JP2005266083A5 - - Google Patents

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Publication number
JP2005266083A5
JP2005266083A5 JP2004076267A JP2004076267A JP2005266083A5 JP 2005266083 A5 JP2005266083 A5 JP 2005266083A5 JP 2004076267 A JP2004076267 A JP 2004076267A JP 2004076267 A JP2004076267 A JP 2004076267A JP 2005266083 A5 JP2005266083 A5 JP 2005266083A5
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JP
Japan
Prior art keywords
objective lens
observation
substrate
moving
mounting stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004076267A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005266083A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004076267A priority Critical patent/JP2005266083A/ja
Priority claimed from JP2004076267A external-priority patent/JP2005266083A/ja
Priority to US11/078,084 priority patent/US7456947B2/en
Priority to TW094107689A priority patent/TWI364552B/zh
Priority to KR1020050020940A priority patent/KR20060044352A/ko
Priority to CNA2005100558536A priority patent/CN1670940A/zh
Publication of JP2005266083A publication Critical patent/JP2005266083A/ja
Publication of JP2005266083A5 publication Critical patent/JP2005266083A5/ja
Pending legal-status Critical Current

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JP2004076267A 2004-03-17 2004-03-17 観察装置及び観察方法 Pending JP2005266083A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004076267A JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法
US11/078,084 US7456947B2 (en) 2004-03-17 2005-03-11 Inspecting apparatus and inspecting method
TW094107689A TWI364552B (en) 2004-03-17 2005-03-14 Inspecting apparatus and inspecting method
KR1020050020940A KR20060044352A (ko) 2004-03-17 2005-03-14 관찰 장치 및 관찰 방법
CNA2005100558536A CN1670940A (zh) 2004-03-17 2005-03-15 观察装置和观察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004076267A JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法

Publications (2)

Publication Number Publication Date
JP2005266083A JP2005266083A (ja) 2005-09-29
JP2005266083A5 true JP2005266083A5 (enExample) 2007-04-26

Family

ID=34985878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004076267A Pending JP2005266083A (ja) 2004-03-17 2004-03-17 観察装置及び観察方法

Country Status (5)

Country Link
US (1) US7456947B2 (enExample)
JP (1) JP2005266083A (enExample)
KR (1) KR20060044352A (enExample)
CN (1) CN1670940A (enExample)
TW (1) TWI364552B (enExample)

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JP4933057B2 (ja) * 2005-05-13 2012-05-16 キヤノン株式会社 ヘッド基板、記録ヘッド、及び記録装置
JP4644065B2 (ja) * 2005-08-11 2011-03-02 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡およびその画像表示方法
US20080243299A1 (en) * 2007-03-27 2008-10-02 Haas Automation, Inc. Machine tool control system
US7812971B2 (en) * 2007-06-28 2010-10-12 Quality Vision International, Inc. Multi color autofocus apparatus and method
KR100837729B1 (ko) * 2007-10-09 2008-06-13 서울엔지니어링(주) Ｌｃｄ 검사장비의 스테이지 정밀이동장치
JP5174693B2 (ja) * 2009-01-22 2013-04-03 オリンパス株式会社 顕微鏡システム
JP5555014B2 (ja) * 2010-03-10 2014-07-23 オリンパス株式会社 バーチャルスライド作成装置
JP2012225701A (ja) * 2011-04-18 2012-11-15 Mitsutoyo Corp 形状測定装置
US9182341B2 (en) * 2012-06-13 2015-11-10 Kla-Tencor Corporation Optical surface scanning systems and methods
US20140135581A1 (en) * 2012-11-14 2014-05-15 Gynius Ab Portable battery powered self-illuminated multispectral multi-magnification colposcope
JP2014153500A (ja) * 2013-02-07 2014-08-25 Sony Corp 画像取得装置およびステージ制御方法
US9304089B2 (en) * 2013-04-05 2016-04-05 Mitutoyo Corporation System and method for obtaining images with offset utilized for enhanced edge resolution
JP6173154B2 (ja) * 2013-10-01 2017-08-02 オリンパス株式会社 顕微鏡システム
US12196673B2 (en) 2020-03-31 2025-01-14 Hitachi High-Tech Corporation Defect inspection apparatus and defect inspection method
CN113433134A (zh) * 2021-06-24 2021-09-24 深圳中科飞测科技股份有限公司 检测方法、检测设备及计算机可读存储介质
JP7744864B2 (ja) * 2022-03-28 2025-09-26 株式会社エビデント 顕微鏡システム、動作方法、プログラム
CN117969045B (zh) * 2024-03-29 2024-10-25 杭州海康威视数字技术股份有限公司 物镜检测装置及其检测方法、显微镜

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JPH09127426A (ja) * 1995-10-31 1997-05-16 Nikon Corp 拡大観察装置における駆動指令装置
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JP4477181B2 (ja) * 2000-01-18 2010-06-09 オリンパス株式会社 顕微鏡装置
JP2001332595A (ja) 2000-05-25 2001-11-30 Sony Corp 焦点合わせ制御機構及びこれを用いた検査装置
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JP4121735B2 (ja) * 2001-01-22 2008-07-23 ソニー株式会社 ポリシリコン膜評価装置
JP2002328306A (ja) * 2001-04-27 2002-11-15 Nikon Corp 紫外線顕微鏡およびこれを用いた観察方法
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