JP2005536053A - 金属酸化物を用いてデュアルゲートオキサイドデバイスを形成するための方法および形成されるデバイス - Google Patents
金属酸化物を用いてデュアルゲートオキサイドデバイスを形成するための方法および形成されるデバイス Download PDFInfo
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- JP2005536053A JP2005536053A JP2004529077A JP2004529077A JP2005536053A JP 2005536053 A JP2005536053 A JP 2005536053A JP 2004529077 A JP2004529077 A JP 2004529077A JP 2004529077 A JP2004529077 A JP 2004529077A JP 2005536053 A JP2005536053 A JP 2005536053A
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- gate
- metal oxide
- dielectric
- dielectric layer
- gate dielectric
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- 150000004706 metal oxides Chemical class 0.000 title claims abstract description 77
- 229910044991 metal oxide Inorganic materials 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims description 29
- 239000004065 semiconductor Substances 0.000 claims abstract description 51
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 33
- 239000003989 dielectric material Substances 0.000 claims abstract description 25
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 18
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 18
- 239000010703 silicon Substances 0.000 claims abstract description 18
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 14
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 14
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 5
- 239000000758 substrate Substances 0.000 claims description 45
- 239000000463 material Substances 0.000 claims description 16
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 8
- -1 lanthanum aluminate Chemical class 0.000 claims description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 229920005591 polysilicon Polymers 0.000 claims description 5
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052746 lanthanum Inorganic materials 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims 2
- 239000007772 electrode material Substances 0.000 abstract description 6
- 238000005530 etching Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 26
- 230000008569 process Effects 0.000 description 9
- 230000008901 benefit Effects 0.000 description 8
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 5
- 238000007254 oxidation reaction Methods 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 4
- 238000002955 isolation Methods 0.000 description 3
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical class [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910001928 zirconium oxide Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- VYBYZVVRYQDCGQ-UHFFFAOYSA-N alumane;hafnium Chemical compound [AlH3].[Hf] VYBYZVVRYQDCGQ-UHFFFAOYSA-N 0.000 description 1
- 238000000231 atomic layer deposition Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 210000001217 buttock Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/823462—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
- H01L21/31616—Deposition of Al2O3
- H01L21/3162—Deposition of Al2O3 on a silicon body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
- H01L28/56—Capacitors with a dielectric comprising a perovskite structure material the dielectric comprising two or more layers, e.g. comprising buffer layers, seed layers, gradient layers
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/981—Utilizing varying dielectric thickness
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/219,522 US6787421B2 (en) | 2002-08-15 | 2002-08-15 | Method for forming a dual gate oxide device using a metal oxide and resulting device |
PCT/US2003/018939 WO2004017403A1 (en) | 2002-08-15 | 2003-06-16 | Method for forming a dual gate oxide device using a metal oxide and resulting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005536053A true JP2005536053A (ja) | 2005-11-24 |
JP2005536053A5 JP2005536053A5 (zh) | 2006-07-20 |
Family
ID=31714754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004529077A Pending JP2005536053A (ja) | 2002-08-15 | 2003-06-16 | 金属酸化物を用いてデュアルゲートオキサイドデバイスを形成するための方法および形成されるデバイス |
Country Status (7)
Country | Link |
---|---|
US (1) | US6787421B2 (zh) |
JP (1) | JP2005536053A (zh) |
KR (1) | KR20050054920A (zh) |
CN (1) | CN1675759A (zh) |
AU (1) | AU2003285819A1 (zh) |
TW (1) | TW200414529A (zh) |
WO (1) | WO2004017403A1 (zh) |
Cited By (3)
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WO2010150332A1 (ja) * | 2009-06-24 | 2010-12-29 | パナソニック株式会社 | 半導体装置及びその製造方法 |
CN102332398A (zh) * | 2011-10-28 | 2012-01-25 | 上海华力微电子有限公司 | 一种双高k栅介质/金属栅结构的制作方法 |
WO2012035684A1 (ja) * | 2010-09-14 | 2012-03-22 | パナソニック株式会社 | 半導体装置及びその製造方法 |
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US7041562B2 (en) * | 2003-10-29 | 2006-05-09 | Freescale Semiconductor, Inc. | Method for forming multiple gate oxide thickness utilizing ashing and cleaning |
US6979623B2 (en) * | 2003-12-17 | 2005-12-27 | Texas Instruments Incorporated | Method for fabricating split gate transistor device having high-k dielectrics |
KR20050070837A (ko) * | 2003-12-31 | 2005-07-07 | 동부아남반도체 주식회사 | 금속 옥사이드 반도체 소자의 플라즈마 손상방지를 위한식각방법 |
US7115947B2 (en) * | 2004-03-18 | 2006-10-03 | International Business Machines Corporation | Multiple dielectric finfet structure and method |
US20050250258A1 (en) * | 2004-05-04 | 2005-11-10 | Metz Matthew V | Method for making a semiconductor device having a high-k gate dielectric layer and a metal gate electrode |
US7227205B2 (en) * | 2004-06-24 | 2007-06-05 | International Business Machines Corporation | Strained-silicon CMOS device and method |
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US7144784B2 (en) * | 2004-07-29 | 2006-12-05 | Freescale Semiconductor, Inc. | Method of forming a semiconductor device and structure thereof |
US6946349B1 (en) * | 2004-08-09 | 2005-09-20 | Chartered Semiconductor Manufacturing Ltd. | Method for integrating a SONOS gate oxide transistor into a logic/analog integrated circuit having several gate oxide thicknesses |
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US7494939B2 (en) | 2004-08-31 | 2009-02-24 | Micron Technology, Inc. | Methods for forming a lanthanum-metal oxide dielectric layer |
US7588988B2 (en) | 2004-08-31 | 2009-09-15 | Micron Technology, Inc. | Method of forming apparatus having oxide films formed using atomic layer deposition |
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US20060088962A1 (en) * | 2004-10-22 | 2006-04-27 | Herman Gregory S | Method of forming a solution processed transistor having a multilayer dielectric |
US7235501B2 (en) | 2004-12-13 | 2007-06-26 | Micron Technology, Inc. | Lanthanum hafnium oxide dielectrics |
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US10002939B1 (en) | 2017-02-16 | 2018-06-19 | International Business Machines Corporation | Nanosheet transistors having thin and thick gate dielectric material |
CN108630605B (zh) | 2017-03-22 | 2020-12-18 | 中芯国际集成电路制造(上海)有限公司 | 半导体装置及其制造方法 |
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US6320238B1 (en) | 1996-12-23 | 2001-11-20 | Agere Systems Guardian Corp. | Gate structure for integrated circuit fabrication |
US6358819B1 (en) | 1998-12-15 | 2002-03-19 | Lsi Logic Corporation | Dual gate oxide process for deep submicron ICS |
US6297539B1 (en) | 1999-07-19 | 2001-10-02 | Sharp Laboratories Of America, Inc. | Doped zirconia, or zirconia-like, dielectric film transistor structure and deposition method for same |
JP2001060630A (ja) * | 1999-08-23 | 2001-03-06 | Nec Corp | 半導体装置の製造方法 |
US6448127B1 (en) * | 2000-01-14 | 2002-09-10 | Advanced Micro Devices, Inc. | Process for formation of ultra-thin base oxide in high k/oxide stack gate dielectrics of mosfets |
JP2001284463A (ja) | 2000-03-30 | 2001-10-12 | Nec Corp | 半導体装置およびその製造方法 |
JP2001298095A (ja) * | 2000-04-13 | 2001-10-26 | Nec Corp | Mos型半導体装置の製造方法 |
TW466606B (en) * | 2000-04-20 | 2001-12-01 | United Microelectronics Corp | Manufacturing method for dual metal gate electrode |
JP2002009168A (ja) * | 2000-06-19 | 2002-01-11 | Nec Corp | 半導体装置及びその製造方法 |
JP2002009169A (ja) * | 2000-06-20 | 2002-01-11 | Nec Corp | 半導体装置とその製造方法 |
US6268251B1 (en) | 2000-07-12 | 2001-07-31 | Chartered Semiconductor Manufacturing Inc. | Method of forming MOS/CMOS devices with dual or triple gate oxide |
JP2002134739A (ja) * | 2000-10-19 | 2002-05-10 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
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- 2003-06-16 KR KR1020057002591A patent/KR20050054920A/ko not_active Application Discontinuation
- 2003-07-15 TW TW092119272A patent/TW200414529A/zh unknown
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2010150332A1 (ja) * | 2009-06-24 | 2010-12-29 | パナソニック株式会社 | 半導体装置及びその製造方法 |
JP2011009313A (ja) * | 2009-06-24 | 2011-01-13 | Panasonic Corp | 半導体装置及びその製造方法 |
WO2012035684A1 (ja) * | 2010-09-14 | 2012-03-22 | パナソニック株式会社 | 半導体装置及びその製造方法 |
JP2012064648A (ja) * | 2010-09-14 | 2012-03-29 | Panasonic Corp | 半導体装置及びその製造方法 |
CN102332398A (zh) * | 2011-10-28 | 2012-01-25 | 上海华力微电子有限公司 | 一种双高k栅介质/金属栅结构的制作方法 |
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US20040032001A1 (en) | 2004-02-19 |
AU2003285819A1 (en) | 2004-03-03 |
US6787421B2 (en) | 2004-09-07 |
CN1675759A (zh) | 2005-09-28 |
WO2004017403A1 (en) | 2004-02-26 |
KR20050054920A (ko) | 2005-06-10 |
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