JP2006182560A5 - - Google Patents

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Publication number
JP2006182560A5
JP2006182560A5 JP2005174727A JP2005174727A JP2006182560A5 JP 2006182560 A5 JP2006182560 A5 JP 2006182560A5 JP 2005174727 A JP2005174727 A JP 2005174727A JP 2005174727 A JP2005174727 A JP 2005174727A JP 2006182560 A5 JP2006182560 A5 JP 2006182560A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005174727A
Other languages
Japanese (ja)
Other versions
JP4754885B2 (ja
JP2006182560A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005174727A priority Critical patent/JP4754885B2/ja
Priority claimed from JP2005174727A external-priority patent/JP4754885B2/ja
Priority to TW094139893A priority patent/TWI272235B/zh
Priority to KR1020050110974A priority patent/KR100730037B1/ko
Publication of JP2006182560A publication Critical patent/JP2006182560A/ja
Publication of JP2006182560A5 publication Critical patent/JP2006182560A5/ja
Application granted granted Critical
Publication of JP4754885B2 publication Critical patent/JP4754885B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005174727A 2004-11-30 2005-06-15 基板搬送装置 Active JP4754885B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005174727A JP4754885B2 (ja) 2004-11-30 2005-06-15 基板搬送装置
TW094139893A TWI272235B (en) 2004-11-30 2005-11-14 Substrate carrying device
KR1020050110974A KR100730037B1 (ko) 2004-11-30 2005-11-18 기판 반송 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004346075 2004-11-30
JP2004346075 2004-11-30
JP2005174727A JP4754885B2 (ja) 2004-11-30 2005-06-15 基板搬送装置

Publications (3)

Publication Number Publication Date
JP2006182560A JP2006182560A (ja) 2006-07-13
JP2006182560A5 true JP2006182560A5 (es) 2008-06-26
JP4754885B2 JP4754885B2 (ja) 2011-08-24

Family

ID=36735954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005174727A Active JP4754885B2 (ja) 2004-11-30 2005-06-15 基板搬送装置

Country Status (3)

Country Link
JP (1) JP4754885B2 (es)
KR (1) KR100730037B1 (es)
TW (1) TWI272235B (es)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100788876B1 (ko) * 2006-08-25 2007-12-27 주식회사 태성기연 판유리 방향전환장치
KR101303053B1 (ko) * 2006-12-27 2013-09-03 엘지디스플레이 주식회사 액정표시장치 제조 장치
JP4344755B2 (ja) * 2007-04-09 2009-10-14 株式会社日本設計工業 薄板状材料搬送用ローラユニット及び薄板状材料搬送装置
JP4900115B2 (ja) * 2007-07-27 2012-03-21 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP5125290B2 (ja) * 2007-07-27 2013-01-23 株式会社Ｉｈｉ 浮上搬送装置及び処理搬送システム
KR100924266B1 (ko) * 2008-01-18 2009-10-30 주식회사 에스에프에이 기판 이송장치
KR100959286B1 (ko) 2008-01-18 2010-05-26 주식회사 에스에프에이 기판 이송장치
JP5355056B2 (ja) * 2008-12-01 2013-11-27 株式会社妙徳 浮上装置および流体噴出体ユニット
KR200470005Y1 (ko) 2008-12-29 2013-11-21 주식회사 탑 엔지니어링 디스펜서 스테이지
JP5446403B2 (ja) * 2009-04-07 2014-03-19 株式会社Ｉｈｉ 搬送方向転換装置及び浮上搬送システム
JP2011031143A (ja) * 2009-07-30 2011-02-17 Ulvac Japan Ltd 回転機能付きステージ
JP5445863B2 (ja) * 2010-08-04 2014-03-19 株式会社ダイフク 板状体搬送装置
JP5645709B2 (ja) * 2011-02-25 2014-12-24 オイレス工業株式会社 非接触搬送装置
CN103508187A (zh) * 2012-06-29 2014-01-15 江苏瑞新科技股份有限公司 一种自动翻转上料装置
KR101533370B1 (ko) * 2013-10-10 2015-07-02 이노이엔지주식회사 기판이송장치
KR102463088B1 (ko) * 2019-01-11 2022-11-02 동우 화인켐 주식회사 광학 필름 접합 방법 및 접합 장치
KR20220005790A (ko) * 2020-07-07 2022-01-14 세메스 주식회사 약액 토출 장치

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63178229A (ja) * 1987-01-20 1988-07-22 Fuji Photo Film Co Ltd ポジ型フオトレジスト組成物
JPH0333700Y2 (es) * 1987-05-07 1991-07-17
JPH08282842A (ja) * 1995-04-18 1996-10-29 Hitachi Kiden Kogyo Ltd 空気浮上式リニアモータ駆動搬送路における分岐装置
JP2000072251A (ja) * 1998-08-31 2000-03-07 Watanabe Shoko:Kk 浮上搬送装置および浮上搬送システム
JP2000340635A (ja) * 1999-05-28 2000-12-08 Orc Mfg Co Ltd 基板の搬送手段および搬送機構ならびに露光装置
JP2001085496A (ja) * 1999-09-10 2001-03-30 Daiichi Shisetsu Kogyo Kk 板状部材の搬送装置
JP3960087B2 (ja) * 2001-05-30 2007-08-15 東京エレクトロン株式会社 搬送装置
JP4249930B2 (ja) * 2002-02-06 2009-04-08 株式会社オーク製作所 予備位置決め機構およびその方法
JP4312475B2 (ja) * 2003-03-05 2009-08-12 株式会社渡辺商行 基板搬送ガイドおよび同ユニット並びに基板搬送装置
WO2004096679A1 (ja) * 2003-04-30 2004-11-11 Olympus Corporation 基板浮上装置
JP4244000B2 (ja) * 2003-08-29 2009-03-25 株式会社ダイフク 搬送装置
JP4244007B2 (ja) * 2003-11-14 2009-03-25 株式会社ダイフク 搬送装置

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