JP2005134364A - 角速度センサ用音叉型水晶振動子及びその製造方法 - Google Patents
角速度センサ用音叉型水晶振動子及びその製造方法 Download PDFInfo
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- JP2005134364A JP2005134364A JP2004087735A JP2004087735A JP2005134364A JP 2005134364 A JP2005134364 A JP 2005134364A JP 2004087735 A JP2004087735 A JP 2004087735A JP 2004087735 A JP2004087735 A JP 2004087735A JP 2005134364 A JP2005134364 A JP 2005134364A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 12
- 239000010453 quartz Substances 0.000 title claims abstract description 11
- 239000013078 crystal Substances 0.000 claims abstract description 92
- 238000000034 method Methods 0.000 claims abstract description 54
- 238000001259 photo etching Methods 0.000 claims abstract description 36
- 239000002184 metal Substances 0.000 claims description 73
- 229910052751 metal Inorganic materials 0.000 claims description 73
- 239000007772 electrode material Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 7
- 238000007740 vapor deposition Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 5
- 238000001039 wet etching Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000010931 gold Substances 0.000 description 11
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 7
- 238000007747 plating Methods 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/026—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the tuning fork type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49005—Acoustic transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4957—Sound device making
- Y10T29/49574—Musical instrument or tuning fork making
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Gyroscopes (AREA)
Abstract
【構成】音叉状水晶片の長手方向を結晶軸(XYZ)のY軸、幅方向をX軸、厚み方向をZとし、音叉腕の側面のうちの少なくとも1面に互いに電気的に分離された角速度検出用の第1及び第2のセンサ電極を備える角速度センサ用音叉型水晶振動子において、前記音叉状水晶片は単板水晶ウェハからフォトエッチング技術により形成してあり、前記第1及び第2のセンサ電極の形成される音叉腕の側面は水晶の+X面とし、前記+X面に起因して前記側面の長手方向に生じる突起状稜線部の両側に前記第1及び第2のセンサ電極を配置した構成及びその製造方法とする。
【選択図】図1
Description
また、Auに比べてAgは低エネルギーのレーザ照射で除去できるので装置の簡易化、工数短縮が図れる。
Claims (12)
- 結晶軸(XYZ)のX軸を幅方向、Y軸を長さ方向、Z軸を厚み方向として一対の音叉腕が音叉基部から延出した音叉状水晶片と、前記音叉腕の側面のうちの少なくとも1面に形成され互いに電気的に分離された角速度検出用の第1及び第2のセンサ電極とを備える角速度センサ用音叉型水晶振動子において、前記音叉状水晶片はフォトエッチング技術により形成してあり、前記第1及び第2のセンサ電極は前記音叉腕の側面のうちの+X面上であって、前記+X面の長さ方向に水晶の結晶性に起因して生じる突起状稜線部の両側に配置されたことを特徴とする角速度センサ用音叉型水晶振動子。
- 請求項1において、前記第1及び第2のセンサ電極は、前記音叉状水晶片の前記+X面に設けられた金属膜の前記突起状稜線部上に当たる部分を、前記突起状稜線部に沿って分割して形成された角速度センサ用音叉型水晶振動子。
- 請求項2において、前記分割はフォトエッチング技術によってなされた角速度センサ用音叉型水晶振動子。
- 請求項2において、前記分割はレーザ技術によってなされた角速度センサ用音叉型水晶振動子。
- 結晶軸(XYZ)のX軸を幅方向、Y軸を長さ方向、Z軸を厚み方向として一対の音叉腕が音叉基部から延出した音叉状水晶片と、前記音叉腕の側面のうちの少なくとも1面に形成され互いに電気的に分離された角速度検出用の第1及び第2のセンサ電極とを備える角速度センサ用音叉型水晶振動子の製造方法において、
フォトエッチング技術によって、単板水晶ウエハに、エッチング異方性に起因して突起状稜線部が水晶の+X面の長さ方向に残存する前記音叉状水晶片を多数形成する外形加工工程と、
前記単板水晶ウェハにおける前記音叉状水晶片の両主面及び前記+X面を含む各側面に金属膜を形成する電極材形成工程と、
前記+X面の金属膜を前記突起状稜線部に沿って分割して前記第1及び第2のセンサ電極を形成する電極分割工程とを備えたことを特徴とする角速度センサ用音叉型水晶振動子の製造方法。 - 請求項5の製造方法において、前記電極分割工程はフォトエッチング技術であって、前記+X面の金属膜上にポジ型かネガ型かのフォトレジスト膜を形成する工程と、前記突起状稜線部上のフォトレジスト膜をポジ型かネガ型かに対応した選択的露光及び現像によって除去し前記金属膜部分を露出する工程と、前記金属膜部分をウェットエッチングして前記金属膜を分割して前記第1及び第2のセンサ電極を形成する工程とを備えた角速度センサ用音叉型水晶振動子の製造方法。
- 請求項6の製造方法において、前記選択的露光は前記水晶ウェハの主面に対して垂直方向からとした角速度センサ用音叉型水晶振動子の製造方法。
- 請求項6の製造方法において、前記金属膜は両主面及び各側面に蒸着又はスパッタによって同時に形成され、前記両主面の電極と前記第1及び第2のセンサ電極を含む前記側面の電極とがフォトエッチングによって一体的に形成された角速度センサ素子用音叉型水晶振動子の製造方法。
- 請求項5の製造方法において、前記電極分割工程は、前記金属膜のうちの前記突起状稜線部に設けられた金属膜部分をレーザによって切除したレーザ分割工程である角速度センサ用音叉型水晶振動子。
- 請求項9の製造方法において、前記レーザ分割工程は、両主面及び各側面に前記金属膜が同時に形成され、フォトエッチング技術によって前記両主面の電極が形成された後である角速度センサ素子用音叉型水晶振動子の製造方法。
- 請求項9の製造方法において、前記レーザ分割工程は、フォトエッチング技術によって両主面の電極が形成された後、リフトオフによって各側面に金属膜が形成された後である角速度センサ素子用音叉型水晶振動子の製造方法。
- 請求項11において、前記両主面の電極と前記各側面の金属膜とは異なる材料である角速度センサ素子用音叉型水晶振動子の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004087735A JP4509621B2 (ja) | 2003-10-10 | 2004-03-24 | 角速度センサ用音叉型水晶振動子の製造方法 |
US10/959,930 US7075218B2 (en) | 2003-10-10 | 2004-10-06 | Tuning fork type crystal component for angular velocity sensor and manufacturing method thereof |
US11/481,290 US7716807B2 (en) | 2003-10-10 | 2006-07-05 | Process of making a tuning fork type crystal component |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003351910 | 2003-10-10 | ||
JP2004087735A JP4509621B2 (ja) | 2003-10-10 | 2004-03-24 | 角速度センサ用音叉型水晶振動子の製造方法 |
Publications (2)
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JP2005134364A true JP2005134364A (ja) | 2005-05-26 |
JP4509621B2 JP4509621B2 (ja) | 2010-07-21 |
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JP2004087735A Expired - Fee Related JP4509621B2 (ja) | 2003-10-10 | 2004-03-24 | 角速度センサ用音叉型水晶振動子の製造方法 |
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US (2) | US7075218B2 (ja) |
JP (1) | JP4509621B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7544464B2 (en) | 2006-10-10 | 2009-06-09 | Nihon Dempa Kogyo Co., Ltd. | Manufacturing method of tuning-fork type quartz crystal resonator |
US20090205178A1 (en) * | 2008-02-14 | 2009-08-20 | Takashi Kobayashi | Method of fabricating piezoelectric vibrating piece, piezoelectric vibrating piece, wafer, piezoelectric vibrator, oscillator, electronic apparatus and radiowave timepiece |
US7802473B2 (en) * | 2006-12-22 | 2010-09-28 | Tamagawa Seiki Co., Ltd. | Angular velocity sensor |
US7975364B2 (en) | 2006-10-06 | 2011-07-12 | Nihon Dempa Kogyo Co., Ltd. | Method for producing a tuning-fork type crystal vibrating piece |
JP2013205326A (ja) * | 2012-03-29 | 2013-10-07 | Seiko Epson Corp | 振動片の製造方法、振動片、振動子、電子部品、電子機器 |
US10090454B2 (en) | 2012-02-24 | 2018-10-02 | Epcos Ag | Method for producing an electric contact connection of a multilayer component |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070247032A1 (en) * | 2004-06-21 | 2007-10-25 | Tomoo Ikeda | Crystal Device and Method for Manufacturing Crystal Device |
JP4668739B2 (ja) * | 2005-08-29 | 2011-04-13 | シチズンホールディングス株式会社 | 振動ジャイロ |
US7694734B2 (en) * | 2005-10-31 | 2010-04-13 | Baker Hughes Incorporated | Method and apparatus for insulating a resonator downhole |
CN101523721B (zh) * | 2006-08-02 | 2012-07-04 | Eta瑞士钟表制造股份有限公司 | 具有短路防止工具的压电谐振器 |
JP2016085190A (ja) * | 2014-10-29 | 2016-05-19 | セイコーエプソン株式会社 | 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体 |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5413286A (en) * | 1977-07-01 | 1979-01-31 | Citizen Watch Co Ltd | Manufacture for subminiature crystal oscillator |
JPH04359575A (ja) * | 1991-06-06 | 1992-12-11 | Canon Inc | 集積化アクチュエーターの製造方法 |
JPH06104684A (ja) * | 1992-09-21 | 1994-04-15 | Matsushita Electric Ind Co Ltd | 圧電共振子 |
JPH0854243A (ja) * | 1994-08-13 | 1996-02-27 | Koji Toda | 超音波ジャイロスコープ |
JPH09199979A (ja) * | 1996-01-23 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 振動子 |
JPH10288527A (ja) * | 1997-04-16 | 1998-10-27 | Denso Corp | 角速度センサ |
JPH11287657A (ja) * | 1998-03-31 | 1999-10-19 | Miyota Kk | 電極形成用蒸着マスク及び音叉型角速度センサ |
JP2000004138A (ja) * | 1998-03-31 | 2000-01-07 | Seiko Epson Corp | 振動子の製造方法及び電子機器 |
JP2000055668A (ja) * | 1998-08-06 | 2000-02-25 | Hitachi Ltd | 角速度検出センサ |
JP2000249553A (ja) * | 1999-02-26 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP2003060480A (ja) * | 2001-08-21 | 2003-02-28 | Toyo Commun Equip Co Ltd | 超薄板atカット水晶共振素子 |
JP2003185441A (ja) * | 2001-10-09 | 2003-07-03 | Fujitsu Ltd | 角速度センサ |
JP2004072609A (ja) * | 2002-08-08 | 2004-03-04 | Seiko Epson Corp | 水晶デバイスと水晶デバイスの製造方法、ならびに水晶デバイスを利用した携帯電話装置ならびに水晶デバイスを利用した電子機器 |
JP2004120351A (ja) * | 2002-09-26 | 2004-04-15 | Seiko Epson Corp | 圧電振動片の製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5291669A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
JPS58157211A (ja) * | 1982-03-13 | 1983-09-19 | Kinseki Kk | 圧電振動板の製造方法 |
US5325574A (en) * | 1987-02-27 | 1994-07-05 | Seiko Epson Corporation | Method of forming a quartz oscillator temperature sensor |
US5607236A (en) * | 1987-02-27 | 1997-03-04 | Seiko Epson Corporation | Quartz oscillator temperature sensor |
JP4001029B2 (ja) * | 2002-03-25 | 2007-10-31 | セイコーエプソン株式会社 | 音叉型圧電振動片及びその製造方法、圧電デバイス |
-
2004
- 2004-03-24 JP JP2004087735A patent/JP4509621B2/ja not_active Expired - Fee Related
- 2004-10-06 US US10/959,930 patent/US7075218B2/en not_active Expired - Fee Related
-
2006
- 2006-07-05 US US11/481,290 patent/US7716807B2/en not_active Expired - Fee Related
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5413286A (en) * | 1977-07-01 | 1979-01-31 | Citizen Watch Co Ltd | Manufacture for subminiature crystal oscillator |
JPH04359575A (ja) * | 1991-06-06 | 1992-12-11 | Canon Inc | 集積化アクチュエーターの製造方法 |
JPH06104684A (ja) * | 1992-09-21 | 1994-04-15 | Matsushita Electric Ind Co Ltd | 圧電共振子 |
JPH0854243A (ja) * | 1994-08-13 | 1996-02-27 | Koji Toda | 超音波ジャイロスコープ |
JPH09199979A (ja) * | 1996-01-23 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 振動子 |
JPH10288527A (ja) * | 1997-04-16 | 1998-10-27 | Denso Corp | 角速度センサ |
JPH11287657A (ja) * | 1998-03-31 | 1999-10-19 | Miyota Kk | 電極形成用蒸着マスク及び音叉型角速度センサ |
JP2000004138A (ja) * | 1998-03-31 | 2000-01-07 | Seiko Epson Corp | 振動子の製造方法及び電子機器 |
JP2000055668A (ja) * | 1998-08-06 | 2000-02-25 | Hitachi Ltd | 角速度検出センサ |
JP2000249553A (ja) * | 1999-02-26 | 2000-09-14 | Matsushita Electric Ind Co Ltd | 角速度センサ |
JP2003060480A (ja) * | 2001-08-21 | 2003-02-28 | Toyo Commun Equip Co Ltd | 超薄板atカット水晶共振素子 |
JP2003185441A (ja) * | 2001-10-09 | 2003-07-03 | Fujitsu Ltd | 角速度センサ |
JP2004072609A (ja) * | 2002-08-08 | 2004-03-04 | Seiko Epson Corp | 水晶デバイスと水晶デバイスの製造方法、ならびに水晶デバイスを利用した携帯電話装置ならびに水晶デバイスを利用した電子機器 |
JP2004120351A (ja) * | 2002-09-26 | 2004-04-15 | Seiko Epson Corp | 圧電振動片の製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7975364B2 (en) | 2006-10-06 | 2011-07-12 | Nihon Dempa Kogyo Co., Ltd. | Method for producing a tuning-fork type crystal vibrating piece |
US7544464B2 (en) | 2006-10-10 | 2009-06-09 | Nihon Dempa Kogyo Co., Ltd. | Manufacturing method of tuning-fork type quartz crystal resonator |
US7859173B2 (en) | 2006-10-10 | 2010-12-28 | Nihon Dempa Kogyo Co. Ltd. | Tuning fork type quartz crystal resonator |
US7802473B2 (en) * | 2006-12-22 | 2010-09-28 | Tamagawa Seiki Co., Ltd. | Angular velocity sensor |
US20090205178A1 (en) * | 2008-02-14 | 2009-08-20 | Takashi Kobayashi | Method of fabricating piezoelectric vibrating piece, piezoelectric vibrating piece, wafer, piezoelectric vibrator, oscillator, electronic apparatus and radiowave timepiece |
US8176606B2 (en) * | 2008-02-14 | 2012-05-15 | Seiko Instruments Inc. | Method of fabricating a piezoelectric vibrating piece |
US10090454B2 (en) | 2012-02-24 | 2018-10-02 | Epcos Ag | Method for producing an electric contact connection of a multilayer component |
JP2013205326A (ja) * | 2012-03-29 | 2013-10-07 | Seiko Epson Corp | 振動片の製造方法、振動片、振動子、電子部品、電子機器 |
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US7075218B2 (en) | 2006-07-11 |
US20060250051A1 (en) | 2006-11-09 |
US20050122006A1 (en) | 2005-06-09 |
US7716807B2 (en) | 2010-05-18 |
JP4509621B2 (ja) | 2010-07-21 |
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