JP2005529487A5 - - Google Patents

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Publication number
JP2005529487A5
JP2005529487A5 JP2004511910A JP2004511910A JP2005529487A5 JP 2005529487 A5 JP2005529487 A5 JP 2005529487A5 JP 2004511910 A JP2004511910 A JP 2004511910A JP 2004511910 A JP2004511910 A JP 2004511910A JP 2005529487 A5 JP2005529487 A5 JP 2005529487A5
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JP
Japan
Prior art keywords
cleaning composition
hydroxide
composition according
cleaning
organic solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004511910A
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English (en)
Japanese (ja)
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JP2005529487A (ja
JP4304154B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/016828 external-priority patent/WO2003104900A2/en
Publication of JP2005529487A publication Critical patent/JP2005529487A/ja
Publication of JP2005529487A5 publication Critical patent/JP2005529487A5/ja
Application granted granted Critical
Publication of JP4304154B2 publication Critical patent/JP4304154B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004511910A 2002-06-07 2003-05-27 酸化剤および有機溶媒を含有するマイクロエレクトロニクス洗浄組成物 Expired - Fee Related JP4304154B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US38680002P 2002-06-07 2002-06-07
PCT/US2003/016828 WO2003104900A2 (en) 2002-06-07 2003-05-27 Microelectronic cleaning compositions containing oxidizers and organic solvents

Publications (3)

Publication Number Publication Date
JP2005529487A JP2005529487A (ja) 2005-09-29
JP2005529487A5 true JP2005529487A5 (enExample) 2007-05-24
JP4304154B2 JP4304154B2 (ja) 2009-07-29

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ID=29736216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004511910A Expired - Fee Related JP4304154B2 (ja) 2002-06-07 2003-05-27 酸化剤および有機溶媒を含有するマイクロエレクトロニクス洗浄組成物

Country Status (17)

Country Link
US (1) US7419945B2 (enExample)
EP (2) EP1520211A2 (enExample)
JP (1) JP4304154B2 (enExample)
KR (1) KR100958069B1 (enExample)
CN (2) CN102061228B (enExample)
AU (1) AU2003238773A1 (enExample)
BR (1) BR0311827A (enExample)
CA (1) CA2488735A1 (enExample)
IL (1) IL165580A (enExample)
IN (1) IN2004CH02761A (enExample)
MY (1) MY139208A (enExample)
NO (1) NO20050076L (enExample)
PL (1) PL208299B1 (enExample)
RS (1) RS50930B (enExample)
TW (1) TWI322827B (enExample)
WO (1) WO2003104900A2 (enExample)
ZA (1) ZA200409621B (enExample)

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KR102799406B1 (ko) 2019-01-11 2025-04-22 버슘머트리얼즈 유에스, 엘엘씨 산화하프늄 부식 억제제
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TWI824299B (zh) * 2020-09-22 2023-12-01 美商恩特葛瑞斯股份有限公司 蝕刻劑組合物
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