JP2005136099A - 半導体装置 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 62
- 230000002093 peripheral effect Effects 0.000 claims abstract description 45
- 230000015556 catabolic process Effects 0.000 abstract description 44
- 238000005192 partition Methods 0.000 abstract description 41
- 238000009413 insulation Methods 0.000 abstract description 6
- 239000012212 insulator Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 41
- 230000005684 electric field Effects 0.000 description 17
- 239000012535 impurity Substances 0.000 description 15
- 150000004767 nitrides Chemical class 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000001681 protective effect Effects 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- 238000010586 diagram Methods 0.000 description 3
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- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 1
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0642—Isolation within the component, i.e. internal isolation
- H01L29/0649—Dielectric regions, e.g. SiO2 regions, air gaps
- H01L29/0653—Dielectric regions, e.g. SiO2 regions, air gaps adjoining the input or output region of a field-effect device, e.g. the source or drain region
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
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- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
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Abstract
【解決手段】素子活性部に、n型ドリフト領域1とp型仕切り領域2とが交互に繰り返し接合された並列pn構造部20を有する半導体装置において、耐圧構造部となる素子周縁部に、並列pn構造部20を囲む絶縁領域14を設ける。この絶縁領域14は、半導体よりも臨界電界の高い絶縁体でできており、MOSFET等の素子表面構造部が形成される側の表面から素子裏面側のn+ドレイン層11まで達する。また、並列pn構造部20の、絶縁領域14に隣接するp型仕切り領域2aの幅W2を、絶縁領域14に隣接しないp型仕切り領域2の幅W1よりも狭くして、並列pn構造部20よりなるドリフト部の端部におけるチャージバランス状態を確保する。
【選択図】 図1
Description
図1は、本発明の実施の形態1にかかる縦型MOSFETのチップを示す概略図で方形のチップを4等分した角部を示す部分平面図である。理解を容易にするために、並列pn構造部(点線)と、該並列pn構造部を囲む絶縁領域(一点鎖線)と、最外周部のn型領域(一点鎖線)のみを示している。図2は、図1中のA−A線に沿って切断した部分を示す断面図である。以下の説明では、便宜上、n型ドリフト領域1とp型仕切り領域2とが交互に並ぶ方向をx方向とし、各n型ドリフト領域1および各p型仕切り領域2が伸びる方向をy方向とする。x方向およびy方向については、特に断わらない限り、他の実施の形態においても同じとする。
図3は、本発明の実施の形態2にかかる縦型MOSFETのチップを示す概略図で方形のチップを4等分した角部を示す部分平面図である。理解を容易にするために、並列pn構造部(点線)と、該並列pn構造部を囲む絶縁領域(一点鎖線)と、最外周部のn型領域(一点鎖線)のみを示している。図4は、図3中のB−B線に沿って切断した部分を示す断面図である。図3および図4に示すように、実施の形態2が実施の形態1と異なるのは、つぎの3点である。
図5は、本発明の実施の形態3にかかる縦型MOSFETのチップを示す概略図で方形のチップを4等分した角部を示す部分平面図である。理解を容易にするために、並列pn構造部(点線)と、該並列pn構造部を囲む絶縁領域(一点鎖線)と、最外周部のn型領域(一点鎖線)のみを示している。図6は、図5中のC−C線に沿って切断した部分を示す断面図である。図5および図6に示すように、実施の形態3が実施の形態1と異なるのは、つぎの3点である。
図7は、本発明の実施の形態4にかかる縦型MOSFETのチップを示す概略図で方形のチップを4等分した角部を示す部分平面図である。理解を容易にするために、並列pn構造部(点線)と、該並列pn構造部を囲む絶縁領域(一点鎖線)と、最外周部のn型領域(一点鎖線)のみを示している。実施の形態4では、x方向とy方向がいかなる方向であるかはあまり関係ない。
図8は、本発明の実施の形態5にかかる縦型MOSFETのチップを示す概略図で方形のチップを4等分した角部を示す部分平面図である。理解を容易にするために、並列pn構造部(点線)と、該並列pn構造部を囲む絶縁領域(一点鎖線)と、該絶縁領域内に設けられた第2の絶縁領域(破線)と、最外周部のn型領域(一点鎖線)のみを示している。図9は、図8中のD−D線に沿って切断した部分を示す断面図である。図8および図9に示すように、実施の形態5が実施の形態1と異なるのは、つぎの2点である。
2,2a,2c,2d 第2導電型領域(p型仕切り領域)
2b 第2導電型領域(p型領域)
3a pベース領域
10a フィールドプレート電極
11 低抵抗層(n+ドレイン層)
13 外周領域(n型外周領域)
14,17 絶縁領域
16 空乏層ストッパー電極
20 並列pn構造部
Claims (9)
- 第1の主面と第2の主面との間に低抵抗層を有し、該低抵抗層と前記第1の主面との間に、第1導電型領域と第2導電型領域とが交互に繰り返し接合された並列pn構造部を有する半導体装置において、
前記並列pn構造部は、前記第1の主面から前記低抵抗層に達する絶縁領域によって囲まれていることを特徴とする半導体装置。 - 前記並列pn構造部の、前記絶縁領域に隣接する第1導電型領域または第2導電型領域の幅は、前記並列pn構造部の、それぞれ前記絶縁領域に隣接しない第1導電型領域または第2導電型領域の幅よりも狭いことを特徴とする請求項1に記載の半導体装置。
- 前記並列pn構造部の、前記絶縁領域に隣接する第1導電型領域または第2導電型領域の幅は、前記並列pn構造部の、それぞれ前記絶縁領域に隣接しない第1導電型領域または第2導電型領域の幅の4分の1以上4分の3以下であることを特徴とする請求項2に記載の半導体装置。
- 前記絶縁領域の一部がフィールドプレート電極で覆われていることを特徴とする請求項1〜3のいずれか一つに記載の半導体装置。
- 前記絶縁領域の側面に、前記第1の主面側に設けられた第2導電型のベース領域が接していることを特徴とする請求項1〜4のいずれか一つに記載の半導体装置。
- 前記絶縁領域は、第1導電型の外周領域によって囲まれていることを特徴とする請求項1〜5のいずれか一つに記載の半導体装置。
- 前記外周領域は、前記低抵抗層に接触していることを特徴とする請求項6に記載の半導体装置。
- 前記外周領域と前記第1の主面との間に、第2導電型領域が設けられていることを特徴とする請求項6または7に記載の半導体装置。
- 前記絶縁領域の一部が、前記低抵抗層と同電位となる電極で覆われていることを特徴とする請求項6〜8のいずれか一つに記載の半導体装置。
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JP2003369566A JP4289123B2 (ja) | 2003-10-29 | 2003-10-29 | 半導体装置 |
US10/973,946 US7235841B2 (en) | 2003-10-29 | 2004-10-26 | Semiconductor device |
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JP2007250912A (ja) * | 2006-03-16 | 2007-09-27 | Toyota Central Res & Dev Lab Inc | 半導体装置 |
JP2007335658A (ja) * | 2006-06-15 | 2007-12-27 | Fuji Electric Holdings Co Ltd | 半導体装置およびその製造方法 |
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CN1019720B (zh) * | 1991-03-19 | 1992-12-30 | 电子科技大学 | 半导体功率器件 |
DE4309764C2 (de) * | 1993-03-25 | 1997-01-30 | Siemens Ag | Leistungs-MOSFET |
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2003
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2004
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