JP2002222959A5 - - Google Patents

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Publication number
JP2002222959A5
JP2002222959A5 JP2001019570A JP2001019570A JP2002222959A5 JP 2002222959 A5 JP2002222959 A5 JP 2002222959A5 JP 2001019570 A JP2001019570 A JP 2001019570A JP 2001019570 A JP2001019570 A JP 2001019570A JP 2002222959 A5 JP2002222959 A5 JP 2002222959A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001019570A
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Japanese (ja)
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JP2002222959A (ja
JP4744700B2 (ja
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Publication date
Priority claimed from JP2001019570A external-priority patent/JP4744700B2/ja
Priority to JP2001019570A priority Critical patent/JP4744700B2/ja
Application filed filed Critical
Priority to US09/791,853 priority patent/US6756614B2/en
Priority to EP01104444A priority patent/EP1227516A2/en
Priority to TW090104427A priority patent/TW480730B/zh
Priority to KR1020010010416A priority patent/KR100779319B1/ko
Publication of JP2002222959A publication Critical patent/JP2002222959A/ja
Priority to US10/670,356 priority patent/US7115454B2/en
Priority to US10/862,399 priority patent/US7172932B2/en
Priority to KR1020060019457A priority patent/KR100779318B1/ko
Priority to KR1020060019461A priority patent/KR100821813B1/ko
Priority to US11/589,800 priority patent/US7556993B2/en
Publication of JP2002222959A5 publication Critical patent/JP2002222959A5/ja
Priority to US12/498,692 priority patent/US7859016B2/en
Publication of JP4744700B2 publication Critical patent/JP4744700B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2001019570A 2001-01-29 2001-01-29 薄膜半導体装置及び薄膜半導体装置を含む画像表示装置 Expired - Fee Related JP4744700B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2001019570A JP4744700B2 (ja) 2001-01-29 2001-01-29 薄膜半導体装置及び薄膜半導体装置を含む画像表示装置
US09/791,853 US6756614B2 (en) 2001-01-29 2001-02-26 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus
EP01104444A EP1227516A2 (en) 2001-01-29 2001-02-27 Thin film semiconductor device, production process and production apparatus
TW090104427A TW480730B (en) 2001-01-29 2001-02-27 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus
KR1020010010416A KR100779319B1 (ko) 2001-01-29 2001-02-28 박막 반도체 장치 및 화상 표시 장치
US10/670,356 US7115454B2 (en) 2001-01-29 2003-09-26 Thin film semiconductor device, polycrystalline semiconductor thin film production and process and production apparatus
US10/862,399 US7172932B2 (en) 2001-01-29 2004-06-08 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus
KR1020060019461A KR100821813B1 (ko) 2001-01-29 2006-02-28 반도체 박막 장치를 이용한 화상 표시 장치의 제조 방법
KR1020060019457A KR100779318B1 (ko) 2001-01-29 2006-02-28 박막 반도체 장치를 이용한 화상 표시 장치의 제조 방법
US11/589,800 US7556993B2 (en) 2001-01-29 2006-10-31 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus
US12/498,692 US7859016B2 (en) 2001-01-29 2009-07-07 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001019570A JP4744700B2 (ja) 2001-01-29 2001-01-29 薄膜半導体装置及び薄膜半導体装置を含む画像表示装置
US09/791,853 US6756614B2 (en) 2001-01-29 2001-02-26 Thin film semiconductor device, polycrystalline semiconductor thin film production process and production apparatus

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2008065908A Division JP5091730B2 (ja) 2008-03-14 2008-03-14 薄膜半導体装置を用いた画像表示装置の製造方法
JP2008065907A Division JP4763740B2 (ja) 2008-03-14 2008-03-14 薄膜半導体装置及び薄膜半導体装置を用いた画像表示装置

Publications (3)

Publication Number Publication Date
JP2002222959A JP2002222959A (ja) 2002-08-09
JP2002222959A5 true JP2002222959A5 (https=) 2008-05-01
JP4744700B2 JP4744700B2 (ja) 2011-08-10

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001019570A Expired - Fee Related JP4744700B2 (ja) 2001-01-29 2001-01-29 薄膜半導体装置及び薄膜半導体装置を含む画像表示装置

Country Status (5)

Country Link
US (5) US6756614B2 (https=)
EP (1) EP1227516A2 (https=)
JP (1) JP4744700B2 (https=)
KR (3) KR100779319B1 (https=)
TW (1) TW480730B (https=)

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