JP2001524751A5 - - Google Patents

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Publication number
JP2001524751A5
JP2001524751A5 JP2000522620A JP2000522620A JP2001524751A5 JP 2001524751 A5 JP2001524751 A5 JP 2001524751A5 JP 2000522620 A JP2000522620 A JP 2000522620A JP 2000522620 A JP2000522620 A JP 2000522620A JP 2001524751 A5 JP2001524751 A5 JP 2001524751A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000522620A
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Japanese (ja)
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JP2001524751A (ja
JP4362224B2 (ja
Filing date
Publication date
Priority claimed from US08/976,537 external-priority patent/US6068441A/en
Priority claimed from US09/193,991 external-priority patent/US6293749B1/en
Application filed filed Critical
Publication of JP2001524751A publication Critical patent/JP2001524751A/ja
Publication of JP2001524751A5 publication Critical patent/JP2001524751A5/ja
Application granted granted Critical
Publication of JP4362224B2 publication Critical patent/JP4362224B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000522620A 1997-11-21 1998-11-20 半導体処理装置用基板移動装置 Expired - Lifetime JP4362224B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US08/976,537 US6068441A (en) 1997-11-21 1997-11-21 Substrate transfer system for semiconductor processing equipment
US08/976,537 1997-11-21
US09/193,991 1998-11-17
US09/193,991 US6293749B1 (en) 1997-11-21 1998-11-17 Substrate transfer system for semiconductor processing equipment
PCT/US1998/024951 WO1999027577A1 (en) 1997-11-21 1998-11-20 Substrate transfer system for semiconductor processing equipment

Publications (3)

Publication Number Publication Date
JP2001524751A JP2001524751A (ja) 2001-12-04
JP2001524751A5 true JP2001524751A5 (enExample) 2006-01-19
JP4362224B2 JP4362224B2 (ja) 2009-11-11

Family

ID=26889587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000522620A Expired - Lifetime JP4362224B2 (ja) 1997-11-21 1998-11-20 半導体処理装置用基板移動装置

Country Status (5)

Country Link
US (1) US6293749B1 (enExample)
EP (1) EP1038314A4 (enExample)
JP (1) JP4362224B2 (enExample)
KR (1) KR100603970B1 (enExample)
WO (1) WO1999027577A1 (enExample)

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USD914620S1 (en) 2019-01-17 2021-03-30 Asm Ip Holding B.V. Vented susceptor
USD920936S1 (en) 2019-01-17 2021-06-01 Asm Ip Holding B.V. Higher temperature vented susceptor
CN111446185A (zh) 2019-01-17 2020-07-24 Asm Ip 控股有限公司 通风基座
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CN110931410A (zh) * 2019-12-02 2020-03-27 浙江求是半导体设备有限公司 一种用于反应室的晶片传动装置和传动方法
CN110943029A (zh) * 2019-12-30 2020-03-31 浙江求是半导体设备有限公司 一种用于半导体外延系统的双环式基座
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TWI746014B (zh) 2020-06-16 2021-11-11 大立鈺科技有限公司 晶圓存取總成及其晶圓存取裝置與晶圓載具
TWI888578B (zh) 2020-06-23 2025-07-01 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 基座及反應腔室
CN112018024B (zh) * 2020-09-11 2024-12-24 北京北方华创微电子装备有限公司 机械手
CN114378751B (zh) * 2020-10-20 2022-11-01 长鑫存储技术有限公司 晶圆用承载环的安装夹具
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