JP2005294662A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005294662A5 JP2005294662A5 JP2004109683A JP2004109683A JP2005294662A5 JP 2005294662 A5 JP2005294662 A5 JP 2005294662A5 JP 2004109683 A JP2004109683 A JP 2004109683A JP 2004109683 A JP2004109683 A JP 2004109683A JP 2005294662 A5 JP2005294662 A5 JP 2005294662A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004109683A JP4515133B2 (ja) | 2004-04-02 | 2004-04-02 | 搬送装置及びその制御方法並びに真空処理装置 |
| KR1020050026885A KR101143287B1 (ko) | 2004-04-02 | 2005-03-31 | 반송장치 및 그 제어방법 그리고 진공처리장치 |
| US11/095,649 US7572093B2 (en) | 2004-04-02 | 2005-04-01 | Transport apparatus, control method for the same, and vacuum processing system |
| TW094110563A TW200536689A (en) | 2004-04-02 | 2005-04-01 | Carrying device, method of controlling the same, and vacuum processing device |
| CNB200510062636XA CN100463783C (zh) | 2004-04-02 | 2005-04-01 | 移送装置及其控制方法以及真空处理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004109683A JP4515133B2 (ja) | 2004-04-02 | 2004-04-02 | 搬送装置及びその制御方法並びに真空処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005294662A JP2005294662A (ja) | 2005-10-20 |
| JP2005294662A5 true JP2005294662A5 (enExample) | 2007-04-05 |
| JP4515133B2 JP4515133B2 (ja) | 2010-07-28 |
Family
ID=35049108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004109683A Expired - Lifetime JP4515133B2 (ja) | 2004-04-02 | 2004-04-02 | 搬送装置及びその制御方法並びに真空処理装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7572093B2 (enExample) |
| JP (1) | JP4515133B2 (enExample) |
| KR (1) | KR101143287B1 (enExample) |
| CN (1) | CN100463783C (enExample) |
| TW (1) | TW200536689A (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9117859B2 (en) * | 2006-08-31 | 2015-08-25 | Brooks Automation, Inc. | Compact processing apparatus |
| US8267636B2 (en) * | 2007-05-08 | 2012-09-18 | Brooks Automation, Inc. | Substrate transport apparatus |
| WO2008140093A1 (ja) * | 2007-05-15 | 2008-11-20 | Ulvac, Inc. | 搬送装置及びこれを用いた真空処理装置 |
| KR101366651B1 (ko) * | 2007-05-31 | 2014-02-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 이중 스카라 로봇 링키지의 리치를 연장하기 위한 방법 및 장치 |
| WO2009096373A1 (ja) * | 2008-01-31 | 2009-08-06 | Canon Anelva Corporation | 真空搬送装置 |
| JP5150608B2 (ja) * | 2009-11-20 | 2013-02-20 | 株式会社アルバック | 搬送装置及び真空装置 |
| CN103069559B (zh) | 2010-08-17 | 2016-08-24 | 佳能安内华股份有限公司 | 基片输送设备以及用于制造电子装置的系统和方法 |
| ITBO20120015A1 (it) * | 2012-01-16 | 2013-07-17 | Marchesini Group Spa | Apparato per introdurre articoli all'interno di astucci |
| JP6349947B2 (ja) * | 2013-11-19 | 2018-07-04 | 株式会社ジェイテクト | 搬送装置 |
| CN103904008B (zh) * | 2014-03-20 | 2016-08-17 | 上海华力微电子有限公司 | 一种半导体设备的机械臂的动态传感器结构 |
| CN106298583B (zh) * | 2015-05-27 | 2019-12-03 | 中微半导体设备(上海)股份有限公司 | 处理腔、处理腔和真空锁组合以及基片处理系统 |
| CN105500385A (zh) * | 2016-02-03 | 2016-04-20 | 先驱智能机械（深圳）有限公司 | 机械手臂的控制方法 |
| CN105598971A (zh) * | 2016-02-03 | 2016-05-25 | 先驱智能机械（深圳）有限公司 | 机械手臂的控制系统 |
| US20200002807A1 (en) * | 2017-06-14 | 2020-01-02 | Ulvac, Inc. | Vacuum processing apparatus |
| JP7506971B2 (ja) * | 2019-07-23 | 2024-06-27 | 川崎重工業株式会社 | ブレード間隔調整装置 |
| CN211208421U (zh) * | 2020-03-05 | 2020-08-07 | 福建北电新材料科技有限公司 | 一种可拆卸蚀刻多片碳化硅蚀刻工装治具 |
| CN112234008B (zh) * | 2020-09-03 | 2023-05-30 | 北京晶亦精微科技股份有限公司 | 用于晶圆的夹取及传输机构、cmp抛光设备 |
| CN117124339A (zh) * | 2023-09-05 | 2023-11-28 | 上海广川科技有限公司 | 一种基于磁流体的紧凑型同心两轴真空机器人传动结构 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3204115A (en) | 1961-07-31 | 1965-08-31 | Rca Corp | Four-terminal solid state superconductive device with control current flowing transverse to controlled output current |
| JPH0773833B2 (ja) * | 1992-04-23 | 1995-08-09 | アプライド マテリアルズ インコーポレイテッド | ロボット・アセンブリ |
| CN1046654C (zh) * | 1993-04-16 | 1999-11-24 | 布鲁克斯自动化公司 | 传送装置 |
| US5647724A (en) * | 1995-10-27 | 1997-07-15 | Brooks Automation Inc. | Substrate transport apparatus with dual substrate holders |
| US6299404B1 (en) * | 1995-10-27 | 2001-10-09 | Brooks Automation Inc. | Substrate transport apparatus with double substrate holders |
| JP3204115B2 (ja) * | 1996-01-25 | 2001-09-04 | ダイキン工業株式会社 | ワーク搬送ロボット |
| US5954840A (en) * | 1996-06-13 | 1999-09-21 | Genmark Automation | Universally tiltable Z axis drive arm |
| US5789878A (en) * | 1996-07-15 | 1998-08-04 | Applied Materials, Inc. | Dual plane robot |
| JPH10163296A (ja) * | 1996-11-27 | 1998-06-19 | Rootsue Kk | 基板搬送装置 |
| JPH11198070A (ja) * | 1998-01-12 | 1999-07-27 | Shin Meiwa Ind Co Ltd | 搬送装置 |
| EP1075359B1 (en) * | 1998-04-29 | 2003-07-02 | FCI's Hertogenbosch BV | Device comprising two parallel linkage mechanisms |
| JP2000042952A (ja) * | 1998-07-27 | 2000-02-15 | Hitachi Ltd | 搬送装置及び搬送方法 |
| US6464448B1 (en) * | 1998-09-01 | 2002-10-15 | Brooks Automation, Inc. | Substrate transport apparatus |
| US20010033788A1 (en) * | 1998-09-03 | 2001-10-25 | Pietrantonio Antonio F. | Dual multitran robot arm |
| JP3926501B2 (ja) * | 1998-11-13 | 2007-06-06 | ナブテスコ株式会社 | ロボットアーム及びその駆動装置 |
| JP2001118905A (ja) * | 1999-10-20 | 2001-04-27 | Hitachi Ltd | 搬送方法及び搬送装置 |
| JP4227298B2 (ja) * | 1999-12-02 | 2009-02-18 | ローツェ株式会社 | 搬送用ロボット |
| JP4489999B2 (ja) | 2000-10-24 | 2010-06-23 | 株式会社アルバック | 搬送装置及び真空処理装置 |
| TW511220B (en) | 2000-10-24 | 2002-11-21 | Ulvac Corp | Carrying device and vacuum processing apparatus using the same |
| CN2461719Y (zh) * | 2000-12-19 | 2001-11-28 | 沈宗麟 | 多连杆式机械手 |
| JP4173309B2 (ja) * | 2002-01-28 | 2008-10-29 | 東京エレクトロン株式会社 | センタリング装置及び枚葉式検査装置 |
-
2004
- 2004-04-02 JP JP2004109683A patent/JP4515133B2/ja not_active Expired - Lifetime
-
2005
- 2005-03-31 KR KR1020050026885A patent/KR101143287B1/ko not_active Expired - Lifetime
- 2005-04-01 US US11/095,649 patent/US7572093B2/en not_active Expired - Fee Related
- 2005-04-01 TW TW094110563A patent/TW200536689A/zh not_active IP Right Cessation
- 2005-04-01 CN CNB200510062636XA patent/CN100463783C/zh not_active Expired - Fee Related