JP2005501405A5 - - Google Patents
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- Publication number
- JP2005501405A5 JP2005501405A5 JP2003522978A JP2003522978A JP2005501405A5 JP 2005501405 A5 JP2005501405 A5 JP 2005501405A5 JP 2003522978 A JP2003522978 A JP 2003522978A JP 2003522978 A JP2003522978 A JP 2003522978A JP 2005501405 A5 JP2005501405 A5 JP 2005501405A5
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- support
- component according
- manufacturing
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims 38
- 230000003287 optical effect Effects 0.000 claims 8
- 238000000034 method Methods 0.000 claims 7
- 239000004065 semiconductor Substances 0.000 claims 7
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 238000000059 patterning Methods 0.000 claims 6
- 239000011521 glass Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 3
- 125000006850 spacer group Chemical group 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 2
- 238000001312 dry etching Methods 0.000 claims 2
- 229920006332 epoxy adhesive Polymers 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 2
- 238000000227 grinding Methods 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 238000004377 microelectronic Methods 0.000 claims 2
- 238000005240 physical vapour deposition Methods 0.000 claims 2
- 238000007747 plating Methods 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 2
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- 238000005476 soldering Methods 0.000 claims 2
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 2
- 238000003631 wet chemical etching Methods 0.000 claims 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000006260 foam Substances 0.000 claims 1
- 239000011494 foam glass Substances 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000004033 plastic Substances 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910000679 solder Inorganic materials 0.000 claims 1
- 229920002994 synthetic fiber Polymers 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10141571A DE10141571B8 (de) | 2001-08-24 | 2001-08-24 | Verfahren zum Zusammenbau eines Halbleiterbauelements und damit hergestellte integrierte Schaltungsanordnung, die für dreidimensionale, mehrschichtige Schaltungen geeignet ist |
| DE10141558 | 2001-08-24 | ||
| DE10222960A DE10222960A1 (de) | 2002-05-23 | 2002-05-23 | Verfahren zur Herstellung von elektronischen Bauelementen |
| PCT/EP2002/009497 WO2003019617A2 (de) | 2001-08-24 | 2002-08-26 | Verfahren zur herstellung von elektronischen bauelementen |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005501405A JP2005501405A (ja) | 2005-01-13 |
| JP2005501405A5 true JP2005501405A5 (enExample) | 2005-12-22 |
| JP4571405B2 JP4571405B2 (ja) | 2010-10-27 |
Family
ID=27214576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003522978A Expired - Fee Related JP4571405B2 (ja) | 2001-08-24 | 2002-08-26 | 電子部品の作製方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (2) | US7160478B2 (enExample) |
| EP (1) | EP1419530B1 (enExample) |
| JP (1) | JP4571405B2 (enExample) |
| KR (2) | KR100986816B1 (enExample) |
| AT (1) | ATE369626T1 (enExample) |
| AU (1) | AU2002342623A1 (enExample) |
| DE (1) | DE50210653D1 (enExample) |
| SG (1) | SG161099A1 (enExample) |
| WO (1) | WO2003019617A2 (enExample) |
Families Citing this family (51)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7224856B2 (en) * | 2001-10-23 | 2007-05-29 | Digital Optics Corporation | Wafer based optical chassis and associated methods |
| US7074638B2 (en) | 2002-04-22 | 2006-07-11 | Fuji Photo Film Co., Ltd. | Solid-state imaging device and method of manufacturing said solid-state imaging device |
| EP1990829A3 (en) * | 2002-07-29 | 2009-11-11 | FUJIFILM Corporation | Solid-state imaging device and method of manufacturing the same |
| JP3896951B2 (ja) | 2002-11-13 | 2007-03-22 | 松下電器産業株式会社 | 光通信用送受光モジュール |
| JP2005241457A (ja) * | 2004-02-26 | 2005-09-08 | Hamamatsu Photonics Kk | 赤外線センサ及びその製造方法 |
| JP4670251B2 (ja) * | 2004-04-13 | 2011-04-13 | 日亜化学工業株式会社 | 発光装置 |
| TWM271321U (en) * | 2004-09-10 | 2005-07-21 | Aiptek Int Inc | Flip-chip packaging device |
| US20060131710A1 (en) * | 2004-12-21 | 2006-06-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Advanced cavity structure for wafer level chip scale package |
| US20070197922A1 (en) * | 2006-02-17 | 2007-08-23 | Honeywell International Inc. | Disposable pressure sensor systems and packages therefor |
| EP1870936A1 (fr) | 2006-06-19 | 2007-12-26 | STMicroelectronics (Rousset) SAS | Procédé de fabrication de lentilles, notamment pour imageur intégré |
| JP5270349B2 (ja) * | 2006-08-25 | 2013-08-21 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | 半導体装置及びその製造方法 |
| JPWO2008023827A1 (ja) * | 2006-08-25 | 2010-01-14 | 三洋電機株式会社 | 半導体装置 |
| JPWO2008023826A1 (ja) * | 2006-08-25 | 2010-01-14 | 三洋電機株式会社 | 半導体装置及びその製造方法 |
| DE102007038465A1 (de) * | 2006-11-20 | 2008-05-21 | Awaiba Gmbh | Kameramodul auf Waferebene |
| JP4958273B2 (ja) * | 2007-01-23 | 2012-06-20 | オンセミコンダクター・トレーディング・リミテッド | 発光装置及びその製造方法 |
| US7576425B2 (en) * | 2007-01-25 | 2009-08-18 | Xintec, Inc. | Conducting layer in chip package module |
| TWI353667B (en) * | 2007-07-13 | 2011-12-01 | Xintec Inc | Image sensor package and fabrication method thereo |
| US8772919B2 (en) | 2007-08-08 | 2014-07-08 | Wen-Cheng Chien | Image sensor package with trench insulator and fabrication method thereof |
| TWI345830B (en) * | 2007-08-08 | 2011-07-21 | Xintec Inc | Image sensor package and fabrication method thereof |
| US7880293B2 (en) * | 2008-03-25 | 2011-02-01 | Stats Chippac, Ltd. | Wafer integrated with permanent carrier and method therefor |
| DE102008025756B4 (de) * | 2008-05-29 | 2023-02-23 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiteranordnung |
| KR100950915B1 (ko) * | 2008-06-17 | 2010-04-01 | 삼성전기주식회사 | 웨이퍼 레벨 카메라 모듈 및 그 제조방법 |
| JP5186295B2 (ja) * | 2008-06-30 | 2013-04-17 | 富士フイルム株式会社 | 撮像モジュール及びその製造方法並びに内視鏡装置 |
| MX2011008352A (es) | 2009-02-09 | 2011-11-28 | Semprius Inc | Modulos, receptores y sub-receptores fotovoltaicos tipo concentrador y metodos para formar los mismos. |
| JP2010245292A (ja) * | 2009-04-06 | 2010-10-28 | Panasonic Corp | 光学デバイス、電子機器、及びその製造方法 |
| EP2246890B1 (fr) * | 2009-04-28 | 2013-03-13 | STMicroelectronics (Crolles 2) SAS | Mode de réalisation d'un module de capture d'images |
| DE102009024425B4 (de) * | 2009-06-09 | 2011-11-17 | Diehl Aerospace Gmbh | Anschlusseinrichtung für eine lichtemittierende Diode und Beleuchtungseinheit |
| WO2011108664A1 (ja) * | 2010-03-03 | 2011-09-09 | 有限会社Mtec | 光半導体装置 |
| JP5558189B2 (ja) * | 2010-04-26 | 2014-07-23 | 浜松ホトニクス株式会社 | 赤外線センサ及びその製造方法 |
| US20120154945A1 (en) * | 2010-12-16 | 2012-06-21 | William Mark Hiatt | Optical apertures and applications thereof |
| EP2472579A1 (de) * | 2010-12-30 | 2012-07-04 | Baumer Innotec AG | Kontaktierung von Bauelementen auf Substraten |
| US9252172B2 (en) | 2011-05-31 | 2016-02-02 | Stats Chippac, Ltd. | Semiconductor device and method of forming EWLB semiconductor package with vertical interconnect structure and cavity region |
| CN103512595B (zh) * | 2011-07-19 | 2016-08-10 | 赫普塔冈微光有限公司 | 光电模块及其制造方法与包含光电模块的电器及装置 |
| US9564413B2 (en) | 2011-09-15 | 2017-02-07 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming semiconductor die with active region responsive to external stimulus |
| US9553162B2 (en) | 2011-09-15 | 2017-01-24 | STATS ChipPAC Pte. Ltd. | Semiconductor device and method of forming semiconductor die with active region responsive to external stimulus |
| US20140264693A1 (en) * | 2013-03-12 | 2014-09-18 | Optiz, Inc. | Cover-Free Sensor Module And Method Of Making Same |
| US9575722B2 (en) | 2013-03-14 | 2017-02-21 | International Business Machines Corporation | Software interface for a specialized hardward device |
| US9431315B2 (en) | 2013-12-26 | 2016-08-30 | Agency For Science, Technology And Research | Chemical sensor package for highly pressured environment |
| US9481572B2 (en) | 2014-07-17 | 2016-11-01 | Texas Instruments Incorporated | Optical electronic device and method of fabrication |
| US9343447B2 (en) * | 2014-09-26 | 2016-05-17 | Texas Instruments Incorporated | Optically pumped sensors or references with die-to-package cavities |
| US9429727B2 (en) * | 2014-11-06 | 2016-08-30 | Sae Magnetics (H.K.) Ltd. | Wafer level packaged optical subassembly and transceiver module having same |
| US9543347B2 (en) | 2015-02-24 | 2017-01-10 | Optiz, Inc. | Stress released image sensor package structure and method |
| US10418501B2 (en) | 2015-10-02 | 2019-09-17 | X-Celeprint Limited | Wafer-integrated, ultra-low profile concentrated photovoltaics (CPV) for space applications |
| EP3449538B1 (en) * | 2016-04-29 | 2022-11-23 | Finisar Corporation | Interfacing chip on glass assembly |
| US10522505B2 (en) | 2017-04-06 | 2019-12-31 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method for manufacturing the same |
| DE102017213065B3 (de) | 2017-04-13 | 2018-07-05 | Christian-Albrechts-Universität Zu Kiel | Verfahren zur Herstellung von plankonvexen Linsenelementen und zur Herstellung eines gehäusten Bauelements auf Waferebene |
| KR102826379B1 (ko) * | 2019-07-09 | 2025-06-26 | 하이만 센서 게엠베하 | 진공 충전 웨이퍼 레벨 하우징 내에 열 적외선 센서 어레이를 생산하는 방법 |
| US11862749B2 (en) * | 2019-12-06 | 2024-01-02 | Adesto Technologies Corporation | Integrated module assembly for optical integrated circuits |
| US11329035B2 (en) | 2020-04-16 | 2022-05-10 | International Business Machines Corporation | Tetherless chip module |
| WO2022236404A1 (en) * | 2021-05-10 | 2022-11-17 | Purdue Research Foundation | Semiconductor system with waveguide assembly with rf signal impedance controllable by applied electromagnetic radiation |
| JP7176788B1 (ja) | 2021-06-02 | 2022-11-22 | サンテック株式会社 | 光デバイス、光デバイスの製造方法、及び光デバイスチップの製造方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04145403A (ja) * | 1990-10-05 | 1992-05-19 | Seiko Giken:Kk | 多芯リボンテープ光ファイバ用分岐合流器およびその製造方法 |
| US5259054A (en) * | 1992-01-10 | 1993-11-02 | At&T Bell Laboratories | Self-aligned optical subassembly |
| US5515502A (en) * | 1993-09-30 | 1996-05-07 | Sybase, Inc. | Data backup system with methods for stripe affinity backup to multiple archive devices |
| US5500540A (en) * | 1994-04-15 | 1996-03-19 | Photonics Research Incorporated | Wafer scale optoelectronic package |
| JP3091903B2 (ja) * | 1994-08-17 | 2000-09-25 | セイコーインスツルメンツ株式会社 | アバランシェ・フォト・ダイオード及びその製造方法 |
| JPH09199736A (ja) * | 1996-01-16 | 1997-07-31 | Olympus Optical Co Ltd | 光センサモジュール |
| WO1998009312A1 (en) * | 1996-08-27 | 1998-03-05 | Omron Corporation | Micro-relay and method for manufacturing the same |
| US5798557A (en) * | 1996-08-29 | 1998-08-25 | Harris Corporation | Lid wafer bond packaging and micromachining |
| US6096155A (en) | 1996-09-27 | 2000-08-01 | Digital Optics Corporation | Method of dicing wafer level integrated multiple optical elements |
| US6235141B1 (en) * | 1996-09-27 | 2001-05-22 | Digital Optics Corporation | Method of mass producing and packaging integrated optical subsystems |
| US5761350A (en) * | 1997-01-22 | 1998-06-02 | Koh; Seungug | Method and apparatus for providing a seamless electrical/optical multi-layer micro-opto-electro-mechanical system assembly |
| US6198168B1 (en) * | 1998-01-20 | 2001-03-06 | Micron Technologies, Inc. | Integrated circuits using high aspect ratio vias through a semiconductor wafer and method for forming same |
| IL123207A0 (en) | 1998-02-06 | 1998-09-24 | Shellcase Ltd | Integrated circuit device |
| US6328482B1 (en) | 1998-06-08 | 2001-12-11 | Benjamin Bin Jian | Multilayer optical fiber coupler |
| US6566745B1 (en) * | 1999-03-29 | 2003-05-20 | Imec Vzw | Image sensor ball grid array package and the fabrication thereof |
| DE19916572A1 (de) | 1999-04-13 | 2000-10-26 | Siemens Ag | Optisches Halbleiterbauelement mit optisch transparenter Schutzschicht |
| US6243508B1 (en) * | 1999-06-01 | 2001-06-05 | Picolight Incorporated | Electro-opto-mechanical assembly for coupling a light source or receiver to an optical waveguide |
| IL133453A0 (en) | 1999-12-10 | 2001-04-30 | Shellcase Ltd | Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby |
| US6351027B1 (en) | 2000-02-29 | 2002-02-26 | Agilent Technologies, Inc. | Chip-mounted enclosure |
| JP3713418B2 (ja) * | 2000-05-30 | 2005-11-09 | 光正 小柳 | 3次元画像処理装置の製造方法 |
| US6556349B2 (en) * | 2000-12-27 | 2003-04-29 | Honeywell International Inc. | Variable focal length micro lens array field curvature corrector |
| US6909554B2 (en) * | 2000-12-27 | 2005-06-21 | Finisar Corporation | Wafer integration of micro-optics |
| US6635941B2 (en) * | 2001-03-21 | 2003-10-21 | Canon Kabushiki Kaisha | Structure of semiconductor device with improved reliability |
| US6967124B1 (en) * | 2001-06-19 | 2005-11-22 | Amkor Technology, Inc. | Imprinted integrated circuit substrate and method for imprinting an integrated circuit substrate |
| US6646807B2 (en) * | 2001-06-19 | 2003-11-11 | Rohm Co., Ltd. | Lens array unit and process for making lens array |
| DE10222960A1 (de) | 2002-05-23 | 2003-12-11 | Schott Glas | Verfahren zur Herstellung von elektronischen Bauelementen |
| DE10222959B4 (de) | 2002-05-23 | 2007-12-13 | Schott Ag | Mikro-elektromechanisches Bauelement und Verfahren zur Herstellung von mikro-elektromechanischen Bauelementen |
| DE10141571B8 (de) | 2001-08-24 | 2005-05-25 | Schott Ag | Verfahren zum Zusammenbau eines Halbleiterbauelements und damit hergestellte integrierte Schaltungsanordnung, die für dreidimensionale, mehrschichtige Schaltungen geeignet ist |
| US6974966B1 (en) * | 2002-01-16 | 2005-12-13 | Vijaysekhar Jayaraman | Multiple epitaxial region wafers with optical connectivity |
-
2002
- 2002-08-26 AT AT02779276T patent/ATE369626T1/de not_active IP Right Cessation
- 2002-08-26 JP JP2003522978A patent/JP4571405B2/ja not_active Expired - Fee Related
- 2002-08-26 WO PCT/EP2002/009497 patent/WO2003019617A2/de not_active Ceased
- 2002-08-26 US US10/487,604 patent/US7160478B2/en not_active Expired - Fee Related
- 2002-08-26 AU AU2002342623A patent/AU2002342623A1/en not_active Abandoned
- 2002-08-26 SG SG200602593-6A patent/SG161099A1/en unknown
- 2002-08-26 EP EP02779276A patent/EP1419530B1/de not_active Expired - Lifetime
- 2002-08-26 KR KR1020097021389A patent/KR100986816B1/ko not_active Expired - Fee Related
- 2002-08-26 DE DE50210653T patent/DE50210653D1/de not_active Expired - Lifetime
- 2002-08-26 KR KR1020047002746A patent/KR100940943B1/ko not_active Expired - Fee Related
-
2006
- 2006-11-22 US US11/603,388 patent/US8114304B2/en not_active Expired - Fee Related
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