JP2005131621A5 - - Google Patents

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Publication number
JP2005131621A5
JP2005131621A5 JP2003405202A JP2003405202A JP2005131621A5 JP 2005131621 A5 JP2005131621 A5 JP 2005131621A5 JP 2003405202 A JP2003405202 A JP 2003405202A JP 2003405202 A JP2003405202 A JP 2003405202A JP 2005131621 A5 JP2005131621 A5 JP 2005131621A5
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JP
Japan
Prior art keywords
substrate
movement path
thin film
nozzle
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2003405202A
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English (en)
Japanese (ja)
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JP2005131621A (ja
JP4689159B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2003405202A priority Critical patent/JP4689159B2/ja
Priority claimed from JP2003405202A external-priority patent/JP4689159B2/ja
Priority to US10/970,712 priority patent/US20050122351A1/en
Publication of JP2005131621A publication Critical patent/JP2005131621A/ja
Publication of JP2005131621A5 publication Critical patent/JP2005131621A5/ja
Priority to US13/049,078 priority patent/US8322847B2/en
Application granted granted Critical
Publication of JP4689159B2 publication Critical patent/JP4689159B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2003405202A 2003-10-28 2003-10-28 液滴吐出システム Expired - Fee Related JP4689159B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2003405202A JP4689159B2 (ja) 2003-10-28 2003-10-28 液滴吐出システム
US10/970,712 US20050122351A1 (en) 2003-10-28 2004-10-21 Liquid droplet ejection system and control program of ejection condition of compositions
US13/049,078 US8322847B2 (en) 2003-10-28 2011-03-16 Liquid droplet ejection system and control program of ejection condition of compositions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003405202A JP4689159B2 (ja) 2003-10-28 2003-10-28 液滴吐出システム

Publications (3)

Publication Number Publication Date
JP2005131621A JP2005131621A (ja) 2005-05-26
JP2005131621A5 true JP2005131621A5 (enExample) 2006-12-21
JP4689159B2 JP4689159B2 (ja) 2011-05-25

Family

ID=34631697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003405202A Expired - Fee Related JP4689159B2 (ja) 2003-10-28 2003-10-28 液滴吐出システム

Country Status (2)

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US (2) US20050122351A1 (enExample)
JP (1) JP4689159B2 (enExample)

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