JP2002023351A - 感光性ペーストおよびディスプレイ用部材 - Google Patents
感光性ペーストおよびディスプレイ用部材Info
- Publication number
- JP2002023351A JP2002023351A JP2000203595A JP2000203595A JP2002023351A JP 2002023351 A JP2002023351 A JP 2002023351A JP 2000203595 A JP2000203595 A JP 2000203595A JP 2000203595 A JP2000203595 A JP 2000203595A JP 2002023351 A JP2002023351 A JP 2002023351A
- Authority
- JP
- Japan
- Prior art keywords
- weight
- oxide
- parts
- photosensitive paste
- photosensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims abstract description 75
- 239000010419 fine particle Substances 0.000 claims abstract description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000011521 glass Substances 0.000 claims description 69
- -1 amine compound Chemical class 0.000 claims description 51
- 239000002245 particle Substances 0.000 claims description 47
- 239000000945 filler Substances 0.000 claims description 45
- 238000002844 melting Methods 0.000 claims description 36
- 230000008018 melting Effects 0.000 claims description 31
- 229920000642 polymer Polymers 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 25
- 239000000843 powder Substances 0.000 claims description 25
- 239000000203 mixture Substances 0.000 claims description 20
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 17
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 16
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 8
- 239000000395 magnesium oxide Substances 0.000 claims description 8
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims description 8
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 claims description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052810 boron oxide Inorganic materials 0.000 claims description 7
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 7
- 239000000292 calcium oxide Substances 0.000 claims description 7
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 7
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 5
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical compound [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 5
- 229910001947 lithium oxide Inorganic materials 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052878 cordierite Inorganic materials 0.000 claims description 4
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 claims description 4
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 claims description 3
- 229910001950 potassium oxide Inorganic materials 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 claims description 3
- 229910001948 sodium oxide Inorganic materials 0.000 claims description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 3
- 229910001887 tin oxide Inorganic materials 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 238000000059 patterning Methods 0.000 abstract description 2
- 230000002708 enhancing effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 25
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- 238000010304 firing Methods 0.000 description 16
- 239000000178 monomer Substances 0.000 description 16
- 150000001875 compounds Chemical class 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 14
- 238000000576 coating method Methods 0.000 description 14
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 11
- 238000001879 gelation Methods 0.000 description 10
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 9
- 230000009477 glass transition Effects 0.000 description 9
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 8
- 239000002253 acid Substances 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical group NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 7
- 238000011161 development Methods 0.000 description 7
- 230000018109 developmental process Effects 0.000 description 7
- 238000001035 drying Methods 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 7
- 230000007261 regionalization Effects 0.000 description 7
- 239000003513 alkali Substances 0.000 description 6
- 150000001412 amines Chemical class 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 5
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 5
- DRSHXJFUUPIBHX-UHFFFAOYSA-N COc1ccc(cc1)N1N=CC2C=NC(Nc3cc(OC)c(OC)c(OCCCN4CCN(C)CC4)c3)=NC12 Chemical compound COc1ccc(cc1)N1N=CC2C=NC(Nc3cc(OC)c(OC)c(OCCCN4CCN(C)CC4)c3)=NC12 DRSHXJFUUPIBHX-UHFFFAOYSA-N 0.000 description 5
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 5
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- 230000002776 aggregation Effects 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004299 exfoliation Methods 0.000 description 4
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 4
- 230000006872 improvement Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- 238000007259 addition reaction Methods 0.000 description 3
- 238000005054 agglomeration Methods 0.000 description 3
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 3
- 125000003277 amino group Chemical group 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 239000003999 initiator Substances 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 3
- 229920003145 methacrylic acid copolymer Polymers 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
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- 238000002310 reflectometry Methods 0.000 description 3
- 125000003396 thiol group Chemical group [H]S* 0.000 description 3
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 2
- OSDWBNJEKMUWAV-UHFFFAOYSA-N Allyl chloride Chemical compound ClCC=C OSDWBNJEKMUWAV-UHFFFAOYSA-N 0.000 description 2
- VVJKKWFAADXIJK-UHFFFAOYSA-N Allylamine Chemical compound NCC=C VVJKKWFAADXIJK-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- RVGRUAULSDPKGF-UHFFFAOYSA-N Poloxamer Chemical compound C1CO1.CC1CO1 RVGRUAULSDPKGF-UHFFFAOYSA-N 0.000 description 2
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- WDLCFSBUABGAHX-UHFFFAOYSA-N [2-hydroxy-3-[[2-hydroxy-3-(2-methylprop-2-enoyloxy)propyl]-propan-2-ylamino]propyl] 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(O)CN(C(C)C)CC(O)COC(=O)C(C)=C WDLCFSBUABGAHX-UHFFFAOYSA-N 0.000 description 2
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| JP2000203595A JP2002023351A (ja) | 2000-07-05 | 2000-07-05 | 感光性ペーストおよびディスプレイ用部材 |
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| JP2000203595A JP2002023351A (ja) | 2000-07-05 | 2000-07-05 | 感光性ペーストおよびディスプレイ用部材 |
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| JP2002023351A5 JP2002023351A5 (enExample) | 2007-08-16 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006126716A (ja) * | 2004-11-01 | 2006-05-18 | Toray Ind Inc | 感光性絶縁ペーストおよびそれを用いた電子回路部品の製造方法 |
| JP2007025012A (ja) * | 2005-07-13 | 2007-02-01 | Nippon Zeon Co Ltd | 樹脂組成物 |
| KR100913879B1 (ko) * | 2002-01-28 | 2009-08-26 | 제이에스알 가부시끼가이샤 | 감광성 유전체 형성용 조성물, 및 그것을 이용한 전사필름, 유전체 및 전자 부품 |
| JP2011002712A (ja) * | 2009-06-19 | 2011-01-06 | Sumitomo Chemical Co Ltd | 感光性樹脂組成物 |
| JP2012246175A (ja) * | 2011-05-27 | 2012-12-13 | Toray Ind Inc | ガラスペースト、プラズマディスプレイ用部材の製造方法およびプラズマディスプレイ用部材 |
| KR101316636B1 (ko) * | 2006-11-20 | 2013-10-15 | 삼성디스플레이 주식회사 | 컬러필터 기판 및 이를 구비한 전자영동 표시장치 |
| JP2017003641A (ja) * | 2015-06-05 | 2017-01-05 | 日油株式会社 | ウレタン（メタ）アクリレートおよびドライフィルムレジスト用感光性樹脂組成物 |
| WO2025005248A1 (ja) * | 2023-06-30 | 2025-01-02 | Jsr株式会社 | 感光性組成物、硬化物及びその製造方法、表示素子、並びに撮像素子 |
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| JPH11167872A (ja) * | 1997-12-03 | 1999-06-22 | Toray Ind Inc | プラズマディスプレイ用基板およびその製造方法 |
| JPH11314937A (ja) * | 1997-11-27 | 1999-11-16 | Toray Ind Inc | 無機微粉末、感光性ペーストならびにディスプレイパネルの部材およびその製造方法 |
| JPH11327125A (ja) * | 1998-05-08 | 1999-11-26 | Kansai Shingijutsu Kenkyusho:Kk | 感光性樹脂組成物およびパターン形成方法 |
| JPH11323147A (ja) * | 1998-05-18 | 1999-11-26 | Toray Ind Inc | 誘電体ペーストおよびそれを用いたディスプレイ基板の製造方法 |
| JPH11338142A (ja) * | 1998-05-25 | 1999-12-10 | Fujifilm Olin Co Ltd | 感光性樹脂組成物 |
| JPH11352699A (ja) * | 1998-06-08 | 1999-12-24 | Fujifilm Olin Co Ltd | 隔壁形成方法 |
| JP2000048645A (ja) * | 1998-07-31 | 2000-02-18 | Toray Ind Inc | 感光性導電ペーストおよびプラズマディスプレイ用電極の製造方法 |
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| JPH05173319A (ja) * | 1991-12-13 | 1993-07-13 | Ishihara Sangyo Kaisha Ltd | フォトレジスト用組成物 |
| JPH11314937A (ja) * | 1997-11-27 | 1999-11-16 | Toray Ind Inc | 無機微粉末、感光性ペーストならびにディスプレイパネルの部材およびその製造方法 |
| JPH11167872A (ja) * | 1997-12-03 | 1999-06-22 | Toray Ind Inc | プラズマディスプレイ用基板およびその製造方法 |
| JPH11327125A (ja) * | 1998-05-08 | 1999-11-26 | Kansai Shingijutsu Kenkyusho:Kk | 感光性樹脂組成物およびパターン形成方法 |
| JPH11323147A (ja) * | 1998-05-18 | 1999-11-26 | Toray Ind Inc | 誘電体ペーストおよびそれを用いたディスプレイ基板の製造方法 |
| JPH11338142A (ja) * | 1998-05-25 | 1999-12-10 | Fujifilm Olin Co Ltd | 感光性樹脂組成物 |
| JPH11352699A (ja) * | 1998-06-08 | 1999-12-24 | Fujifilm Olin Co Ltd | 隔壁形成方法 |
| JP2000048645A (ja) * | 1998-07-31 | 2000-02-18 | Toray Ind Inc | 感光性導電ペーストおよびプラズマディスプレイ用電極の製造方法 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100913879B1 (ko) * | 2002-01-28 | 2009-08-26 | 제이에스알 가부시끼가이샤 | 감광성 유전체 형성용 조성물, 및 그것을 이용한 전사필름, 유전체 및 전자 부품 |
| JP2006126716A (ja) * | 2004-11-01 | 2006-05-18 | Toray Ind Inc | 感光性絶縁ペーストおよびそれを用いた電子回路部品の製造方法 |
| JP2007025012A (ja) * | 2005-07-13 | 2007-02-01 | Nippon Zeon Co Ltd | 樹脂組成物 |
| KR101316636B1 (ko) * | 2006-11-20 | 2013-10-15 | 삼성디스플레이 주식회사 | 컬러필터 기판 및 이를 구비한 전자영동 표시장치 |
| JP2011002712A (ja) * | 2009-06-19 | 2011-01-06 | Sumitomo Chemical Co Ltd | 感光性樹脂組成物 |
| JP2012246175A (ja) * | 2011-05-27 | 2012-12-13 | Toray Ind Inc | ガラスペースト、プラズマディスプレイ用部材の製造方法およびプラズマディスプレイ用部材 |
| JP2017003641A (ja) * | 2015-06-05 | 2017-01-05 | 日油株式会社 | ウレタン（メタ）アクリレートおよびドライフィルムレジスト用感光性樹脂組成物 |
| WO2025005248A1 (ja) * | 2023-06-30 | 2025-01-02 | Jsr株式会社 | 感光性組成物、硬化物及びその製造方法、表示素子、並びに撮像素子 |
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