JP2006093644A5 - - Google Patents

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Publication number
JP2006093644A5
JP2006093644A5 JP2005010420A JP2005010420A JP2006093644A5 JP 2006093644 A5 JP2006093644 A5 JP 2006093644A5 JP 2005010420 A JP2005010420 A JP 2005010420A JP 2005010420 A JP2005010420 A JP 2005010420A JP 2006093644 A5 JP2006093644 A5 JP 2006093644A5
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JP
Japan
Prior art keywords
laser beams
laser
photosensitive film
exposure
interference light
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JP2005010420A
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English (en)
Japanese (ja)
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JP2006093644A (ja
JP4389791B2 (ja
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Priority claimed from JP2005010420A external-priority patent/JP4389791B2/ja
Priority to JP2005010420A priority Critical patent/JP4389791B2/ja
Priority to KR1020050035816A priority patent/KR100693024B1/ko
Priority to TW094117695A priority patent/TWI288862B/zh
Priority to US11/153,553 priority patent/US7867692B2/en
Priority to EP05015880A priority patent/EP1630612A3/en
Publication of JP2006093644A publication Critical patent/JP2006093644A/ja
Publication of JP2006093644A5 publication Critical patent/JP2006093644A5/ja
Publication of JP4389791B2 publication Critical patent/JP4389791B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2005010420A 2004-08-25 2005-01-18 微細構造体の製造方法および露光装置 Expired - Fee Related JP4389791B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005010420A JP4389791B2 (ja) 2004-08-25 2005-01-18 微細構造体の製造方法および露光装置
KR1020050035816A KR100693024B1 (ko) 2004-08-25 2005-04-29 미세 구조체의 제조 방법, 노광 장치, 전자 기기
TW094117695A TWI288862B (en) 2004-08-25 2005-05-30 Method for manufacturing a microstructure, exposure device, and electronic apparatus
US11/153,553 US7867692B2 (en) 2004-08-25 2005-06-16 Method for manufacturing a microstructure, exposure device, and electronic apparatus
EP05015880A EP1630612A3 (en) 2004-08-25 2005-07-21 Method for manufacturing a microstructure, exposure device, and electronic apparatus

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004245161 2004-08-25
JP2004245169 2004-08-25
JP2004245177 2004-08-25
JP2005010420A JP4389791B2 (ja) 2004-08-25 2005-01-18 微細構造体の製造方法および露光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009192876A Division JP4894899B2 (ja) 2004-08-25 2009-08-24 微細構造体の製造方法

Publications (3)

Publication Number Publication Date
JP2006093644A JP2006093644A (ja) 2006-04-06
JP2006093644A5 true JP2006093644A5 (enExample) 2006-10-12
JP4389791B2 JP4389791B2 (ja) 2009-12-24

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Family Applications (1)

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JP2005010420A Expired - Fee Related JP4389791B2 (ja) 2004-08-25 2005-01-18 微細構造体の製造方法および露光装置

Country Status (5)

Country Link
US (1) US7867692B2 (enExample)
EP (1) EP1630612A3 (enExample)
JP (1) JP4389791B2 (enExample)
KR (1) KR100693024B1 (enExample)
TW (1) TWI288862B (enExample)

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JP6547283B2 (ja) * 2014-12-02 2019-07-24 ウシオ電機株式会社 基板上構造体の製造方法
JP6528394B2 (ja) * 2014-12-02 2019-06-12 ウシオ電機株式会社 基板上構造体の製造方法
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JP2017054006A (ja) * 2015-09-09 2017-03-16 ウシオ電機株式会社 光照射方法、基板上構造体の製造方法および基板上構造体
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KR102742638B1 (ko) * 2019-09-26 2024-12-16 주식회사 엘지화학 화각 제어용 복합구조필름, 이의 제조방법 및 이를 이용한 영상표시장치
CN112835263B (zh) * 2019-11-22 2024-05-24 北京理工大学 一种液晶计算全息图的单步曝光方法及装置
CN112731776B (zh) * 2021-01-14 2023-06-20 之江实验室 一种双掩膜高通量激光超分辨激光直写方法和装置
CN112965288B (zh) * 2021-02-02 2022-04-26 深圳市华星光电半导体显示技术有限公司 内置偏光片的制备方法及偏光片
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