JP2005150105A5 - - Google Patents
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- Publication number
- JP2005150105A5 JP2005150105A5 JP2004308397A JP2004308397A JP2005150105A5 JP 2005150105 A5 JP2005150105 A5 JP 2005150105A5 JP 2004308397 A JP2004308397 A JP 2004308397A JP 2004308397 A JP2004308397 A JP 2004308397A JP 2005150105 A5 JP2005150105 A5 JP 2005150105A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- insulating layer
- thin film
- film transistor
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims 27
- 239000004065 semiconductor Substances 0.000 claims 21
- 239000012535 impurity Substances 0.000 claims 20
- 239000010408 film Substances 0.000 claims 19
- 230000002093 peripheral effect Effects 0.000 claims 14
- 238000004519 manufacturing process Methods 0.000 claims 8
- 150000002894 organic compounds Chemical class 0.000 claims 8
- 238000000034 method Methods 0.000 claims 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 229910052787 antimony Inorganic materials 0.000 claims 2
- 229910052785 arsenic Inorganic materials 0.000 claims 2
- 229910052797 bismuth Inorganic materials 0.000 claims 2
- 229910052796 boron Inorganic materials 0.000 claims 2
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical group [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims 2
- 239000011159 matrix material Substances 0.000 claims 2
- 230000000737 periodic effect Effects 0.000 claims 2
- 229910052698 phosphorus Inorganic materials 0.000 claims 2
- 229910052716 thallium Inorganic materials 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000003566 sealing material Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004308397A JP4704006B2 (ja) | 2003-10-24 | 2004-10-22 | 表示装置及びその作製方法、並びに電子機器 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003365229 | 2003-10-24 | ||
| JP2003365229 | 2003-10-24 | ||
| JP2004308397A JP4704006B2 (ja) | 2003-10-24 | 2004-10-22 | 表示装置及びその作製方法、並びに電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005150105A JP2005150105A (ja) | 2005-06-09 |
| JP2005150105A5 true JP2005150105A5 (enExample) | 2008-01-10 |
| JP4704006B2 JP4704006B2 (ja) | 2011-06-15 |
Family
ID=34703230
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004308397A Expired - Fee Related JP4704006B2 (ja) | 2003-10-24 | 2004-10-22 | 表示装置及びその作製方法、並びに電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4704006B2 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8278818B2 (en) | 2004-06-04 | 2012-10-02 | Samsung Mobile Display Co., Ltd. | Electroluminescent display device and method of fabricating the same |
| EP1760776B1 (en) * | 2005-08-31 | 2019-12-25 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method for semiconductor device with flexible substrate |
| JP4754387B2 (ja) * | 2006-03-31 | 2011-08-24 | 京セラ株式会社 | Ｅｌ装置 |
| KR101293562B1 (ko) | 2006-06-21 | 2013-08-06 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| WO2008035556A1 (en) * | 2006-09-19 | 2008-03-27 | Sharp Kabushiki Kaisha | Organic electroluminescent display and method for manufacturing the same |
| KR100833768B1 (ko) * | 2007-01-15 | 2008-05-29 | 삼성에스디아이 주식회사 | 유기 전계 발광 화소 장치 및 그 제조 방법 |
| JP5655567B2 (ja) * | 2008-10-06 | 2015-01-21 | 旭硝子株式会社 | 電子デバイス用基板、その製造方法、これを用いた電子デバイス、その製造方法及び有機ｌｅｄ素子用基板 |
| KR101702329B1 (ko) | 2008-12-17 | 2017-02-03 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 발광 장치 및 전자 기기 |
| JP5305267B2 (ja) * | 2009-08-04 | 2013-10-02 | 株式会社ジャパンディスプレイ | 有機ｅｌ装置 |
| JP5735506B2 (ja) * | 2010-06-29 | 2015-06-17 | 株式会社Joled | 有機発光素子の製造方法 |
| KR20120007305A (ko) * | 2010-07-14 | 2012-01-20 | 삼성모바일디스플레이주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| KR20120020073A (ko) * | 2010-08-27 | 2012-03-07 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치의 설계 방법 |
| JP2012255840A (ja) | 2011-06-07 | 2012-12-27 | Japan Display West Co Ltd | 表示装置および電子機器 |
| JP2014081421A (ja) | 2012-10-15 | 2014-05-08 | Japan Display Inc | 配線基板及び表示装置 |
| TWI644434B (zh) * | 2013-04-29 | 2018-12-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| KR102536780B1 (ko) * | 2015-12-23 | 2023-05-24 | 엘지디스플레이 주식회사 | 박막 트랜지스터 기판과 그 제조방법 및 그를 이용한 디스플레이 장치 |
| JP2019095646A (ja) * | 2017-11-24 | 2019-06-20 | 株式会社ジャパンディスプレイ | 表示装置、および表示装置の作製方法 |
| KR102733083B1 (ko) | 2018-12-31 | 2024-11-22 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW364275B (en) * | 1996-03-12 | 1999-07-11 | Idemitsu Kosan Co | Organic electroluminescent element and organic electroluminescent display device |
| JP3645642B2 (ja) * | 1996-03-25 | 2005-05-11 | Ｔｄｋ株式会社 | 有機エレクトロルミネセンス素子 |
| JPH1167460A (ja) * | 1997-08-12 | 1999-03-09 | Tdk Corp | 有機ｅｌ素子およびその製造方法 |
| JPH11330239A (ja) * | 1998-05-15 | 1999-11-30 | Sanyo Electric Co Ltd | 半導体装置及び半導体装置の製造方法 |
| JP3691313B2 (ja) * | 1998-12-01 | 2005-09-07 | 三洋電機株式会社 | 表示装置 |
| JP2001176673A (ja) * | 1999-12-14 | 2001-06-29 | Tdk Corp | 有機ｅｌ素子 |
| JP4581187B2 (ja) * | 2000-06-13 | 2010-11-17 | ソニー株式会社 | 表示装置の製造方法 |
| JP2002083689A (ja) * | 2000-06-29 | 2002-03-22 | Semiconductor Energy Lab Co Ltd | 発光装置 |
| JP4223218B2 (ja) * | 2001-02-19 | 2009-02-12 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP4785339B2 (ja) * | 2003-10-24 | 2011-10-05 | 株式会社半導体エネルギー研究所 | 表示装置の作製方法 |
-
2004
- 2004-10-22 JP JP2004308397A patent/JP4704006B2/ja not_active Expired - Fee Related
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