JP2004088120A - 短パルスレーザー安定制御方法 - Google Patents
短パルスレーザー安定制御方法 Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2383—Parallel arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/64—Devices characterised by the determination of the time taken to traverse a fixed distance
- G01P3/80—Devices characterised by the determination of the time taken to traverse a fixed distance using auto-correlation or cross-correlation detection means
- G01P3/806—Devices characterised by the determination of the time taken to traverse a fixed distance using auto-correlation or cross-correlation detection means in devices of the type to be classified in G01P3/68
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R13/00—Arrangements for displaying electric variables or waveforms
- G01R13/20—Cathode-ray oscilloscopes
- G01R13/22—Circuits therefor
- G01R13/34—Circuits for representing a single waveform by sampling, e.g. for very high frequencies
- G01R13/347—Circuits for representing a single waveform by sampling, e.g. for very high frequencies using electro-optic elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
- G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
- G01S17/18—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves wherein range gates are used
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/50—Systems of measurement based on relative movement of target
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/484—Transmitters
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/483—Details of pulse systems
- G01S7/486—Receivers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/497—Means for monitoring or calibrating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
- H01S3/1398—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length by using a supplementary modulation of the output
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Optics & Photonics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Radar, Positioning & Navigation (AREA)
- Plasma & Fusion (AREA)
- Lasers (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Treatment Of Fiber Materials (AREA)
- Measurement Of Unknown Time Intervals (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】二つのレーザーを独立に制御できるようにしながら、同一の容器内で同一の要素を使用して、同じポンプレーザーでポンピングされるように、両方のレーザーを構成する。とりわけファイバーレーザーの場合には、同じ軸(スプール)に二つのファイバーを一緒に巻き付ける。
【選択図】図1
Description
半導体集積回路や半導体素子等の半導体デバイスの内部の電界分布を非破壊・非接触で測定する方法として、レーザを用いたテラヘルツ(THz)電磁波イメージング法が知られている(例えば、非特許文献1参照)。これは半導体デバイスの回路に電圧を印加した後、回路表面にレーザ光を照射することで、THz電磁波を発生させ、その発生した電磁波の振幅強度からレーザ光照射位置の電界強度を測定するものである。しかし、この従来の方法は、発生した電磁波の振幅強度のみを使用するため電界の方向の区別がつかず、得られる情報が少なく、半導体デバイスの検査や故障診断には不十分であった。また、測定の空間分解能が照射するレーザ光の回折限界で規定され、微細な半導体集積回路の電界分布を測定するには分解能的に問題があった。さらに、従来の方法は、回路全体の電界分布が測定できるだけで、例えば、信号経路のみといった特定領域の電界分布を測定することができなかった。
J.M.Evans, D.E.Spence, D.Burns, and W.Sibbet; "Dual-wavelength selfmode-locked Ti:sapphire lasers." Opt.Lett., 13, pp.1074-7, Jul.1, 1993 M.R.X.de Barros and P.C.Becker; "Two-color synchronously mode-locked femtosecond Ti:sapphire laser." Opt.Lett., 18, pp.631-3, Apr.15, 1993 D.R.Dykaar and S.B.Darak; "Stickly pulses:two-color cross-mode-locked femtosecond operation of a single Ti:sapphire laser." Opt.Lett., 18, pp.634-7, Apr.15, 1993 Z.Zhang and T.Yagi, "Dual-wavelength synchronous operation of a mode-locked Ti:sapphire laser based on self-spectrum splitting." Opt.Lett., 18, pp.2126-8, Dec.15, 1993 S.P.Dijaili, J.S.Smith, and A.Dienes, "Timing synchronization of a pasively mode-locked dye laser using a pulsed optical phase locked loop" Appl.Phisics.Lett., 55, pp.418-420, Jul.1989
135:信号発生器
210:マスターレーザー
220:スレーブレーザー
206:スプリッター(SPL)
215:ファラデー回転子ミラー(FRM)
225:光学アセンプリ(PZT−FRM)
250:レーザーダイオード(LD)
280:ファイバースプール
Claims (6)
- ファイバースプールに巻き付けられている光ファイバーからなる短パルスレーザーを外部環境から隔離する隔離ステップを有することを特徴とする短パルスレーザー安定制御方法。
- 前記ファイバースプールは、遮音されていることを特徴とする請求項1記載の短パルスレーザー安定制御方法。
- 前記ファイバースプールの熱膨張係数と前記光ファイバーの熱膨張係数とは、互いに一致していることを特徴とする請求項1記載の短パルスレーザー安定制御方法。
- 前記短パルスレーザーは、第1短パルスレーザーとしての高速短パルスレーザーであり、第2短パルスレーザーの安定性は、該第1短パルスレーザーの安定制御と共に制御され、該第1短パルスレーザーおよび該第2短パルスレーザーは、いずれもファイバーレーザーであって、
該第1短パルスレーザーおよび該第2短パルスレーザーを同一の装置から同一の仕方で構成する構成ステップと、
該第1短パルスレーザーおよび該第2短パルスレーザーを共通のレーザーでポンピングするポンピングステップと、
該第1短パルスレーザーおよび該第2短パルスレーザーを共通のファイバースプールに巻き付ける巻き付けステップと、
該第1短パルスレーザーおよび該第2短パルスレーザーを単一の容器内に設置する設置ステップと、
を有することを特徴とする請求項1記載の短パルスレーザー安定制御方法。 - 短パルスレーザーをゼロ分散波長付近で作動させることにより、タイミングジッターを量子限界にまで低減することを特徴とする短パルスレーザー安定制御方法。
- 遮音および温度制御のうち少なくとも一方が施されている容器中に短パルスレーザーを設置する設置ステップを有することを特徴とする短パルスレーザー安定制御方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/602,457 US5778016A (en) | 1994-04-01 | 1996-02-16 | Scanning temporal ultrafast delay methods and apparatuses therefor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP03086397A Division JP3688841B2 (ja) | 1996-02-16 | 1997-02-14 | レーザパルス比較方法、高速レーザー走査方法、高速走査レーザー装置、短パルスレーザー装置、距離計測装置、電気光学サンプリング・オシロスコープ、短パルスレーザー安定制御方法および較正時間スケール発生装置 |
Publications (2)
Publication Number | Publication Date |
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JP2004088120A true JP2004088120A (ja) | 2004-03-18 |
JP4323917B2 JP4323917B2 (ja) | 2009-09-02 |
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Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
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JP03086397A Expired - Fee Related JP3688841B2 (ja) | 1996-02-16 | 1997-02-14 | レーザパルス比較方法、高速レーザー走査方法、高速走査レーザー装置、短パルスレーザー装置、距離計測装置、電気光学サンプリング・オシロスコープ、短パルスレーザー安定制御方法および較正時間スケール発生装置 |
JP2003354301A Expired - Fee Related JP4323917B2 (ja) | 1996-02-16 | 2003-10-14 | 相対的タイミングドリフトの低減方法 |
JP2005128427A Expired - Fee Related JP4242364B2 (ja) | 1996-02-16 | 2005-04-26 | 相対的タイミングドリフトの低減方法、タイミングジッター減少法及び短パルスファイバーレーザーシステム |
Family Applications Before (1)
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JP03086397A Expired - Fee Related JP3688841B2 (ja) | 1996-02-16 | 1997-02-14 | レーザパルス比較方法、高速レーザー走査方法、高速走査レーザー装置、短パルスレーザー装置、距離計測装置、電気光学サンプリング・オシロスコープ、短パルスレーザー安定制御方法および較正時間スケール発生装置 |
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JP2005128427A Expired - Fee Related JP4242364B2 (ja) | 1996-02-16 | 2005-04-26 | 相対的タイミングドリフトの低減方法、タイミングジッター減少法及び短パルスファイバーレーザーシステム |
Country Status (4)
Country | Link |
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US (5) | US5778016A (ja) |
EP (2) | EP1701145B1 (ja) |
JP (3) | JP3688841B2 (ja) |
DE (1) | DE69734946T2 (ja) |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US7580432B2 (en) | 1994-04-01 | 2009-08-25 | Imra America, Inc. | Scanning temporal ultrafast delay methods and apparatuses therefor |
US8265105B2 (en) | 1994-04-01 | 2012-09-11 | Imra America, Inc. | Scanning temporal ultrafast delay and methods and apparatuses therefor |
US8630321B2 (en) | 1994-04-01 | 2014-01-14 | Imra America, Inc. | Scanning temporal ultrafast delay and methods and apparatuses therefor |
JP2006073970A (ja) * | 2004-09-06 | 2006-03-16 | Cyber Laser Kk | Cw深紫外線光源 |
JPWO2014024699A1 (ja) * | 2012-08-07 | 2016-07-25 | 株式会社アドバンテスト | パルス光源およびパルスレーザ光の位相差を安定に制御する方法 |
Also Published As
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US8630321B2 (en) | 2014-01-14 |
EP0790492B1 (en) | 2005-12-28 |
US6396856B1 (en) | 2002-05-28 |
EP1701145A2 (en) | 2006-09-13 |
US7580432B2 (en) | 2009-08-25 |
US20090296749A1 (en) | 2009-12-03 |
EP1701145A3 (en) | 2006-12-27 |
EP0790492A2 (en) | 1997-08-20 |
EP1701145B1 (en) | 2013-06-19 |
JP4242364B2 (ja) | 2009-03-25 |
DE69734946D1 (de) | 2006-02-02 |
US8265105B2 (en) | 2012-09-11 |
US20020097761A1 (en) | 2002-07-25 |
JPH1096610A (ja) | 1998-04-14 |
DE69734946T2 (de) | 2006-07-27 |
JP2005236327A (ja) | 2005-09-02 |
US20130010818A1 (en) | 2013-01-10 |
EP0790492A3 (en) | 2000-01-12 |
US5778016A (en) | 1998-07-07 |
JP3688841B2 (ja) | 2005-08-31 |
JP4323917B2 (ja) | 2009-09-02 |
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