JP2004071654A5 - - Google Patents

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JP2004071654A5
JP2004071654A5 JP2002225237A JP2002225237A JP2004071654A5 JP 2004071654 A5 JP2004071654 A5 JP 2004071654A5 JP 2002225237 A JP2002225237 A JP 2002225237A JP 2002225237 A JP2002225237 A JP 2002225237A JP 2004071654 A5 JP2004071654 A5 JP 2004071654A5
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electrode
carbon nanotube
insulating film
carbon nanotubes
semiconductor
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JP2002225237A
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JP2004071654A (ja
JP4338948B2 (ja
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Priority to US10/628,239 priority patent/US7098151B2/en
Publication of JP2004071654A publication Critical patent/JP2004071654A/ja
Publication of JP2004071654A5 publication Critical patent/JP2004071654A5/ja
Priority to US11/413,178 priority patent/US7473651B2/en
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Publication of JP4338948B2 publication Critical patent/JP4338948B2/ja
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JP2002225237A 2002-08-01 2002-08-01 カーボンナノチューブ半導体素子の作製方法 Expired - Fee Related JP4338948B2 (ja)

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Application Number Priority Date Filing Date Title
JP2002225237A JP4338948B2 (ja) 2002-08-01 2002-08-01 カーボンナノチューブ半導体素子の作製方法
US10/628,239 US7098151B2 (en) 2002-08-01 2003-07-29 Method of manufacturing carbon nanotube semiconductor device
US11/413,178 US7473651B2 (en) 2002-08-01 2006-04-28 Method of manufacturing carbon nanotube semiconductor device

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Application Number Priority Date Filing Date Title
JP2002225237A JP4338948B2 (ja) 2002-08-01 2002-08-01 カーボンナノチューブ半導体素子の作製方法

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JP2004071654A JP2004071654A (ja) 2004-03-04
JP2004071654A5 true JP2004071654A5 (https=) 2005-10-27
JP4338948B2 JP4338948B2 (ja) 2009-10-07

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JP (1) JP4338948B2 (https=)

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