JP2005097083A5 - - Google Patents

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Publication number
JP2005097083A5
JP2005097083A5 JP2004154689A JP2004154689A JP2005097083A5 JP 2005097083 A5 JP2005097083 A5 JP 2005097083A5 JP 2004154689 A JP2004154689 A JP 2004154689A JP 2004154689 A JP2004154689 A JP 2004154689A JP 2005097083 A5 JP2005097083 A5 JP 2005097083A5
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JP
Japan
Prior art keywords
chemical solution
hydrofluoric acid
reaction
reaction system
calcium carbonate
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Granted
Application number
JP2004154689A
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English (en)
Japanese (ja)
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JP2005097083A (ja
JP3801187B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2004154689A priority Critical patent/JP3801187B2/ja
Priority claimed from JP2004154689A external-priority patent/JP3801187B2/ja
Priority to CNB2004100570181A priority patent/CN100393635C/zh
Priority to US10/922,097 priority patent/US20050084442A1/en
Publication of JP2005097083A publication Critical patent/JP2005097083A/ja
Publication of JP2005097083A5 publication Critical patent/JP2005097083A5/ja
Application granted granted Critical
Publication of JP3801187B2 publication Critical patent/JP3801187B2/ja
Priority to US12/007,022 priority patent/US20080124267A1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004154689A 2003-08-28 2004-05-25 薬液再処理方法及び、蛍石の製造方法 Expired - Fee Related JP3801187B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004154689A JP3801187B2 (ja) 2003-08-28 2004-05-25 薬液再処理方法及び、蛍石の製造方法
CNB2004100570181A CN100393635C (zh) 2003-08-28 2004-08-20 药液回收处理方法及药液回收处理装置、萤石的制造方法
US10/922,097 US20050084442A1 (en) 2003-08-28 2004-08-20 Chemical reprocessing method, chemical reprocessing apparatus, and method of manufacturing fluorite
US12/007,022 US20080124267A1 (en) 2003-08-28 2008-01-04 Chemical reprocessing method, chemical reprocessing apparatus, and method of manufacturing fluorite

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003304589 2003-08-28
JP2004154689A JP3801187B2 (ja) 2003-08-28 2004-05-25 薬液再処理方法及び、蛍石の製造方法

Publications (3)

Publication Number Publication Date
JP2005097083A JP2005097083A (ja) 2005-04-14
JP2005097083A5 true JP2005097083A5 (enExample) 2005-12-22
JP3801187B2 JP3801187B2 (ja) 2006-07-26

Family

ID=34467295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004154689A Expired - Fee Related JP3801187B2 (ja) 2003-08-28 2004-05-25 薬液再処理方法及び、蛍石の製造方法

Country Status (3)

Country Link
US (2) US20050084442A1 (enExample)
JP (1) JP3801187B2 (enExample)
CN (1) CN100393635C (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087829B2 (ja) * 2005-08-31 2012-12-05 セイコーエプソン株式会社 蛍石の製造方法
US20110023908A1 (en) * 2009-07-30 2011-02-03 Applied Materials, Inc. Methods and apparatus for process abatement with recovery and reuse of abatement effluent
US20110275221A1 (en) * 2010-05-07 2011-11-10 Lam Research Ag Method for treatment substrates and treatment composition for said method
JP5260796B2 (ja) 2010-07-22 2013-08-14 日本結晶光学株式会社 蛍石
RU2472705C1 (ru) * 2011-06-21 2013-01-20 Открытое акционерное общество "Сибирский химический комбинат" Способ получения синтетического флюорита
CN103086555A (zh) * 2011-10-31 2013-05-08 库特勒自动化系统(苏州)有限公司 硅晶片蚀刻废水处理系统及处理方法
TWI449668B (zh) * 2012-04-09 2014-08-21 姚正義 Preparation method of calcium fluoride
TWI490168B (zh) * 2012-06-25 2015-07-01 Silicor Materials Inc 純化無機鹽之方法及其用途
JP6079524B2 (ja) * 2013-09-13 2017-02-15 旭硝子株式会社 再生フッ化カルシウムの製造方法
CN103570053B (zh) * 2013-10-31 2016-06-22 阜新金晟环保科技有限公司 萤石粉精加工工艺
CN104760984A (zh) * 2014-01-08 2015-07-08 贾玉铭 采用含硫酸等混酸的氢氟酸制造氟化钙的方法
KR101773577B1 (ko) * 2016-03-25 2017-09-01 한국화학연구원 폐냉매 분해가스로부터 불화물 회수방법
RU2736038C1 (ru) * 2020-04-21 2020-11-11 Общество с ограниченной ответственностью "Промтехнологии" Способ получения минерализатора на основе фторида кальция
JP7555541B2 (ja) * 2020-11-27 2024-09-25 上田石灰製造株式会社 フッ素吸着剤の製造方法及びフッ素除去・回収方法

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956118A (en) * 1968-05-23 1976-05-11 Rockwell International Corporation Removal of phosphate from waste water
US3743704A (en) * 1971-05-12 1973-07-03 Du Pont Removal of hf from an hf-containing gas
US4424067A (en) * 1982-07-29 1984-01-03 Allied Corporation Purification of anhydrous hydrogen fluoride
US4472368A (en) * 1982-12-27 1984-09-18 Agrico Chemical Company Neutralization of cooling pond water in phosphoric acid plants
CN1010772B (zh) * 1988-03-26 1990-12-12 中南工业大学 矿山含氟废水处理方法
US4952386A (en) * 1988-05-20 1990-08-28 Athens Corporation Method and apparatus for purifying hydrogen fluoride
DE69103339T2 (de) * 1990-06-01 1995-03-16 Asahi Glass Co Ltd Verfahren zur Herstellung von Fluorwasserstoffsäure.
US5362461A (en) * 1991-10-03 1994-11-08 Kurita Water Industries, Ltd. Method for recovering calcium fluoride from fluoroetchant
JP3266309B2 (ja) * 1992-04-15 2002-03-18 栗田工業株式会社 酸性フッ素含有水の処理方法
FR2771727B1 (fr) * 1997-11-28 2000-02-11 Sgs Thomson Microelectronics Defluoruration d'eaux usees
JP3169899B2 (ja) * 1998-07-15 2001-05-28 日本電気環境エンジニアリング株式会社 フッ素含有排水の処理方法とその装置
WO2000003952A1 (en) * 1998-07-17 2000-01-27 Nec Corporation Method for treating a fluorine-containing waste water and treating apparatus
JP3697361B2 (ja) * 1999-01-28 2005-09-21 シャープ株式会社 排水処理方法および排水処理装置
JP2001137864A (ja) * 1999-11-10 2001-05-22 Daikin Ind Ltd フッ酸を含有する廃水の処理方法
US7056477B1 (en) * 2000-02-03 2006-06-06 Cellular Process Chemistry, Inc. Modular chemical production system incorporating a microreactor
US6613230B2 (en) * 2000-07-07 2003-09-02 Ionics, Incorporated Method for simultaneous removal of arsenic and fluoride from aqueous solutions
US6645385B2 (en) * 2000-09-26 2003-11-11 Ionics, Incorporated System and method for removal of fluoride from wastewater using single fluoride sensing electrode
US7097689B2 (en) * 2002-06-20 2006-08-29 Praxair Technology, Inc. Process and system for purifying gases
US7182873B2 (en) * 2004-07-08 2007-02-27 Powerchip Semiconductor Corp. Method of fluoride-containing wastewater treatment

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