JP2004172589A5 - - Google Patents
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- Publication number
- JP2004172589A5 JP2004172589A5 JP2003358106A JP2003358106A JP2004172589A5 JP 2004172589 A5 JP2004172589 A5 JP 2004172589A5 JP 2003358106 A JP2003358106 A JP 2003358106A JP 2003358106 A JP2003358106 A JP 2003358106A JP 2004172589 A5 JP2004172589 A5 JP 2004172589A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating sheet
- electrode
- sheet
- insulating
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims 16
- 238000004519 manufacturing process Methods 0.000 claims 8
- 238000000034 method Methods 0.000 claims 5
- 238000005530 etching Methods 0.000 claims 4
- 239000002861 polymer material Substances 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003358106A JP3649239B2 (ja) | 2002-10-28 | 2003-10-17 | シート状コネクターの製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002313457 | 2002-10-28 | ||
| JP2003358106A JP3649239B2 (ja) | 2002-10-28 | 2003-10-17 | シート状コネクターの製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004362950A Division JP3800235B2 (ja) | 2002-10-28 | 2004-12-15 | シート状コネクターおよびその応用 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004172589A JP2004172589A (ja) | 2004-06-17 |
| JP3649239B2 JP3649239B2 (ja) | 2005-05-18 |
| JP2004172589A5 true JP2004172589A5 (cg-RX-API-DMAC7.html) | 2005-06-30 |
Family
ID=32171165
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003358106A Expired - Fee Related JP3649239B2 (ja) | 2002-10-28 | 2003-10-17 | シート状コネクターの製造方法 |
| JP2003358105A Withdrawn JP2004172588A (ja) | 2002-10-28 | 2003-10-17 | シート状コネクターおよびその製造方法並びにプローブ装置 |
| JP2004362950A Expired - Fee Related JP3800235B2 (ja) | 2002-10-28 | 2004-12-15 | シート状コネクターおよびその応用 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003358105A Withdrawn JP2004172588A (ja) | 2002-10-28 | 2003-10-17 | シート状コネクターおよびその製造方法並びにプローブ装置 |
| JP2004362950A Expired - Fee Related JP3800235B2 (ja) | 2002-10-28 | 2004-12-15 | シート状コネクターおよびその応用 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US7318729B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP1503216B1 (cg-RX-API-DMAC7.html) |
| JP (3) | JP3649239B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR100595787B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN1692283A (cg-RX-API-DMAC7.html) |
| AT (1) | ATE464569T1 (cg-RX-API-DMAC7.html) |
| AU (1) | AU2003275649A1 (cg-RX-API-DMAC7.html) |
| DE (1) | DE60332106D1 (cg-RX-API-DMAC7.html) |
| TW (1) | TWI250600B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2004038433A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005048407A1 (ja) * | 2003-11-17 | 2005-05-26 | Jsr Corporation | 異方導電性シートおよびその製造方法並びにその応用製品 |
| TW200602642A (en) * | 2004-04-27 | 2006-01-16 | Jsr Corp | Sheet-like probe, method of producing the same, and application thereof |
| CN100468065C (zh) * | 2004-05-19 | 2009-03-11 | Jsr株式会社 | 片状探针及其制造方法和应用 |
| JP4618633B2 (ja) * | 2004-09-01 | 2011-01-26 | Ｈｏｙａ株式会社 | プローブ部材及びその製造方法 |
| JP4852236B2 (ja) * | 2004-10-08 | 2012-01-11 | パナソニック株式会社 | バンプ付きメンブレンおよびその製造方法およびウエハの検査方法 |
| WO2006051880A1 (ja) * | 2004-11-11 | 2006-05-18 | Jsr Corporation | シート状プローブおよびプローブカードならびにウエハの検査方法 |
| TW200619635A (en) * | 2004-11-11 | 2006-06-16 | Jsr Corp | Sheet-like probe, its manufacturing method, and its application |
| FI20041525A7 (fi) * | 2004-11-26 | 2006-03-17 | Imbera Electronics Oy | Elektroniikkamoduuli ja menetelmä sen valmistamiseksi |
| JP2006194620A (ja) * | 2005-01-11 | 2006-07-27 | Tokyo Electron Ltd | プローブカード及び検査用接触構造体 |
| KR20080015828A (ko) * | 2005-05-19 | 2008-02-20 | 제이에스알 가부시끼가이샤 | 웨이퍼 검사용 시트형 프로브 및 그 응용 |
| US7052290B1 (en) * | 2005-08-10 | 2006-05-30 | Sony Ericsson Mobile Communications Ab | Low profile connector for electronic interface modules |
| JPWO2007043350A1 (ja) * | 2005-10-11 | 2009-04-16 | Jsr株式会社 | 異方導電性コネクター装置および回路装置の検査装置 |
| JP4383487B2 (ja) * | 2007-03-19 | 2009-12-16 | 古河電気工業株式会社 | 金属張積層体及び金属張積層体の製造方法 |
| WO2008156162A1 (ja) * | 2007-06-20 | 2008-12-24 | Jsr Corporation | ウエハ検査用プローブ部材およびプローブカード |
| US8097946B2 (en) * | 2007-10-31 | 2012-01-17 | Sanyo Electric Co., Ltd. | Device mounting board, semiconductor module, and mobile device |
| JP5253972B2 (ja) * | 2008-04-28 | 2013-07-31 | 富士フイルム株式会社 | 構造体およびその製造方法 |
| KR101003027B1 (ko) | 2008-10-21 | 2010-12-22 | 가부시키가이샤 아사히 덴카 겐큐쇼 | 암 커넥터, 그에 끼워 맞춰지는 수 커넥터, 이들이 끼워 맞춰져 이루어진 전기 접속구조, 이들을 이용한 전기·전자 부품 및, 반도체 패키지 소켓 또는 반도체 검사용 소켓 |
| JP2010153263A (ja) * | 2008-12-25 | 2010-07-08 | Sumitomo Electric Ind Ltd | 異方性導電シート、その製造方法、基板体、検査装置、部品モジュール、および電子製品 |
| US8439690B2 (en) * | 2009-01-15 | 2013-05-14 | Polymatech Co., Ltd. | Connector |
| JP5435484B2 (ja) * | 2010-03-24 | 2014-03-05 | 富士フイルム株式会社 | 金属充填微細構造体の製造方法 |
| KR101688006B1 (ko) * | 2010-11-26 | 2016-12-20 | 삼성전자주식회사 | 반도체 장치 |
| CN104022378B (zh) * | 2014-04-24 | 2016-04-27 | 东莞市宙辉电子科技有限公司 | 一种灯具连接装置的改良结构 |
| KR102361639B1 (ko) | 2017-07-10 | 2022-02-10 | 삼성전자주식회사 | 유니버설 테스트 소켓, 반도체 테스트 장비, 및 반도체 장치의 테스트 방법 |
| IT201700100522A1 (it) * | 2017-09-07 | 2019-03-07 | Technoprobe Spa | Elemento di interfaccia per un’apparecchiatura di test di dispositivi elettronici e relativo metodo di fabbricazione |
| JP2020027725A (ja) * | 2018-08-10 | 2020-02-20 | 信越ポリマー株式会社 | 電気コネクター及びその製造方法 |
| CN113168935B (zh) * | 2018-11-21 | 2023-06-30 | 三井化学株式会社 | 各向异性导电片、各向异性导电复合片、各向异性导电片组、电气检查装置及电气检查方法 |
| KR102280651B1 (ko) * | 2018-12-26 | 2021-07-23 | 주식회사 아이에스시 | 전기접속용 커넥터 및 그 제조 방법 |
| US11450626B2 (en) * | 2020-08-25 | 2022-09-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor package |
| US11714105B2 (en) * | 2021-03-30 | 2023-08-01 | Enplas Corporation | Socket and inspection socket |
| JP2023167905A (ja) * | 2022-05-13 | 2023-11-24 | 信越ポリマー株式会社 | 電気コネクター |
| TW202413665A (zh) * | 2022-06-02 | 2024-04-01 | 約翰奧瑟尼爾 麥克唐納 | 於維持多層半導體封裝高頻性能之同時減少銅熱膨脹之方法及裝置 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5207585A (en) | 1990-10-31 | 1993-05-04 | International Business Machines Corporation | Thin interface pellicle for dense arrays of electrical interconnects |
| KR0140034B1 (ko) * | 1993-12-16 | 1998-07-15 | 모리시다 요이치 | 반도체 웨이퍼 수납기, 반도체 웨이퍼의 검사용 집적회로 단자와 프로브 단자와의 접속방법 및 그 장치, 반도체 집적회로의 검사방법, 프로브카드 및 그 제조방법 |
| US6064217A (en) * | 1993-12-23 | 2000-05-16 | Epi Technologies, Inc. | Fine pitch contact device employing a compliant conductive polymer bump |
| JPH07288271A (ja) | 1994-04-19 | 1995-10-31 | Aging Tesuta Kaihatsu Kyodo Kumiai | 集積回路用測定電極 |
| US5531021A (en) * | 1994-12-30 | 1996-07-02 | Intel Corporation | Method of making solder shape array package |
| JP2984205B2 (ja) * | 1996-01-10 | 1999-11-29 | 日東電工株式会社 | 異方導電フィルム |
| JPH1123615A (ja) * | 1997-05-09 | 1999-01-29 | Hitachi Ltd | 接続装置および検査システム |
| EP1105942B1 (de) * | 1998-08-17 | 2002-06-05 | Infineon Technologies AG | Kontaktiervorrichtung, insbesondere zum ankontaktieren von elektrischen bauelementen und schaltungsträgern, sowie verfahren zu deren herstellung |
| IL128997A (en) * | 1999-03-15 | 2002-12-01 | Aprion Digital Ltd | Install electrical connection |
| EP1061608A3 (en) * | 1999-05-10 | 2002-10-02 | Hirose Electric Co., Ltd. | Board to board electrical connectors |
| JP4288814B2 (ja) | 2000-01-28 | 2009-07-01 | 凸版印刷株式会社 | 半導体検査治具及びその製造方法 |
| US6970005B2 (en) * | 2000-08-24 | 2005-11-29 | Texas Instruments Incorporated | Multiple-chip probe and universal tester contact assemblage |
| US6969622B1 (en) * | 2001-02-09 | 2005-11-29 | Jsr Corporation | Anisotropically conductive connector, its manufacture method and probe member |
| JP3788258B2 (ja) * | 2001-03-27 | 2006-06-21 | Ｊｓｒ株式会社 | 異方導電性コネクターおよびその応用製品 |
| US6551112B1 (en) * | 2002-03-18 | 2003-04-22 | High Connection Density, Inc. | Test and burn-in connector |
| JP2004031203A (ja) * | 2002-06-27 | 2004-01-29 | Shin Etsu Polymer Co Ltd | 導電接点素子及び電気コネクタ |
| JP2004259530A (ja) * | 2003-02-25 | 2004-09-16 | Shinko Electric Ind Co Ltd | 外部接触端子を有する半導体装置及びその使用方法 |
-
2003
- 2003-10-17 JP JP2003358106A patent/JP3649239B2/ja not_active Expired - Fee Related
- 2003-10-17 JP JP2003358105A patent/JP2004172588A/ja not_active Withdrawn
- 2003-10-23 TW TW092129467A patent/TWI250600B/zh not_active IP Right Cessation
- 2003-10-24 EP EP03758872A patent/EP1503216B1/en not_active Expired - Lifetime
- 2003-10-24 US US10/515,062 patent/US7318729B2/en not_active Expired - Lifetime
- 2003-10-24 CN CNA2003801005604A patent/CN1692283A/zh active Pending
- 2003-10-24 WO PCT/JP2003/013618 patent/WO2004038433A1/ja not_active Ceased
- 2003-10-24 AU AU2003275649A patent/AU2003275649A1/en not_active Abandoned
- 2003-10-24 AT AT03758872T patent/ATE464569T1/de not_active IP Right Cessation
- 2003-10-24 DE DE60332106T patent/DE60332106D1/de not_active Expired - Lifetime
- 2003-10-24 KR KR1020047018241A patent/KR100595787B1/ko not_active Expired - Fee Related
-
2004
- 2004-12-15 JP JP2004362950A patent/JP3800235B2/ja not_active Expired - Fee Related