TWI294517B - System and method comprising same for measurement and/or analysis of particles in gas stream - Google Patents

System and method comprising same for measurement and/or analysis of particles in gas stream Download PDF

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Publication number
TWI294517B
TWI294517B TW095103782A TW95103782A TWI294517B TW I294517 B TWI294517 B TW I294517B TW 095103782 A TW095103782 A TW 095103782A TW 95103782 A TW95103782 A TW 95103782A TW I294517 B TWI294517 B TW I294517B
Authority
TW
Taiwan
Prior art keywords
feed stream
gas feed
gas
pressure
particle
Prior art date
Application number
TW095103782A
Other languages
English (en)
Chinese (zh)
Other versions
TW200632303A (en
Inventor
Wayne Thomas Mcdermott
Richard Carl Ockovic
Dean V Roth
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/340,641 external-priority patent/US7867779B2/en
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW200632303A publication Critical patent/TW200632303A/zh
Application granted granted Critical
Publication of TWI294517B publication Critical patent/TWI294517B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D63/00—Apparatus in general for separation processes using semi-permeable membranes
    • B01D63/06—Tubular membrane modules
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2202—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling
    • G01N1/2205—Devices for withdrawing samples in the gaseous state involving separation of sample components during sampling with filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/065—Investigating concentration of particle suspensions using condensation nuclei counters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/60—Specific sensors or sensor arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2313/00—Details relating to membrane modules or apparatus
    • B01D2313/70—Control means using a programmable logic controller [PLC] or a computer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0606—Investigating concentration of particle suspensions by collecting particles on a support
    • G01N15/0618—Investigating concentration of particle suspensions by collecting particles on a support of the filter type
    • G01N15/0625—Optical scan of the deposits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Sampling And Sample Adjustment (AREA)
TW095103782A 2005-02-03 2006-02-03 System and method comprising same for measurement and/or analysis of particles in gas stream TWI294517B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64949005P 2005-02-03 2005-02-03
US11/340,641 US7867779B2 (en) 2005-02-03 2006-01-27 System and method comprising same for measurement and/or analysis of particles in gas stream

Publications (2)

Publication Number Publication Date
TW200632303A TW200632303A (en) 2006-09-16
TWI294517B true TWI294517B (en) 2008-03-11

Family

ID=36177683

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095103782A TWI294517B (en) 2005-02-03 2006-02-03 System and method comprising same for measurement and/or analysis of particles in gas stream

Country Status (4)

Country Link
EP (1) EP1688731A1 (enExample)
JP (1) JP2006215035A (enExample)
KR (3) KR20060093031A (enExample)
TW (1) TWI294517B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385374B (zh) * 2009-01-21 2013-02-11 Taiwan Textile Res Inst 檢測裝置及檢測方法
TWI712774B (zh) * 2019-06-27 2020-12-11 鄭慶煥 用於量測氣體的裝置及用於量測氣體的方法

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KR100707963B1 (ko) * 2005-05-04 2007-04-16 김선태 가스상 배출물질의 발산속도를 측정하기 위하여 반도체센서를 사용하는 챔버 시스템
US20070261559A1 (en) * 2006-05-09 2007-11-15 Maroulis Peter J Analysis of a reactive gas such as silane for particle generating impurities
US8510272B2 (en) 2007-04-20 2013-08-13 General Electric Company Decision support response systems and methods
JP4973937B2 (ja) * 2007-08-24 2012-07-11 オルガノ株式会社 高圧流体中の微粒子測定システムおよび微粒子測定方法
JP4997568B2 (ja) * 2007-08-24 2012-08-08 オルガノ株式会社 高圧二酸化炭素の微粒子測定システムおよび微粒子測定方法
GB0808385D0 (en) * 2008-05-08 2008-06-18 Naneum Ltd A condensation apparatus
CN102252953B (zh) * 2010-05-21 2013-07-03 武汉新芯集成电路制造有限公司 用于液体颗粒测试的适配装置
JP5690188B2 (ja) * 2011-03-31 2015-03-25 大陽日酸株式会社 モノシランガスの供給方法
DE102012005719A1 (de) * 2012-03-20 2013-09-26 Hydac Accessories Gmbh Prüfvorrichtung zum Ermitteln der Partikelbelastung von unter einem hohen Druck stehendem Wasserstoff
JP2015036658A (ja) * 2013-08-14 2015-02-23 大陽日酸株式会社 試料ガス中の金属のサンプリング方法およびサンプリング装置
FR3010482B1 (fr) * 2013-09-12 2015-10-16 Air Liquide Dispositif d'echantillonnage de gaz et station de remplissage comprenant un tel dispositif
JP2018512581A (ja) * 2015-03-12 2018-05-17 プロフタガレン アクチエボラグＰｒｏｖｔａｇａｒｅｎ 流体流中の粒子および気相の有機および非有機成分の能動的または受動的なサンプリングの方法
JP6790691B2 (ja) * 2015-10-05 2020-11-25 日本製鉄株式会社 微粒子分析方法
EP3223181B1 (en) 2016-03-24 2019-12-18 Sofradim Production System and method of generating a model and simulating an effect on a surgical repair site
KR101798601B1 (ko) * 2016-09-12 2017-11-16 연세대학교 산학협력단 포터블 바이오 에어로졸 포집 장치 및 분석방법
DE102017006063A1 (de) * 2017-06-27 2018-12-27 Hydac Accessories Gmbh Prüfvorrichtung zum Ermitteln der Partikelbelastung von unter einem hohen Druck stehendem Wasserstoff
CN107436269B (zh) * 2017-09-14 2023-11-17 辽宁工程技术大学 一种挥发性颗粒物浓度检测装置、控制系统及方法
CN110880445B (zh) * 2018-09-06 2025-04-18 同方威视技术股份有限公司 一种基于脉冲采样的离子迁移谱仪及嗅探装置
US12270748B2 (en) 2018-09-12 2025-04-08 Lam Research Corporation Method and apparatus for measuring particles
CN109838686B (zh) * 2019-02-14 2025-01-28 昊华气体有限公司 一种钢瓶处理系统及其使用方法和应用
JP7045348B2 (ja) * 2019-05-21 2022-03-31 Ckd株式会社 フィルタ装置
CN110187067B (zh) * 2019-06-21 2024-03-22 上海至纯系统集成有限公司 一种水氧颗粒自动分析系统及其分析方法
CN116907927B (zh) * 2023-09-13 2023-11-14 上海兄弟微电子技术有限公司 一种半导体气体管道固体颗粒测试的气体取样装置

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385374B (zh) * 2009-01-21 2013-02-11 Taiwan Textile Res Inst 檢測裝置及檢測方法
TWI712774B (zh) * 2019-06-27 2020-12-11 鄭慶煥 用於量測氣體的裝置及用於量測氣體的方法

Also Published As

Publication number Publication date
KR100935384B1 (ko) 2010-01-06
EP1688731A1 (en) 2006-08-09
KR20070121631A (ko) 2007-12-27
KR100846408B1 (ko) 2008-07-16
TW200632303A (en) 2006-09-16
JP2006215035A (ja) 2006-08-17
KR20060093031A (ko) 2006-08-23
KR20080002724A (ko) 2008-01-04

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MM4A Annulment or lapse of patent due to non-payment of fees