JP2005529341A - サンプルを含む流体のsem検査のための方法 - Google Patents

サンプルを含む流体のsem検査のための方法 Download PDF

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Publication number
JP2005529341A
JP2005529341A JP2004511867A JP2004511867A JP2005529341A JP 2005529341 A JP2005529341 A JP 2005529341A JP 2004511867 A JP2004511867 A JP 2004511867A JP 2004511867 A JP2004511867 A JP 2004511867A JP 2005529341 A JP2005529341 A JP 2005529341A
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Japan
Prior art keywords
sample
visualizing
scanning
environment according
moist environment
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Pending
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JP2004511867A
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English (en)
Japanese (ja)
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JP2005529341A5 (enExample
Inventor
ベハー,ベレッド
ネチュスタン,アモッツ
クリーガー,ヨーゼフ
ギレアーディ,オファー
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クアントミックス・リミテッド
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Priority claimed from IL15005502A external-priority patent/IL150055A0/xx
Priority claimed from IL15005402A external-priority patent/IL150054A0/xx
Application filed by クアントミックス・リミテッド filed Critical クアントミックス・リミテッド
Publication of JP2005529341A publication Critical patent/JP2005529341A/ja
Publication of JP2005529341A5 publication Critical patent/JP2005529341A5/ja
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
    • B01L3/5085Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above for multiple samples, e.g. microtitration plates
    • B01L3/50855Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above for multiple samples, e.g. microtitration plates using modular assemblies of strips or of individual wells
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/508Containers for the purpose of retaining a material to be analysed, e.g. test tubes rigid containers not provided for above
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/244Detectors; Associated components or circuits therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/06Fluid handling related problems
    • B01L2200/0689Sealing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/04Closures and closing means
    • B01L2300/041Connecting closures to device or container
    • B01L2300/042Caps; Plugs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/06Auxiliary integrated devices, integrated components
    • B01L2300/0627Sensor or part of a sensor is integrated
    • B01L2300/0654Lenses; Optical fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/08Geometry, shape and general structure
    • B01L2300/0809Geometry, shape and general structure rectangular shaped
    • B01L2300/0829Multi-well plates; Microtitration plates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/36Embedding or analogous mounting of samples
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2002Controlling environment of sample
    • H01J2237/2003Environmental cells
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2005Seal mechanisms
    • H01J2237/2006Vacuum seals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/201Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated for mounting multiple objects
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/2602Details
    • H01J2237/2605Details operating at elevated pressures, e.g. atmosphere
    • H01J2237/2608Details operating at elevated pressures, e.g. atmosphere with environmental specimen chamber

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
JP2004511867A 2002-06-05 2003-06-01 サンプルを含む流体のsem検査のための方法 Pending JP2005529341A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IL15005502A IL150055A0 (en) 2002-06-05 2002-06-05 Automation compatible devices for scanning electron microscopy imaging of samples in a wet environment
IL15005402A IL150054A0 (en) 2002-06-05 2002-06-05 Device for fluorescent imaging of biological samples using a scanning electron microscope and fluorescent or scintillation markers
US39374702P 2002-07-08 2002-07-08
US44880803P 2003-02-20 2003-02-20
PCT/IL2003/000457 WO2003104848A2 (en) 2002-06-05 2003-06-01 Methods for sem inspection of fluid containing samples

Publications (2)

Publication Number Publication Date
JP2005529341A true JP2005529341A (ja) 2005-09-29
JP2005529341A5 JP2005529341A5 (enExample) 2006-07-20

Family

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Family Applications (1)

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JP2004511867A Pending JP2005529341A (ja) 2002-06-05 2003-06-01 サンプルを含む流体のsem検査のための方法

Country Status (5)

Country Link
US (2) US7230242B2 (enExample)
EP (1) EP1509761A2 (enExample)
JP (1) JP2005529341A (enExample)
AU (2) AU2003231893A1 (enExample)
WO (2) WO2003104848A2 (enExample)

Cited By (12)

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JP2007292702A (ja) * 2006-04-27 2007-11-08 Jeol Ltd 試料検査装置及び試料検査方法並びに試料検査システム
JP2008145110A (ja) * 2006-12-06 2008-06-26 Jeol Ltd 試料検査方法及び試料検査装置
JP2008153086A (ja) * 2006-12-19 2008-07-03 Jeol Ltd 試料検査装置及び試料検査方法並びに試料検査システム
JP2008210765A (ja) * 2007-01-31 2008-09-11 Jeol Ltd 試料保持体、試料検査装置及び試料検査方法、並びに試料保持体の製造方法
JP2011043417A (ja) * 2009-08-21 2011-03-03 Shimadzu Corp 電子線マイクロアナライザ
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KR101743146B1 (ko) 2015-12-24 2017-06-15 강원대학교산학협력단 원자간력 현미경용 시편 이송장치
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JP2018137231A (ja) * 2018-03-23 2018-08-30 株式会社日立ハイテクノロジーズ 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材
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