1688731A1 (enExample)
JP (1) JP2006215035A (enExample)
KR (3) KR20060093031A (enExample)
TW (1) TWI294517B (enExample)

Cited By (1)

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KR100707963B1 (ko) * 2005-05-04 2007-04-16 김선태 가스상 배출물질의 발산속도를 측정하기 위하여 반도체센서를 사용하는 챔버 시스템

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US20070261559A1 (en) * 2006-05-09 2007-11-15 Maroulis Peter J Analysis of a reactive gas such as silane for particle generating impurities
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JP4973937B2 (ja) * 2007-08-24 2012-07-11 オルガノ株式会社 高圧流体中の微粒子測定システムおよび微粒子測定方法
JP4997568B2 (ja) * 2007-08-24 2012-08-08 オルガノ株式会社 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法
GB0808385D0 (en) * 2008-05-08 2008-06-18 Naneum Ltd A condensation apparatus
TWI385374B (zh) * 2009-01-21 2013-02-11 Taiwan Textile Res Inst 檢測裝置及檢測方法
CN102252953B (zh) * 2010-05-21 2013-07-03 武汉新芯集成电路制造有限公司 用于液体颗粒测试的适配装置
JP5690188B2 (ja) * 2011-03-31 2015-03-25 大陽日酸株式会社 モノシランガスの供給方法
DE102012005719A1 (de) * 2012-03-20 2013-09-26 Hydac Accessories Gmbh Prüfvorrichtung zum Ermitteln der Partikelbelastung von unter einem hohen Druck stehendem Wasserstoff
JP2015036658A (ja) * 2013-08-14 2015-02-23 大陽日酸株式会社 試料ガス中の金属のサンプリング方法およびサンプリング装置
FR3010482B1 (fr) * 2013-09-12 2015-10-16 Air Liquide Dispositif d'echantillonnage de gaz et station de remplissage comprenant un tel dispositif
JP2018512581A (ja) * 2015-03-12 2018-05-17 プロフタガレン アクチエボラグＰｒｏｖｔａｇａｒｅｎ 流体流中の粒子および気相の有機および非有機成分の能動的または受動的なサンプリングの方法
JP6790691B2 (ja) * 2015-10-05 2020-11-25 日本製鉄株式会社 微粒子分析方法
EP3223181B1 (en) 2016-03-24 2019-12-18 Sofradim Production System and method of generating a model and simulating an effect on a surgical repair site
KR101798601B1 (ko) * 2016-09-12 2017-11-16 연세대학교 산학협력단 포터블 바이오 에어로졸 포집 장치 및 분석방법
DE102017006063A1 (de) * 2017-06-27 2018-12-27 Hydac Accessories Gmbh Prüfvorrichtung zum Ermitteln der Partikelbelastung von unter einem hohen Druck stehendem Wasserstoff
CN107436269B (zh) * 2017-09-14 2023-11-17 辽宁工程技术大学 一种挥发性颗粒物浓度检测装置、控制系统及方法
CN110880445B (zh) * 2018-09-06 2025-04-18 同方威视技术股份有限公司 一种基于脉冲采样的离子迁移谱仪及嗅探装置
US12270748B2 (en) 2018-09-12 2025-04-08 Lam Research Corporation Method and apparatus for measuring particles
CN109838686B (zh) * 2019-02-14 2025-01-28 昊华气体有限公司 一种钢瓶处理系统及其使用方法和应用
JP7045348B2 (ja) * 2019-05-21 2022-03-31 Ckd株式会社 フィルタ装置
CN110187067B (zh) * 2019-06-21 2024-03-22 上海至纯系统集成有限公司 一种水氧颗粒自动分析系统及其分析方法
TWI712774B (zh) * 2019-06-27 2020-12-11 鄭慶煥 用於量測氣體的裝置及用於量測氣體的方法
CN116907927B (zh) * 2023-09-13 2023-11-14 上海兄弟微电子技术有限公司 一种半导体气体管道固体颗粒测试的气体取样装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100707963B1 (ko) * 2005-05-04 2007-04-16 김선태 가스상 배출물질의 발산속도를 측정하기 위하여 반도체센서를 사용하는 챔버 시스템

Also Published As

Publication number Publication date
KR100935384B1 (ko) 2010-01-06
EP1688731A1 (en) 2006-08-09
KR20070121631A (ko) 2007-12-27
KR100846408B1 (ko) 2008-07-16
TW200632303A (en) 2006-09-16
TWI294517B (en) 2008-03-11
JP2006215035A (ja) 2006-08-17
KR20080002724A (ko) 2008-01-04

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