JP2006165196A - 積層配線基板及びその製造方法 - Google Patents
積層配線基板及びその製造方法 Download PDFInfo
- Publication number
- JP2006165196A JP2006165196A JP2004353236A JP2004353236A JP2006165196A JP 2006165196 A JP2006165196 A JP 2006165196A JP 2004353236 A JP2004353236 A JP 2004353236A JP 2004353236 A JP2004353236 A JP 2004353236A JP 2006165196 A JP2006165196 A JP 2006165196A
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- Prior art keywords
- wiring board
- insulating layer
- via hole
- layer
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 44
- 229910052751 metal Inorganic materials 0.000 claims abstract description 44
- 239000003990 capacitor Substances 0.000 claims abstract description 20
- 238000000034 method Methods 0.000 claims description 31
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 41
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 20
- 239000010949 copper Substances 0.000 description 18
- 229910052802 copper Inorganic materials 0.000 description 14
- 239000011889 copper foil Substances 0.000 description 14
- 238000005530 etching Methods 0.000 description 12
- 229910000679 solder Inorganic materials 0.000 description 12
- 229910052759 nickel Inorganic materials 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 9
- 239000000243 solution Substances 0.000 description 8
- 230000003071 parasitic effect Effects 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000005553 drilling Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H—ELECTRICITY
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Abstract
【解決手段】集積回路チップのバンプ電極30を挿入可能なビアホール20,141〜143をバンプ電極30と同じピッチで形成する。ビアホール20,141〜143,162内に形成された金属膜22,23はいずれかの回路層11,12,26,27と電気的に接続される。コア絶縁層10の所定領域101と、これを挟みかつ互いに対向する内側回路層11,12の所定領域112,126とにより内蔵コンデンサ32が形成される。内側回路層12内には内蔵抵抗13が形成される。
【選択図】図1L
Description
11,12 内側回路層
13 内蔵抵抗
14,16 外側絶縁層
15,17 銅箔
20,141,142,143,161,162 ビアホール
22 下層金属膜
23 上層金属膜
24 半田ペースト
26,27 外側回路層
30 バンプ電極
32 内蔵コンデンサ
100 積層配線基板
101,112,126 所定領域
111,121-124 ビアランド
125,181-183,191 穴
LB1〜LB3 レーザビーム
Claims (10)
- バンプ電極を有する集積回路チップの実装が可能な積層配線基板であって、
第1の絶縁層と、
前記第1の絶縁層の表面上に形成された第1の回路層と、
前記第1の絶縁層の裏面上に形成された第2の回路層と、
前記第1の回路層上に形成された第2の絶縁層と、
前記第2の絶縁層の表面上に形成された第3の回路層とを備え、
前記第1及び第2の絶縁層は、前記集積回路チップのバンプ電極を挿入可能な第1のビアホールを有し、
前記積層配線基板はさらに、
前記第1のビアホールの内側面上に形成され、前記第1乃至第3の回路層のうち少なくとも1つと接触する第1の導電膜を備え、
前記第2の絶縁層は、前記集積回路チップの他のバンプ電極を挿入可能な第2のビアホールを有し、かつ前記第1及び第2のビアホールは、前記集積回路チップのバンプ電極のピッチと同じピッチで形成され、
前記積層配線基板はさらに、
前記第2のビアホールの内側面上に形成され、前記第1及び第3の回路層のうち少なくとも1つと接触する第2の導電膜を備えたことを特徴とする積層配線基板。 - 請求項1に記載の積層配線基板であってさらに、
前記第1及び第2のビアホールに充填された金属ペーストを備えたことを特徴とする積層配線基板。 - 請求項1又は請求項2に記載の積層配線基板であってさらに、
前記第1及び第2の回路層のうち互いに対向する所定領域と、当該所定領域に挟まれた前記第1の絶縁層の所定領域とにより形成された内蔵コンデンサを備えたことを特徴とする積層配線基板。 - 請求項1〜請求項3のいずれか1項に記載の積層配線基板であってさらに、
前記第1又は第2の回路層内に形成された内蔵抵抗を備えたことを特徴とする積層配線基板。 - 請求項1〜請求項4のいずれか1項に記載の積層配線基板であって、
前記第1のビアホールは、前記第2の絶縁層に形成された第1のサブビアホールと、前記第1の絶縁層に形成され、前記第1のサブビアホールよりも小径の第2のサブビアホールとからなることを特徴とする積層配線基板。 - バンプ電極を有する集積回路チップの実装が可能な積層配線基板の製造方法であって、
第1の絶縁層の表裏面上にそれぞれ第1及び第2の回路層を形成する工程と、
前記第1の回路層上に第2の絶縁層を形成する工程と、
前記第2の絶縁層の表面上に第3の回路層を形成する工程と、
前記集積回路チップのバンプ電極を挿入可能な第1のビアホールを前記第1及び第2の絶縁層に、前記集積回路チップの他のバンプ電極を挿入可能な第2のビアホールを前記第2の絶縁層に、前記集積回路チップのバンプ電極のピッチと同じピッチで形成する工程と、
前記第1乃至第3の回路層のうち少なくとも1つと接触する第1の導電膜を前記第1のビアホールの内側面上に、前記第1及び第3の回路層のうち少なくとも1つと接触する第2の導電膜を前記第2のビアホールの内側面上に形成する工程とを含むことを特徴とする積層配線基板の製造方法。 - 請求項6に記載の積層配線基板の製造方法であってさらに、
前記第1及び第2のビアホールを金属ペーストで充填する工程を含むことを特徴とする積層配線基板の製造方法。 - 請求項6又は請求項7に記載の積層配線基板の製造方法であって、
前記第1及び第2の回路層を形成する工程は、内蔵コンデンサを形成するために、前記第1の絶縁層の所定領域を挟むように前記第1及び第2の回路層のうち所定領域が互いに対向するように前記第1及び第2の回路層を形成することを特徴とする積層配線基板の製造方法。 - 請求項6〜請求項8のいずれか1項に記載の積層配線基板の製造方法であってさらに、
内蔵抵抗を前記第1又は第2の回路層内に形成する工程を含むことを特徴とする積層配線基板の製造方法。 - 請求項6〜請求項9のいずれか1項に記載の積層配線基板の製造方法であって、
前記第3の回路層は第1の穴を有し、前記第1の回路層は前記第1の穴と対向する位置に前記第1の穴よりも小さい第2の穴を有し、
前記第1のビアホールを形成する工程は、前記第3の回路層の上方からレーザビームを照射することにより、前記第3の回路層をマスクとして前記第1の穴と連通する第1のサブビアホールを前記第2の絶縁層に形成し、さらに前記第1の回路層をマスクとして前記第2の穴と連通する第2のサブビアホールを前記第2の絶縁層に形成することを特徴とする積層配線基板の製造方法。
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2004
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2005
- 2005-12-06 US US11/164,791 patent/US7605075B2/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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JP4608297B2 (ja) | 2011-01-12 |
US7605075B2 (en) | 2009-10-20 |
US20060226537A1 (en) | 2006-10-12 |
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