JP2002519856A5 - - Google Patents

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Publication number
JP2002519856A5
JP2002519856A5 JP2000556884A JP2000556884A JP2002519856A5 JP 2002519856 A5 JP2002519856 A5 JP 2002519856A5 JP 2000556884 A JP2000556884 A JP 2000556884A JP 2000556884 A JP2000556884 A JP 2000556884A JP 2002519856 A5 JP2002519856 A5 JP 2002519856A5
Authority
JP
Japan
Prior art keywords
bowl
rotor
shaft
drainage opening
centrifugal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000556884A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002519856A (ja
Filing date
Publication date
Priority claimed from US09/107,878 external-priority patent/US6125863A/en
Application filed filed Critical
Publication of JP2002519856A publication Critical patent/JP2002519856A/ja
Publication of JP2002519856A5 publication Critical patent/JP2002519856A5/ja
Pending legal-status Critical Current

Links

JP2000556884A 1998-06-30 1999-06-21 オフセットロータ付き平板状媒体処理装置 Pending JP2002519856A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/107,878 US6125863A (en) 1998-06-30 1998-06-30 Offset rotor flat media processor
US09/107,878 1998-06-30
PCT/US1999/013984 WO2000000301A1 (en) 1998-06-30 1999-06-21 Offset rotor flat media processor

Publications (2)

Publication Number Publication Date
JP2002519856A JP2002519856A (ja) 2002-07-02
JP2002519856A5 true JP2002519856A5 (enExample) 2006-08-10

Family

ID=22318945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000556884A Pending JP2002519856A (ja) 1998-06-30 1999-06-21 オフセットロータ付き平板状媒体処理装置

Country Status (6)

Country Link
US (1) US6125863A (enExample)
EP (1) EP1115511B1 (enExample)
JP (1) JP2002519856A (enExample)
AT (1) ATE359132T1 (enExample)
DE (1) DE69935795T2 (enExample)
WO (1) WO2000000301A1 (enExample)

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US6895981B2 (en) * 2002-07-19 2005-05-24 Semitool, Inc. Cross flow processor
CN1565045A (zh) * 2002-07-26 2005-01-12 应用材料公司 旋转－清洗－干燥器用的亲水部件
US7289734B2 (en) * 2002-12-24 2007-10-30 Tropic Networks Inc. Method and system for multi-level power management in an optical network
US20060201541A1 (en) * 2005-03-11 2006-09-14 Semiconductor Energy Laboratory Co., Ltd. Cleaning-drying apparatus and cleaning-drying method
KR100829923B1 (ko) * 2006-08-30 2008-05-16 세메스 주식회사 스핀헤드 및 이를 이용하는 기판처리방법
US8241432B2 (en) * 2008-03-07 2012-08-14 Mei, Llc Solar wafer cleaning systems, apparatus and methods
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SG11202100082XA (en) * 2018-07-06 2021-02-25 Oem Group Llc Systems and methods for a spray measurement apparatus
CN115228828B (zh) * 2022-09-20 2023-01-24 山东鲁西药业有限公司 一种药品原料清洗装置

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