JP2005045182A - 化合物半導体層の形成方法 - Google Patents
化合物半導体層の形成方法 Download PDFInfo
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Abstract
【解決手段】 基板上に、該基板とは異種の化合物半導体からなる薄膜を成膜して化合物半導体層を形成する方法であって、基板上に酸化性物質からなる薄膜を成膜した後、前記酸化性物質の薄膜の上に化合物半導体からなる薄膜を成膜し、次いで前記酸化性物質を酸化して酸化物層に転化し、その後前記化合物半導体からなる薄膜の上に、半導体素子を形成する化合物半導体層を順次成膜することを特徴とする化合物半導体層の形成方法。
【選択図】 図1
Description
10 酸化性物質からなる薄膜
11 酸化膜
20 化合物半導体薄膜
30 素子部用化合物半導体層
Claims (6)
- 基板上に、該基板とは異種の化合物半導体からなる薄膜を成膜して化合物半導体層を形成する方法であって、
基板上に酸化性物質からなる薄膜を成膜した後、前記酸化性物質の薄膜の上に化合物半導体からなる薄膜を成膜し、次いで前記酸化性物質を酸化して酸化物層に転化し、その後前記化合物半導体からなる薄膜の上に、半導体素子を形成する化合物半導体層を順次成膜することを特徴とする化合物半導体層の形成方法。 - 酸化性物質の薄膜の上に、化合物半導体の薄膜を5〜100nmの膜厚で成膜することを特徴とする請求項1記載の化合物半導体層の形成方法。
- 酸化性物質がAlを50%以上含むIII−V族化合物半導体であり、酸化性ガスを接触させて多孔質のAl2O3に転化させることを特徴とする請求項1または2記載の化合物半導体層の形成方法。
- 酸化性物質からなる薄膜に、酸化性ガスの通路となる溝を形成することを特徴とする請求項3記載の化合物半導体層の形成方法。
- 半導体素子を形成する化合物半導体が、Al、Ga、In、As、P、Sb、Nの少なくとも1種を含む混晶であることを特徴とする請求項1〜4の何れか1項に記載の化合物半導体層の形成方法。
- 半導体素子を形成する化合物半導体層を形成した後、酸化物層を除去することを特徴とする請求項1〜5の何れか1項に記載の化合物半導体層の形成方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003280286A JP3868407B2 (ja) | 2003-07-25 | 2003-07-25 | 化合物半導体層の形成方法 |
US10/897,915 US7132351B2 (en) | 2003-07-25 | 2004-07-23 | Method of fabricating a compound semiconductor layer |
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JP2003280286A JP3868407B2 (ja) | 2003-07-25 | 2003-07-25 | 化合物半導体層の形成方法 |
Publications (2)
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JP2005045182A true JP2005045182A (ja) | 2005-02-17 |
JP3868407B2 JP3868407B2 (ja) | 2007-01-17 |
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JP2003280286A Expired - Fee Related JP3868407B2 (ja) | 2003-07-25 | 2003-07-25 | 化合物半導体層の形成方法 |
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JP (1) | JP3868407B2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008134343A (ja) * | 2006-11-27 | 2008-06-12 | Matsushita Electric Works Ltd | 半導体レンズおよびその製造方法 |
JP2013002995A (ja) * | 2011-06-17 | 2013-01-07 | Pioneer Electronic Corp | 光伝導基板およびこれを用いた電磁波発生検出装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11721954B2 (en) | 2019-07-19 | 2023-08-08 | Visual Photonics Epitaxy Co., Ltd. | Vertical cavity surface emitting laser diode (VCSEL) having AlGaAsP layer with compressive strain |
TWI768957B (zh) * | 2021-06-08 | 2022-06-21 | 合晶科技股份有限公司 | 複合基板及其製造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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US5588994A (en) * | 1980-04-10 | 1996-12-31 | Massachusetts Institute Of Technology | Method of producing sheets of crystalline material and devices made therefrom |
JPH0532486A (ja) | 1991-03-15 | 1993-02-09 | Sumitomo Metal Ind Ltd | 化合物半導体基板の製造方法 |
JP3063475B2 (ja) | 1993-08-31 | 2000-07-12 | 日産自動車株式会社 | インモールド転写成形装置 |
US5400354A (en) * | 1994-02-08 | 1995-03-21 | Ludowise; Michael | Laminated upper cladding structure for a light-emitting device |
KR0148599B1 (ko) * | 1994-11-15 | 1998-12-01 | 양승택 | 유전체 박막상의 무결함 화합물 반도체 박막의 제조방법 |
US5881085A (en) * | 1996-07-25 | 1999-03-09 | Picolight, Incorporated | Lens comprising at least one oxidized layer and method for forming same |
JP3814880B2 (ja) | 1996-08-05 | 2006-08-30 | 富士ゼロックス株式会社 | 半導体装置およびその製造方法 |
US5724374A (en) * | 1996-08-19 | 1998-03-03 | Picolight Incorporated | Aperture comprising an oxidized region and a semiconductor material |
JP2000223502A (ja) | 1999-01-28 | 2000-08-11 | Kyocera Corp | 半導体基板の製造方法 |
US6472695B1 (en) * | 1999-06-18 | 2002-10-29 | The Regents Of The University Of California | Increased lateral oxidation rate of aluminum indium arsenide |
US6714572B2 (en) * | 1999-12-01 | 2004-03-30 | The Regents Of The University Of California | Tapered air apertures for thermally robust vertical cavity laser structures |
US6548908B2 (en) * | 1999-12-27 | 2003-04-15 | Xerox Corporation | Structure and method for planar lateral oxidation in passive devices |
JP2001251016A (ja) * | 1999-12-28 | 2001-09-14 | Canon Inc | 面発光半導体レーザ及びその製造方法 |
US6990135B2 (en) * | 2002-10-28 | 2006-01-24 | Finisar Corporation | Distributed bragg reflector for optoelectronic device |
US6916717B2 (en) * | 2002-05-03 | 2005-07-12 | Motorola, Inc. | Method for growing a monocrystalline oxide layer and for fabricating a semiconductor device on a monocrystalline substrate |
US7170916B2 (en) * | 2002-10-30 | 2007-01-30 | Finisar Corporation | Selectively etchable heterogeneous composite distributed Bragg reflector |
-
2003
- 2003-07-25 JP JP2003280286A patent/JP3868407B2/ja not_active Expired - Fee Related
-
2004
- 2004-07-23 US US10/897,915 patent/US7132351B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008134343A (ja) * | 2006-11-27 | 2008-06-12 | Matsushita Electric Works Ltd | 半導体レンズおよびその製造方法 |
JP2013002995A (ja) * | 2011-06-17 | 2013-01-07 | Pioneer Electronic Corp | 光伝導基板およびこれを用いた電磁波発生検出装置 |
Also Published As
Publication number | Publication date |
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JP3868407B2 (ja) | 2007-01-17 |
US7132351B2 (en) | 2006-11-07 |
US20050020036A1 (en) | 2005-01-27 |
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