CN100393635C - 药液回收处理方法及药液回收处理装置、萤石的制造方法 - Google Patents

药液回收处理方法及药液回收处理装置、萤石的制造方法 Download PDF

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CN100393635C
CN100393635C CNB2004100570181A CN200410057018A CN100393635C CN 100393635 C CN100393635 C CN 100393635C CN B2004100570181 A CNB2004100570181 A CN B2004100570181A CN 200410057018 A CN200410057018 A CN 200410057018A CN 100393635 C CN100393635 C CN 100393635C
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hydrofluoric acid
reaction
calcium fluoride
calcium carbonate
value
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Chinese (zh)
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CN1590310A (zh
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八浩二
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Seiko Epson Corp
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Seiko Epson Corp
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01FCOMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F11/00Compounds of calcium, strontium, or barium
    • C01F11/20Halides
    • C01F11/22Fluorides

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Inorganic Chemistry (AREA)
  • Removal Of Specific Substances (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
CNB2004100570181A 2003-08-28 2004-08-20 药液回收处理方法及药液回收处理装置、萤石的制造方法 Expired - Fee Related CN100393635C (zh)

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JP2003304589 2003-08-28
JP2003304589 2003-08-28
JP2004154689 2004-05-25
JP2004154689A JP3801187B2 (ja) 2003-08-28 2004-05-25 薬液再処理方法及び、蛍石の製造方法

Related Child Applications (2)

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CNA2007103070896A Division CN101200302A (zh) 2003-08-28 2004-08-20 药液回收处理方法及药液回收处理装置、萤石的制造方法
CNA2007103070909A Division CN101200303A (zh) 2003-08-28 2004-08-20 药液回收处理方法及药液回收处理装置、萤石的制造方法

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CN1590310A CN1590310A (zh) 2005-03-09
CN100393635C true CN100393635C (zh) 2008-06-11

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US (2) US20050084442A1 (enExample)
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CN (1) CN100393635C (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087829B2 (ja) * 2005-08-31 2012-12-05 セイコーエプソン株式会社 蛍石の製造方法
US20110023908A1 (en) * 2009-07-30 2011-02-03 Applied Materials, Inc. Methods and apparatus for process abatement with recovery and reuse of abatement effluent
US20110275221A1 (en) * 2010-05-07 2011-11-10 Lam Research Ag Method for treatment substrates and treatment composition for said method
JP5260796B2 (ja) 2010-07-22 2013-08-14 日本結晶光学株式会社 蛍石
RU2472705C1 (ru) * 2011-06-21 2013-01-20 Открытое акционерное общество "Сибирский химический комбинат" Способ получения синтетического флюорита
CN103086555A (zh) * 2011-10-31 2013-05-08 库特勒自动化系统(苏州)有限公司 硅晶片蚀刻废水处理系统及处理方法
TWI449668B (zh) * 2012-04-09 2014-08-21 姚正義 Preparation method of calcium fluoride
TWI490168B (zh) * 2012-06-25 2015-07-01 Silicor Materials Inc 純化無機鹽之方法及其用途
JP6079524B2 (ja) * 2013-09-13 2017-02-15 旭硝子株式会社 再生フッ化カルシウムの製造方法
CN103570053B (zh) * 2013-10-31 2016-06-22 阜新金晟环保科技有限公司 萤石粉精加工工艺
CN104760984A (zh) * 2014-01-08 2015-07-08 贾玉铭 采用含硫酸等混酸的氢氟酸制造氟化钙的方法
KR101773577B1 (ko) * 2016-03-25 2017-09-01 한국화학연구원 폐냉매 분해가스로부터 불화물 회수방법
RU2736038C1 (ru) * 2020-04-21 2020-11-11 Общество с ограниченной ответственностью "Промтехнологии" Способ получения минерализатора на основе фторида кальция
JP7555541B2 (ja) * 2020-11-27 2024-09-25 上田石灰製造株式会社 フッ素吸着剤の製造方法及びフッ素除去・回収方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1035997A (zh) * 1988-03-26 1989-10-04 中南工业大学 矿山含氟废水处理方法
JPH05293475A (ja) * 1992-04-15 1993-11-09 Kurita Water Ind Ltd 酸性フッ素含有水の処理方法
CN1244501A (zh) * 1998-07-15 2000-02-16 日本电气株式会社 含氟化物污水处理设备及其方法
JP2001137864A (ja) * 1999-11-10 2001-05-22 Daikin Ind Ltd フッ酸を含有する廃水の処理方法
CN1311759A (zh) * 1998-07-17 2001-09-05 日本电气株式会社 含氟废水的处理方法及设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3956118A (en) * 1968-05-23 1976-05-11 Rockwell International Corporation Removal of phosphate from waste water
US3743704A (en) * 1971-05-12 1973-07-03 Du Pont Removal of hf from an hf-containing gas
US4424067A (en) * 1982-07-29 1984-01-03 Allied Corporation Purification of anhydrous hydrogen fluoride
US4472368A (en) * 1982-12-27 1984-09-18 Agrico Chemical Company Neutralization of cooling pond water in phosphoric acid plants
US4952386A (en) * 1988-05-20 1990-08-28 Athens Corporation Method and apparatus for purifying hydrogen fluoride
DE69103339T2 (de) * 1990-06-01 1995-03-16 Asahi Glass Co Ltd Verfahren zur Herstellung von Fluorwasserstoffsäure.
US5362461A (en) * 1991-10-03 1994-11-08 Kurita Water Industries, Ltd. Method for recovering calcium fluoride from fluoroetchant
FR2771727B1 (fr) * 1997-11-28 2000-02-11 Sgs Thomson Microelectronics Defluoruration d'eaux usees
JP3697361B2 (ja) * 1999-01-28 2005-09-21 シャープ株式会社 排水処理方法および排水処理装置
US7056477B1 (en) * 2000-02-03 2006-06-06 Cellular Process Chemistry, Inc. Modular chemical production system incorporating a microreactor
US6613230B2 (en) * 2000-07-07 2003-09-02 Ionics, Incorporated Method for simultaneous removal of arsenic and fluoride from aqueous solutions
US6645385B2 (en) * 2000-09-26 2003-11-11 Ionics, Incorporated System and method for removal of fluoride from wastewater using single fluoride sensing electrode
US7097689B2 (en) * 2002-06-20 2006-08-29 Praxair Technology, Inc. Process and system for purifying gases
US7182873B2 (en) * 2004-07-08 2007-02-27 Powerchip Semiconductor Corp. Method of fluoride-containing wastewater treatment

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1035997A (zh) * 1988-03-26 1989-10-04 中南工业大学 矿山含氟废水处理方法
JPH05293475A (ja) * 1992-04-15 1993-11-09 Kurita Water Ind Ltd 酸性フッ素含有水の処理方法
CN1244501A (zh) * 1998-07-15 2000-02-16 日本电气株式会社 含氟化物污水处理设备及其方法
CN1311759A (zh) * 1998-07-17 2001-09-05 日本电气株式会社 含氟废水的处理方法及设备
JP2001137864A (ja) * 1999-11-10 2001-05-22 Daikin Ind Ltd フッ酸を含有する廃水の処理方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
含氟酸性废水处理技术研究与应用. 杜庆洪等.非金属矿,第25卷第6期. 2002 *
含氟酸性废水的处理. 魏兰等.磷肥与复肥,第17卷第4期. 2002 *
含氟酸性废水的治理与利用. 刘莉等.工业安全与环保,第29卷第2期. 2003 *
吸附法处理含氟废水的研究进展. 周钰明等.离子交换与吸附,第17卷第5期. 2001 *

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Publication number Publication date
JP2005097083A (ja) 2005-04-14
CN1590310A (zh) 2005-03-09
US20080124267A1 (en) 2008-05-29
US20050084442A1 (en) 2005-04-21
JP3801187B2 (ja) 2006-07-26

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