JP2006047025A5 - - Google Patents

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Publication number
JP2006047025A5
JP2006047025A5 JP2004226149A JP2004226149A JP2006047025A5 JP 2006047025 A5 JP2006047025 A5 JP 2006047025A5 JP 2004226149 A JP2004226149 A JP 2004226149A JP 2004226149 A JP2004226149 A JP 2004226149A JP 2006047025 A5 JP2006047025 A5 JP 2006047025A5
Authority
JP
Japan
Prior art keywords
inspection apparatus
mounting table
cylindrical body
load sensor
elevating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004226149A
Other languages
English (en)
Japanese (ja)
Other versions
JP4809594B2 (ja
JP2006047025A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004226149A external-priority patent/JP4809594B2/ja
Priority to JP2004226149A priority Critical patent/JP4809594B2/ja
Priority to TW094122155A priority patent/TWI394955B/zh
Priority to KR1020077002635A priority patent/KR20070028611A/ko
Priority to US11/659,085 priority patent/US7688096B2/en
Priority to PCT/JP2005/013826 priority patent/WO2006013773A1/ja
Priority to KR1020087017213A priority patent/KR20080081041A/ko
Publication of JP2006047025A publication Critical patent/JP2006047025A/ja
Publication of JP2006047025A5 publication Critical patent/JP2006047025A5/ja
Publication of JP4809594B2 publication Critical patent/JP4809594B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004226149A 2004-08-02 2004-08-02 検査装置 Expired - Fee Related JP4809594B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2004226149A JP4809594B2 (ja) 2004-08-02 2004-08-02 検査装置
TW094122155A TWI394955B (zh) 2004-08-02 2005-06-30 Contact load measuring device and inspection device
PCT/JP2005/013826 WO2006013773A1 (ja) 2004-08-02 2005-07-28 接触荷重測定装置および検査装置
US11/659,085 US7688096B2 (en) 2004-08-02 2005-07-28 Contact load measuring apparatus and inspecting apparatus
KR1020077002635A KR20070028611A (ko) 2004-08-02 2005-07-28 접촉 하중 측정 장치 및 검사 장치
KR1020087017213A KR20080081041A (ko) 2004-08-02 2005-07-28 접촉 하중 측정 장치 및 검사 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004226149A JP4809594B2 (ja) 2004-08-02 2004-08-02 検査装置

Publications (3)

Publication Number Publication Date
JP2006047025A JP2006047025A (ja) 2006-02-16
JP2006047025A5 true JP2006047025A5 (https=) 2008-08-21
JP4809594B2 JP4809594B2 (ja) 2011-11-09

Family

ID=35787061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004226149A Expired - Fee Related JP4809594B2 (ja) 2004-08-02 2004-08-02 検査装置

Country Status (5)

Country Link
US (1) US7688096B2 (https=)
JP (1) JP4809594B2 (https=)
KR (2) KR20070028611A (https=)
TW (1) TWI394955B (https=)
WO (1) WO2006013773A1 (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK2302070T3 (da) 2005-06-23 2012-11-26 Keygene Nv Strategier til identifikation og detektion af polymorfismer med højt gennemløb
WO2007037678A2 (en) 2005-09-29 2007-04-05 Keygene N.V. High throughput screening of mutagenized populations
CN103937899B (zh) 2005-12-22 2017-09-08 凯津公司 用于基于aflp的高通量多态性检测的方法
TWI490513B (zh) * 2006-12-29 2015-07-01 Intest Corp 用於使負載沿平移軸線平移之負載定位系統以及使負載達到平衡之方法
WO2008085463A1 (en) * 2006-12-29 2008-07-17 In Test Corporation Test head positioning system and method
KR100901982B1 (ko) * 2007-07-12 2009-06-08 주식회사 실트론 접착강도 시험장치
KR100936631B1 (ko) 2007-11-22 2010-01-14 주식회사 쎄믹스 웨이퍼 프로버의 ｚ축 위치 제어 장치 및 방법
JP4605232B2 (ja) * 2008-02-21 2011-01-05 株式会社デンソー 荷重センサ及びその製造方法
JP4577585B2 (ja) * 2008-03-22 2010-11-10 株式会社デンソー 荷重センサの製造方法
US8519728B2 (en) * 2008-12-12 2013-08-27 Formfactor, Inc. Compliance control methods and apparatuses
JP5083339B2 (ja) * 2010-02-04 2012-11-28 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法並びに記憶媒体
JP5529769B2 (ja) * 2011-01-13 2014-06-25 東京エレクトロン株式会社 プローブカードの熱的安定化方法及び検査装置
US8963567B2 (en) 2011-10-31 2015-02-24 International Business Machines Corporation Pressure sensing and control for semiconductor wafer probing
US8901947B2 (en) 2012-09-28 2014-12-02 Electro Scientific Industries, Inc. Probe out-of-position sensing for automated test equipment
JP6137994B2 (ja) * 2013-08-28 2017-05-31 東京エレクトロン株式会社 デバイス検査方法
CN103745943B (zh) * 2014-01-29 2016-05-25 上海华力微电子有限公司 表面颗粒检测仪量测平台
KR101975386B1 (ko) 2018-01-08 2019-09-10 주식회사 한화 관성 이동체를 구비한 제품용 검사 장치 및 이를 이용한 관성 이동체를 구비한 제품의 검사 방법
JP7374682B2 (ja) * 2019-09-17 2023-11-07 株式会社国際電気セミコンダクターサービス 抵抗率測定器、半導体装置の製造方法および抵抗率測定方法
CN113624605B (zh) * 2021-08-16 2024-06-11 陕西大工旭航电磁科技有限公司 基于电磁力加载的中应变率实验装置
CN121430880A (zh) * 2024-07-30 2026-01-30 合肥京东方星宇科技有限公司 测试装置及电子元件的转移设备
CN119043561A (zh) * 2024-09-26 2024-11-29 宸光(常州)新材料科技有限公司 水压检测装置及检测方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3328148B2 (ja) * 1996-11-15 2002-09-24 株式会社東京精密 プロービング方法およびプローバ
JP4009801B2 (ja) * 1998-11-09 2007-11-21 日本精工株式会社 転がり軸受の予圧量測定装置
JP2000260852A (ja) * 1999-03-11 2000-09-22 Tokyo Electron Ltd 検査ステージ及び検査装置
US6650135B1 (en) * 2000-06-29 2003-11-18 Motorola, Inc. Measurement chuck having piezoelectric elements and method
JP2001358204A (ja) * 2000-06-15 2001-12-26 Tokyo Electron Ltd 検査ステージ
JP4782953B2 (ja) 2001-08-06 2011-09-28 東京エレクトロン株式会社 プローブカード特性測定装置、プローブ装置及びプローブ方法
JP4827339B2 (ja) * 2001-08-29 2011-11-30 帝国ピストンリング株式会社 摩擦力測定装置
JP2003168707A (ja) * 2001-11-30 2003-06-13 Tokyo Electron Ltd プローブ装置
JP2003185704A (ja) * 2001-12-17 2003-07-03 Seiko Epson Corp 電極検査装置
JP4357813B2 (ja) * 2002-08-23 2009-11-04 東京エレクトロン株式会社 プローブ装置及びプローブ方法
US7068056B1 (en) * 2005-07-18 2006-06-27 Texas Instruments Incorporated System and method for the probing of a wafer

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