JP6137994B2 - デバイス検査方法 - Google Patents
デバイス検査方法 Download PDFInfo
- Publication number
- JP6137994B2 JP6137994B2 JP2013176845A JP2013176845A JP6137994B2 JP 6137994 B2 JP6137994 B2 JP 6137994B2 JP 2013176845 A JP2013176845 A JP 2013176845A JP 2013176845 A JP2013176845 A JP 2013176845A JP 6137994 B2 JP6137994 B2 JP 6137994B2
- Authority
- JP
- Japan
- Prior art keywords
- motor
- electrode
- probe
- moving force
- inspection method
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 80
- 238000007689 inspection Methods 0.000 title claims description 55
- 239000000523 sample Substances 0.000 claims description 110
- 229910000679 solder Inorganic materials 0.000 claims description 61
- 238000005259 measurement Methods 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 11
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 37
- 230000008569 process Effects 0.000 description 36
- 230000007246 mechanism Effects 0.000 description 11
- 230000006870 function Effects 0.000 description 9
- 238000012360 testing method Methods 0.000 description 9
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000013500 data storage Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/44—Modifications of instruments for temperature compensation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
- G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
- G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
- G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
- G05B19/234—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude with current or torque feedback only
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Geometry (AREA)
Description
10 プローバ
11 ステージ
17 プローブカード
19 Y方向ステージ
20 X方向ステージ
21 Z方向移動部
27 半田バンプ
28、31 プローブ電極
29 コントローラ
30 係合部
Claims (8)
- 電極を有するデバイスが形成された基板を載置してモータによって移動可能な載置台と、該載置台に対向するように配置されるプローブカードとを備え、前記デバイスの電極に対応して測定用電極が配置され、前記プローブカードは前記測定用電極と係合可能なプローブを有し、前記デバイスの電気的特性を測定する際に前記モータは前記載置台を移動させないようにトルクを発生する基板検査装置におけるデバイス検査方法であって、
前記プローブを前記測定用電極に係合させる電極係合ステップと、
前記電極係合ステップの後であって、前記デバイスの電気的特性を測定する際に、前記プローブ及び前記測定用電極の係合時の位置ずれに起因して生じ、且つ前記測定用電極に作用する移動力を打ち消すように前記モータがトルクを発生する移動力調整ステップと、
前記移動力調整ステップの後であって、前記デバイスの電気的特性を測定する際に前記モータが発生するトルクの最大値を所定値以下に制限するトルク制限ステップとを有し、
前記移動力調整ステップでは、前記移動力を打ち消すようにトルクを発生する前記モータに生じる負荷と基準値とを比較し、前記負荷が前記基準値よりも大きければ、前記移動力を減少させるように前記載置台を移動させ、
前記トルク制限ステップでは、前記モータが発生するトルクの最大値を前記基準値よりも大きく且つ当該基準値よりも大きい前記所定値以下に制限することを特徴とするデバイス検査方法。 - 前記デバイスの電気的特性を測定した後、前記トルクの最大値の制限を解除することを特徴とする請求項1記載のデバイス検査方法。
- 前記電極係合ステップの後であって、前記デバイスの電気的特性を測定する前において、前記プローブを前記測定用電極に係合させる際に生じた前記測定用電極へ作用する移動力を一定値以下に制限するように前記載置台を移動させることを特徴とする請求項1又は2記載のデバイス検査方法。
- 前記測定用電極は電極パッド又は半田バンプであり、前記プローブは前記測定用電極に係合可能な突起状部材からなることを特徴とする請求項1乃至3のいずれか1項に記載のデバイス検査方法。
- 前記載置台は水平面内において互いに直交する2方向のそれぞれに関して移動可能に構成され、前記基板検査装置は前記2方向のそれぞれに対応する前記モータを有することを特徴とする請求項1乃至4のいずれか1項に記載のデバイス検査方法。
- 前記所定値は前記モータの定格出力の100%以下であることを特徴とする請求項1乃至5のいずれか1項に記載のデバイス検査方法。
- 前記モータはレールに対して相対的に移動するリニアモータであることを特徴とする請求項1乃至6のいずれか1項に記載のデバイス検査方法。
- 前記モータはボールネジを介して前記載置台を移動させることを特徴とする請求項1乃至6のいずれか1項に記載のデバイス検査方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013176845A JP6137994B2 (ja) | 2013-08-28 | 2013-08-28 | デバイス検査方法 |
KR1020167007963A KR101808465B1 (ko) | 2013-08-28 | 2014-08-01 | 디바이스 검사 방법 |
US14/915,171 US9891274B2 (en) | 2013-08-28 | 2014-08-01 | Device test method |
PCT/JP2014/070956 WO2015029742A1 (ja) | 2013-08-28 | 2014-08-01 | デバイス検査方法 |
EP14839356.4A EP3041038A4 (en) | 2013-08-28 | 2014-08-01 | Device inspection method |
TW103128451A TW201522996A (zh) | 2013-08-28 | 2014-08-19 | 元件檢查方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013176845A JP6137994B2 (ja) | 2013-08-28 | 2013-08-28 | デバイス検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015046489A JP2015046489A (ja) | 2015-03-12 |
JP6137994B2 true JP6137994B2 (ja) | 2017-05-31 |
Family
ID=52586313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013176845A Expired - Fee Related JP6137994B2 (ja) | 2013-08-28 | 2013-08-28 | デバイス検査方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9891274B2 (ja) |
EP (1) | EP3041038A4 (ja) |
JP (1) | JP6137994B2 (ja) |
KR (1) | KR101808465B1 (ja) |
TW (1) | TW201522996A (ja) |
WO (1) | WO2015029742A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20200106774A (ko) | 2019-03-05 | 2020-09-15 | 세메스 주식회사 | 반도체 소자 검사 방법 및 장치 |
KR102696994B1 (ko) | 2019-03-06 | 2024-08-19 | 세메스 주식회사 | 척 구조물 및 이를 포함하는 프로브 스테이션 |
JP7317736B2 (ja) * | 2020-01-24 | 2023-07-31 | 日本発條株式会社 | 絶縁抵抗測定装置と、絶縁抵抗測定方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100296646B1 (ko) * | 1994-03-31 | 2001-10-24 | 히가시 데쓰로 | 프로우브시스템및프로우브방법 |
JP3156192B2 (ja) | 1994-04-19 | 2001-04-16 | 東京エレクトロン株式会社 | プローブ方法及びその装置 |
US20020118029A1 (en) | 1999-05-14 | 2002-08-29 | Rikihito Yamasaka | Probe card and contactor |
JP2000321303A (ja) * | 1999-05-14 | 2000-11-24 | Tokyo Electron Ltd | プローブカード及びコンタクタ |
JP4809594B2 (ja) * | 2004-08-02 | 2011-11-09 | 東京エレクトロン株式会社 | 検査装置 |
JP4999615B2 (ja) | 2007-08-31 | 2012-08-15 | 東京エレクトロン株式会社 | 検査装置及び検査方法 |
KR100936631B1 (ko) * | 2007-11-22 | 2010-01-14 | 주식회사 쎄믹스 | 웨이퍼 프로버의 z축 위치 제어 장치 및 방법 |
JP5221118B2 (ja) | 2007-12-14 | 2013-06-26 | 東京エレクトロン株式会社 | 検査装置 |
US8922229B2 (en) | 2009-06-22 | 2014-12-30 | Cascade Microtech, Inc. | Method for measurement of a power device |
JP5529769B2 (ja) * | 2011-01-13 | 2014-06-25 | 東京エレクトロン株式会社 | プローブカードの熱的安定化方法及び検査装置 |
-
2013
- 2013-08-28 JP JP2013176845A patent/JP6137994B2/ja not_active Expired - Fee Related
-
2014
- 2014-08-01 EP EP14839356.4A patent/EP3041038A4/en not_active Withdrawn
- 2014-08-01 US US14/915,171 patent/US9891274B2/en active Active
- 2014-08-01 KR KR1020167007963A patent/KR101808465B1/ko active IP Right Grant
- 2014-08-01 WO PCT/JP2014/070956 patent/WO2015029742A1/ja active Application Filing
- 2014-08-19 TW TW103128451A patent/TW201522996A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
EP3041038A4 (en) | 2017-04-05 |
KR20160048888A (ko) | 2016-05-04 |
WO2015029742A1 (ja) | 2015-03-05 |
JP2015046489A (ja) | 2015-03-12 |
TW201522996A (zh) | 2015-06-16 |
KR101808465B1 (ko) | 2017-12-12 |
EP3041038A1 (en) | 2016-07-06 |
US20160209465A1 (en) | 2016-07-21 |
US9891274B2 (en) | 2018-02-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6652361B2 (ja) | ウエハ検査装置及びウエハ検査方法 | |
TWI605650B (zh) | 用於測試晶粒接觸器之成形導線探針互連 | |
JP6423678B2 (ja) | 基板検査装置及びその制御方法 | |
JP6137994B2 (ja) | デバイス検査方法 | |
WO2017056643A1 (ja) | ウエハ検査方法及びウエハ検査装置 | |
JP2001110857A (ja) | プローブ方法及びプローブ装置 | |
JP6306389B2 (ja) | 基板検査装置 | |
KR20170022414A (ko) | 접속 구조체 및 접속 구조체 모듈, 및 이를 이용하는 프로브 카드 어셈블리 및 웨이퍼 테스트 장치 | |
JP5970218B2 (ja) | プローブ装置 | |
TW202424509A (zh) | 在探針系統的探針尖端與受測裝置之間建立接觸的方法、進行該方法的探針系統、以及引導探針系統實施該方法的儲存媒體 | |
JP2008192861A (ja) | 半導体検査装置および半導体検査方法 | |
CN108140602A (zh) | 载置台装置和探针装置 | |
JP4941169B2 (ja) | プローブカード機構 | |
JP2011108695A (ja) | 半導体検査装置、半導体装置の検査方法、及び半導体装置の検査プログラム | |
JP2008053282A (ja) | プローバ | |
JP4906412B2 (ja) | プローバ | |
JP5004454B2 (ja) | プローバ及びプローバにおける回転・移動制御方法 | |
JP2008117968A (ja) | プローバ | |
JP4902986B2 (ja) | プローバ、及び、プローバのウェハステージ加熱、又は、冷却方法 | |
KR100319898B1 (ko) | 웨이퍼의 치수인자 측정방법 및 그 장치 | |
JP2008004675A (ja) | プローバのウエハチャック | |
JP7203283B2 (ja) | 電子デバイス検査装置 | |
US12123906B2 (en) | Electronic device inspection apparatus | |
JP2019113378A (ja) | 回転角制限機構 | |
JP2018087754A (ja) | プリント配線板の検査装置及び検査方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20160404 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20170131 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170330 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170418 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170425 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6137994 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |