JP2005266083A - 観察装置及び観察方法 - Google Patents

観察装置及び観察方法 Download PDF

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Publication number
JP2005266083A
JP2005266083A JP2004076267A JP2004076267A JP2005266083A JP 2005266083 A JP2005266083 A JP 2005266083A JP 2004076267 A JP2004076267 A JP 2004076267A JP 2004076267 A JP2004076267 A JP 2004076267A JP 2005266083 A JP2005266083 A JP 2005266083A
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JP
Japan
Prior art keywords
objective lens
observation
substrate
magnification
optical path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004076267A
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English (en)
Japanese (ja)
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JP2005266083A5 (enExample
Inventor
Shunsuke Kurata
俊輔 倉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2004076267A priority Critical patent/JP2005266083A/ja
Priority to US11/078,084 priority patent/US7456947B2/en
Priority to TW094107689A priority patent/TWI364552B/zh
Priority to KR1020050020940A priority patent/KR20060044352A/ko
Priority to CNA2005100558536A priority patent/CN1670940A/zh
Publication of JP2005266083A publication Critical patent/JP2005266083A/ja
Publication of JP2005266083A5 publication Critical patent/JP2005266083A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/04—Measuring microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/02—Objectives

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Microscoopes, Condenser (AREA)
JP2004076267A 2004-03-17 2004-03-17 観察装置及び観察方法 Pending JP2005266083A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004076267A JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法
US11/078,084 US7456947B2 (en) 2004-03-17 2005-03-11 Inspecting apparatus and inspecting method
TW094107689A TWI364552B (en) 2004-03-17 2005-03-14 Inspecting apparatus and inspecting method
KR1020050020940A KR20060044352A (ko) 2004-03-17 2005-03-14 관찰 장치 및 관찰 방법
CNA2005100558536A CN1670940A (zh) 2004-03-17 2005-03-15 观察装置和观察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004076267A JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法

Publications (2)

Publication Number Publication Date
JP2005266083A true JP2005266083A (ja) 2005-09-29
JP2005266083A5 JP2005266083A5 (enExample) 2007-04-26

Family

ID=34985878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004076267A Pending JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法

Country Status (5)

Country Link
US (1) US7456947B2 (enExample)
JP (1) JP2005266083A (enExample)
KR (1) KR20060044352A (enExample)
CN (1) CN1670940A (enExample)
TW (1) TWI364552B (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007047080A (ja) * 2005-08-11 2007-02-22 Hitachi High-Technologies Corp 走査型電子顕微鏡およびその画像表示方法
JP2010169892A (ja) * 2009-01-22 2010-08-05 Olympus Corp 顕微鏡システム
CN103984361A (zh) * 2013-02-07 2014-08-13 索尼公司 图像获取设备和载物台控制方法
JP2015069202A (ja) * 2013-10-01 2015-04-13 オリンパス株式会社 顕微鏡システム
WO2021199340A1 (ja) * 2020-03-31 2021-10-07 株式会社日立ハイテク 欠陥検査装置及び欠陥検査方法
JP2023144426A (ja) * 2022-03-28 2023-10-11 株式会社エビデント 顕微鏡システム、動作方法、プログラム

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4933057B2 (ja) * 2005-05-13 2012-05-16 キヤノン株式会社 ヘッド基板、記録ヘッド、及び記録装置
US20080243299A1 (en) * 2007-03-27 2008-10-02 Haas Automation, Inc. Machine tool control system
US7812971B2 (en) * 2007-06-28 2010-10-12 Quality Vision International, Inc. Multi color autofocus apparatus and method
KR100837729B1 (ko) * 2007-10-09 2008-06-13 서울엔지니어링(주) Ｌｃｄ 검사장비의 스테이지 정밀이동장치
JP5555014B2 (ja) * 2010-03-10 2014-07-23 オリンパス株式会社 バーチャルスライド作成装置
JP2012225701A (ja) * 2011-04-18 2012-11-15 Mitsutoyo Corp 形状測定装置
US9182341B2 (en) * 2012-06-13 2015-11-10 Kla-Tencor Corporation Optical surface scanning systems and methods
US20140135581A1 (en) * 2012-11-14 2014-05-15 Gynius Ab Portable battery powered self-illuminated multispectral multi-magnification colposcope
US9304089B2 (en) * 2013-04-05 2016-04-05 Mitutoyo Corporation System and method for obtaining images with offset utilized for enhanced edge resolution
CN113433134A (zh) * 2021-06-24 2021-09-24 深圳中科飞测科技股份有限公司 检测方法、检测设备及计算机可读存储介质
CN117969045B (zh) * 2024-03-29 2024-10-25 杭州海康威视数字技术股份有限公司 物镜检测装置及其检测方法、显微镜

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793311A (en) * 1980-12-02 1982-06-10 Olympus Optical Co Ltd Controller for relative moving speed of mirror body and sample in microscope
JPS62102752A (ja) * 1985-10-31 1987-05-13 オリンパス光学工業株式会社 顕微鏡の移動装置
JPH07168101A (ja) * 1993-12-15 1995-07-04 Olympus Optical Co Ltd 顕微鏡装置
JPH09127426A (ja) * 1995-10-31 1997-05-16 Nikon Corp 拡大観察装置における駆動指令装置
JP2000075215A (ja) * 1998-08-27 2000-03-14 Nikon Corp 電動ステージ付き顕微鏡
JP2001134760A (ja) * 1999-11-02 2001-05-18 Sony Corp 紫外光の焦点位置制御機構及び検査装置
JP2001201694A (ja) * 2000-01-18 2001-07-27 Olympus Optical Co Ltd 顕微鏡装置
JP2002328306A (ja) * 2001-04-27 2002-11-15 Nikon Corp 紫外線顕微鏡およびこれを用いた観察方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3565512A (en) * 1969-04-29 1971-02-23 Bausch & Lomb Microscope nosepiece assembly having adjustable optical components
DE2102922C3 (de) * 1971-01-22 1978-08-24 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Anordnung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte
US4503555A (en) * 1982-04-21 1985-03-05 University Of California Semi-automatic optical scanning apparatus utilizing line integration
US4577141A (en) * 1983-11-30 1986-03-18 Nippon Kogaku K.K. System for driving a movable stage
US4725720A (en) * 1985-05-27 1988-02-16 Mitutoyo Manufacturing Co., Ltd. Microscope with auto focus and light adjusting means
US4695137A (en) * 1986-02-26 1987-09-22 Carl-Zeiss-Stiftung, Heidenheim/Brenz Motorized focus drive for a microscope
DE3879603T2 (de) * 1987-10-09 1993-07-01 Olympus Optical Co Koaxialer grob-/feinversteller zur bedienung eines mikroskoptisches.
CA1308203C (en) * 1989-06-01 1992-09-29 Nanoquest (Canada) Inc. Magnification compensation apparatus
JP2925647B2 (ja) * 1990-04-16 1999-07-28 オリンパス光学工業株式会社 顕微鏡変倍装置
US5557456A (en) * 1994-03-04 1996-09-17 Oncometrics Imaging Corp. Personal interface device for positioning of a microscope stage
US5818637A (en) * 1996-02-26 1998-10-06 Hoover; Rex A. Computerized video microscopy system
US6248988B1 (en) * 1998-05-05 2001-06-19 Kla-Tencor Corporation Conventional and confocal multi-spot scanning optical microscope
JP2001332595A (ja) 2000-05-25 2001-11-30 Sony Corp 焦点合わせ制御機構及びこれを用いた検査装置
US6906858B2 (en) * 2000-07-17 2005-06-14 Olympus Optical Co., Ltd. Microscope provided with an objective lens focusing apparatus and an objective lens switching apparatus
JP4121735B2 (ja) * 2001-01-22 2008-07-23 ソニー株式会社 ポリシリコン膜評価装置
DE10159239A1 (de) * 2001-12-03 2003-06-26 Leica Microsystems Mikroskopobjektiv, Mikroskop und Verfahren zum Abbilden einer Probe
US6989927B2 (en) * 2003-07-02 2006-01-24 Leica Microsystems Inc. Stage well

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5793311A (en) * 1980-12-02 1982-06-10 Olympus Optical Co Ltd Controller for relative moving speed of mirror body and sample in microscope
JPS62102752A (ja) * 1985-10-31 1987-05-13 オリンパス光学工業株式会社 顕微鏡の移動装置
JPH07168101A (ja) * 1993-12-15 1995-07-04 Olympus Optical Co Ltd 顕微鏡装置
JPH09127426A (ja) * 1995-10-31 1997-05-16 Nikon Corp 拡大観察装置における駆動指令装置
JP2000075215A (ja) * 1998-08-27 2000-03-14 Nikon Corp 電動ステージ付き顕微鏡
JP2001134760A (ja) * 1999-11-02 2001-05-18 Sony Corp 紫外光の焦点位置制御機構及び検査装置
JP2001201694A (ja) * 2000-01-18 2001-07-27 Olympus Optical Co Ltd 顕微鏡装置
JP2002328306A (ja) * 2001-04-27 2002-11-15 Nikon Corp 紫外線顕微鏡およびこれを用いた観察方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007047080A (ja) * 2005-08-11 2007-02-22 Hitachi High-Technologies Corp 走査型電子顕微鏡およびその画像表示方法
JP2010169892A (ja) * 2009-01-22 2010-08-05 Olympus Corp 顕微鏡システム
CN103984361A (zh) * 2013-02-07 2014-08-13 索尼公司 图像获取设备和载物台控制方法
JP2015069202A (ja) * 2013-10-01 2015-04-13 オリンパス株式会社 顕微鏡システム
WO2021199340A1 (ja) * 2020-03-31 2021-10-07 株式会社日立ハイテク 欠陥検査装置及び欠陥検査方法
US12196673B2 (en) 2020-03-31 2025-01-14 Hitachi High-Tech Corporation Defect inspection apparatus and defect inspection method
JP2023144426A (ja) * 2022-03-28 2023-10-11 株式会社エビデント 顕微鏡システム、動作方法、プログラム
JP7744864B2 (ja) 2022-03-28 2025-09-26 株式会社エビデント 顕微鏡システム、動作方法、プログラム

Also Published As

Publication number Publication date
TWI364552B (en) 2012-05-21
CN1670940A (zh) 2005-09-21
KR20060044352A (ko) 2006-05-16
US7456947B2 (en) 2008-11-25
TW200540455A (en) 2005-12-16
US20050206885A1 (en) 2005-09-22

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