JP2004140370A - 半導体光電素子 - Google Patents

半導体光電素子 Download PDF

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Publication number
JP2004140370A
JP2004140370A JP2003356114A JP2003356114A JP2004140370A JP 2004140370 A JP2004140370 A JP 2004140370A JP 2003356114 A JP2003356114 A JP 2003356114A JP 2003356114 A JP2003356114 A JP 2003356114A JP 2004140370 A JP2004140370 A JP 2004140370A
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JP
Japan
Prior art keywords
layer
active layer
waveguide
photoelectric device
gan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2003356114A
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English (en)
Japanese (ja)
Other versions
JP2004140370A5 (enExample
Inventor
Seidan Ri
李　成　男
Kyoung-Ho Ha
河　鏡　虎
Tan Sakong
司　空　坦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020030033842A external-priority patent/KR100755621B1/ko
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2004140370A publication Critical patent/JP2004140370A/ja
Publication of JP2004140370A5 publication Critical patent/JP2004140370A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/822—Materials of the light-emitting regions
    • H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/2004—Confining in the direction perpendicular to the layer structure
    • H01S5/2009—Confining in the direction perpendicular to the layer structure by using electron barrier layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
    • H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
    • H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
    • H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/81—Bodies
    • H10H20/811—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812—Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geometry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Integrated Circuits (AREA)
JP2003356114A 2002-10-17 2003-10-16 半導体光電素子 Pending JP2004140370A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20020063539 2002-10-17
KR1020030033842A KR100755621B1 (ko) 2002-10-17 2003-05-27 반도체 광전 소자

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010254965A Division JP2011035427A (ja) 2002-10-17 2010-11-15 半導体光電素子

Publications (2)

Publication Number Publication Date
JP2004140370A true JP2004140370A (ja) 2004-05-13
JP2004140370A5 JP2004140370A5 (enExample) 2006-11-09

Family

ID=36096134

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2003356114A Pending JP2004140370A (ja) 2002-10-17 2003-10-16 半導体光電素子
JP2010254965A Pending JP2011035427A (ja) 2002-10-17 2010-11-15 半導体光電素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2010254965A Pending JP2011035427A (ja) 2002-10-17 2010-11-15 半導体光電素子

Country Status (4)

Country Link
US (1) US7058105B2 (enExample)
EP (1) EP1411559B1 (enExample)
JP (2) JP2004140370A (enExample)
CN (1) CN1243400C (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103721A (ja) * 2006-10-18 2008-05-01 Samsung Electronics Co Ltd 半導体光電素子
JP2011187993A (ja) * 2011-06-15 2011-09-22 Sumitomo Electric Ind Ltd 半導体発光素子および半導体発光素子の製造方法
JP2016531442A (ja) * 2013-08-22 2016-10-06 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ 活性領域がＩｎＮの層を含む発光ダイオード
KR101782954B1 (ko) * 2009-07-24 2017-09-28 오스람 옵토 세미컨덕터스 게엠베하 양자우물구조를 포함한 광전 반도체 몸체
WO2019130655A1 (ja) * 2017-12-26 2019-07-04 パナソニック株式会社 窒化物半導体レーザ素子

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KR100525545B1 (ko) * 2003-06-25 2005-10-31 엘지이노텍 주식회사 질화물 반도체 발광소자 및 그 제조방법
EP1619729B1 (en) * 2004-04-16 2010-02-10 Nitride Semiconductors Co., Ltd. Gallium nitride based light-emitting device
US7582910B2 (en) * 2005-02-28 2009-09-01 The Regents Of The University Of California High efficiency light emitting diode (LED) with optimized photonic crystal extractor
PL211286B1 (pl) * 2004-08-15 2012-04-30 Inst Wysokich Ciśnień Polskiej Akademii Nauk Azotkowa dioda laserowa i sposób wytwarzania azotkowej diody laserowej
JP2006270028A (ja) * 2005-02-25 2006-10-05 Mitsubishi Electric Corp 半導体発光素子
KR100862497B1 (ko) * 2006-12-26 2008-10-08 삼성전기주식회사 질화물 반도체 소자
US8144743B2 (en) * 2008-03-05 2012-03-27 Rohm Co., Ltd. Nitride based semiconductor device and fabrication method for the same
JP4572963B2 (ja) * 2008-07-09 2010-11-04 住友電気工業株式会社 Ｉｉｉ族窒化物系半導体発光素子、及びエピタキシャルウエハ
TWI566431B (zh) * 2008-07-24 2017-01-11 榮創能源科技股份有限公司 組合式電子阻擋層發光元件
US7983317B2 (en) 2008-12-16 2011-07-19 Corning Incorporated MQW laser structure comprising plural MQW regions
JP2010177651A (ja) * 2009-02-02 2010-08-12 Rohm Co Ltd 半導体レーザ素子
TWI487141B (zh) * 2009-07-15 2015-06-01 榮創能源科技股份有限公司 提高光萃取效率之半導體光電結構及其製造方法
US7965752B1 (en) * 2009-11-30 2011-06-21 Corning Incorporated Native green laser semiconductor devices
US20110188528A1 (en) * 2010-02-04 2011-08-04 Ostendo Technologies, Inc. High Injection Efficiency Polar and Non-Polar III-Nitrides Light Emitters
DE102010009457A1 (de) * 2010-02-26 2011-09-01 Osram Opto Semiconductors Gmbh Optoelektronischer Halbleiterchip
CN102201505A (zh) * 2011-05-03 2011-09-28 映瑞光电科技(上海)有限公司 一种氮化物led结构及其制备方法
CN102412351B (zh) * 2011-10-27 2016-06-22 华灿光电股份有限公司 提高ESD的复合n-GaN层结构的制备方法
JP5723320B2 (ja) * 2012-04-26 2015-05-27 日本電信電話株式会社 光変調導波路
TWI593135B (zh) 2013-03-15 2017-07-21 索泰克公司 具有含氮化銦鎵之主動區域之半導體結構，形成此等半導體結構之方法，以及應用此等半導體結構形成之發光元件
JP2016517627A (ja) * 2013-03-15 2016-06-16 ソイテックＳｏｉｔｅｃ ＩｎＧａＮを含んでいる活性領域を有している半導体構造、このような半導体構造を形成する方法、及びこのような半導体構造から形成された発光デバイス
TWI648872B (zh) 2013-03-15 2019-01-21 法商梭意泰科公司 具有包含ＩｎＧａＮ之作用區域之半導體結構、形成此等半導體結構之方法及由此等半導體結構所形成之發光裝置
FR3004585B1 (fr) * 2013-04-12 2017-12-29 Soitec Silicon On Insulator Structures semi-conductrices dotees de regions actives comprenant de l'ingan
FR3003397B1 (fr) 2013-03-15 2016-07-22 Soitec Silicon On Insulator Structures semi-conductrices dotées de régions actives comprenant de l'INGAN
FR3004005B1 (fr) * 2013-03-28 2016-11-25 Commissariat Energie Atomique Diode electroluminescente a multiples puits quantiques et jonction p-n asymetrique
KR20160033815A (ko) 2014-09-18 2016-03-29 삼성전자주식회사 반도체 발광소자
CN104734015B (zh) * 2015-02-02 2018-03-23 中国科学院半导体研究所 具有非对称Al组分AlGaN限制层的氮化镓基激光器
KR102390624B1 (ko) 2015-06-05 2022-04-26 오스텐도 테크놀로지스 인코포레이티드 다수의 활성층들로 선택적으로 캐리어를 주입한 발광 구조체
US10396240B2 (en) 2015-10-08 2019-08-27 Ostendo Technologies, Inc. III-nitride semiconductor light emitting device having amber-to-red light emission (>600 nm) and a method for making same
DE102016122147B4 (de) 2016-11-17 2022-06-23 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Halbleiterlaser
CN107331738B (zh) * 2017-05-12 2019-12-06 华灿光电股份有限公司 一种发光二极管外延片的制造方法
CN110323670A (zh) * 2019-06-25 2019-10-11 中国科学院苏州纳米技术与纳米仿生研究所 半导体激光器及其激光谐振腔、光学限制结构
CN112234436B (zh) * 2020-12-14 2021-03-09 陕西源杰半导体技术有限公司 半导体器件及其制备方法
US12444907B2 (en) * 2022-04-18 2025-10-14 Epistar Corporation Light-emitting device
CN116667147A (zh) * 2023-05-26 2023-08-29 安徽格恩半导体有限公司 一种内置拓扑平带层的半导体激光元件

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JPH11340580A (ja) * 1997-07-30 1999-12-10 Fujitsu Ltd 半導体レーザ、半導体発光素子、及び、その製造方法
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008103721A (ja) * 2006-10-18 2008-05-01 Samsung Electronics Co Ltd 半導体光電素子
KR101782954B1 (ko) * 2009-07-24 2017-09-28 오스람 옵토 세미컨덕터스 게엠베하 양자우물구조를 포함한 광전 반도체 몸체
JP2011187993A (ja) * 2011-06-15 2011-09-22 Sumitomo Electric Ind Ltd 半導体発光素子および半導体発光素子の製造方法
JP2016531442A (ja) * 2013-08-22 2016-10-06 コミッサリア ア レネルジー アトミーク エ オ ゼネルジ ザルタナテイヴ 活性領域がＩｎＮの層を含む発光ダイオード
US10153393B2 (en) 2013-08-22 2018-12-11 Commissariat à l'énergie atomique et aux énergies alternatives Light emitting diode of which an active area comprises layers of inn
WO2019130655A1 (ja) * 2017-12-26 2019-07-04 パナソニック株式会社 窒化物半導体レーザ素子
JPWO2019130655A1 (ja) * 2017-12-26 2020-12-10 パナソニック株式会社 窒化物半導体レーザ素子

Also Published As

Publication number Publication date
US7058105B2 (en) 2006-06-06
JP2011035427A (ja) 2011-02-17
EP1411559A2 (en) 2004-04-21
CN1490910A (zh) 2004-04-21
US20040125839A1 (en) 2004-07-01
EP1411559A3 (en) 2006-06-07
EP1411559B1 (en) 2012-01-04
CN1243400C (zh) 2006-02-22

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