JP2003017392A5 - - Google Patents
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- Publication number
- JP2003017392A5 JP2003017392A5 JP2001201965A JP2001201965A JP2003017392A5 JP 2003017392 A5 JP2003017392 A5 JP 2003017392A5 JP 2001201965 A JP2001201965 A JP 2001201965A JP 2001201965 A JP2001201965 A JP 2001201965A JP 2003017392 A5 JP2003017392 A5 JP 2003017392A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing apparatus
- processing
- processing liquid
- supplying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 109
- 238000012545 processing Methods 0.000 claims description 56
- 239000007788 liquid Substances 0.000 claims description 31
- 238000012546 transfer Methods 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001201965A JP3962560B2 (ja) | 2001-07-03 | 2001-07-03 | 基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001201965A JP3962560B2 (ja) | 2001-07-03 | 2001-07-03 | 基板処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003017392A JP2003017392A (ja) | 2003-01-17 |
| JP2003017392A5 true JP2003017392A5 (enExample) | 2004-10-14 |
| JP3962560B2 JP3962560B2 (ja) | 2007-08-22 |
Family
ID=19038852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001201965A Expired - Fee Related JP3962560B2 (ja) | 2001-07-03 | 2001-07-03 | 基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3962560B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4886719B2 (ja) * | 2008-03-14 | 2012-02-29 | 日立ビアメカニクス株式会社 | 加工装置 |
-
2001
- 2001-07-03 JP JP2001201965A patent/JP3962560B2/ja not_active Expired - Fee Related
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