JP2003532791A5 - - Google Patents

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Publication number
JP2003532791A5
JP2003532791A5 JP2000502233A JP2000502233A JP2003532791A5 JP 2003532791 A5 JP2003532791 A5 JP 2003532791A5 JP 2000502233 A JP2000502233 A JP 2000502233A JP 2000502233 A JP2000502233 A JP 2000502233A JP 2003532791 A5 JP2003532791 A5 JP 2003532791A5
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JP
Japan
Prior art keywords
sputtering target
metal
billet
target according
forging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000502233A
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English (en)
Japanese (ja)
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JP2003532791A (ja
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Publication date
Priority claimed from US09/098,761 external-priority patent/US6569270B2/en
Application filed filed Critical
Publication of JP2003532791A publication Critical patent/JP2003532791A/ja
Publication of JP2003532791A5 publication Critical patent/JP2003532791A5/ja
Withdrawn legal-status Critical Current

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JP2000502233A 1997-07-11 1998-06-26 精微で均質な構造及び表面状態を備えた金属物体並びにその製造方法 Withdrawn JP2003532791A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US5221897P 1997-07-11 1997-07-11
US60/052,218 1997-07-11
US09/098,761 1998-06-17
US09/098,761 US6569270B2 (en) 1997-07-11 1998-06-17 Process for producing a metal article
PCT/US1998/013447 WO1999002743A1 (en) 1997-07-11 1998-06-26 Metal article with fine uniform structures and textures and process of making same

Publications (2)

Publication Number Publication Date
JP2003532791A JP2003532791A (ja) 2003-11-05
JP2003532791A5 true JP2003532791A5 (enExample) 2005-04-07

Family

ID=26730344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000502233A Withdrawn JP2003532791A (ja) 1997-07-11 1998-06-26 精微で均質な構造及び表面状態を備えた金属物体並びにその製造方法

Country Status (5)

Country Link
US (2) US6569270B2 (enExample)
EP (1) EP1027463A4 (enExample)
JP (1) JP2003532791A (enExample)
KR (1) KR100528090B1 (enExample)
WO (1) WO1999002743A1 (enExample)

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