JP2001051622A5 - - Google Patents
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- Publication number
- JP2001051622A5 JP2001051622A5 JP2000166749A JP2000166749A JP2001051622A5 JP 2001051622 A5 JP2001051622 A5 JP 2001051622A5 JP 2000166749 A JP2000166749 A JP 2000166749A JP 2000166749 A JP2000166749 A JP 2000166749A JP 2001051622 A5 JP2001051622 A5 JP 2001051622A5
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- region
- gate electrodes
- concentration
- drain region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000015572 biosynthetic process Effects 0.000 claims 24
- 239000012535 impurity Substances 0.000 claims 23
- 238000005401 electroluminescence Methods 0.000 claims 9
- 239000003990 capacitor Substances 0.000 claims 7
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 239000010937 tungsten Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- -1 tungsten nitride Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000166749A JP3904807B2 (ja) | 1999-06-04 | 2000-06-02 | 表示装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-158787 | 1999-06-04 | ||
| JP15878799 | 1999-06-04 | ||
| JP2000166749A JP3904807B2 (ja) | 1999-06-04 | 2000-06-02 | 表示装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005186259A Division JP2006011454A (ja) | 1999-06-04 | 2005-06-27 | 電気光学装置及び電子装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001051622A JP2001051622A (ja) | 2001-02-23 |
| JP2001051622A5 true JP2001051622A5 (enExample) | 2005-10-20 |
| JP3904807B2 JP3904807B2 (ja) | 2007-04-11 |
Family
ID=26485794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000166749A Expired - Fee Related JP3904807B2 (ja) | 1999-06-04 | 2000-06-02 | 表示装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3904807B2 (enExample) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100481159C (zh) * | 2000-09-29 | 2009-04-22 | 三洋电机株式会社 | 半导体器件以及显示装置 |
| KR100560777B1 (ko) * | 2001-03-26 | 2006-03-13 | 삼성에스디아이 주식회사 | 유기 발광 소자 구동용 티에프티 화소부 |
| JP4896318B2 (ja) * | 2001-09-10 | 2012-03-14 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| JP4149168B2 (ja) | 2001-11-09 | 2008-09-10 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP4490403B2 (ja) * | 2002-01-18 | 2010-06-23 | 株式会社半導体エネルギー研究所 | 発光装置 |
| JP3939666B2 (ja) * | 2002-01-18 | 2007-07-04 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
| US6909240B2 (en) | 2002-01-18 | 2005-06-21 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting device |
| JP3706107B2 (ja) * | 2002-01-18 | 2005-10-12 | 株式会社半導体エネルギー研究所 | 発光装置及び電子機器 |
| JP2004126106A (ja) * | 2002-10-01 | 2004-04-22 | Sanyo Electric Co Ltd | エレクトロルミネッセンス表示装置 |
| US7385223B2 (en) | 2003-04-24 | 2008-06-10 | Samsung Sdi Co., Ltd. | Flat panel display with thin film transistor |
| US7579220B2 (en) | 2005-05-20 | 2009-08-25 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device manufacturing method |
| US7853217B2 (en) | 2005-08-18 | 2010-12-14 | Panasonic Corporation | Wireless communication terminal apparatus and CQI selecting method |
| EP1764770A3 (en) * | 2005-09-16 | 2012-03-14 | Semiconductor Energy Laboratory Co., Ltd. | Display device and driving method of display device |
| KR101277606B1 (ko) * | 2006-03-22 | 2013-06-21 | 삼성디스플레이 주식회사 | 표시 장치 및 그 제조 방법 |
| WO2008001727A1 (en) | 2006-06-26 | 2008-01-03 | Panasonic Corporation | Radio communication device and cqi generation method |
| US7863612B2 (en) | 2006-07-21 | 2011-01-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and semiconductor device |
| JP5190709B2 (ja) * | 2009-02-20 | 2013-04-24 | カシオ計算機株式会社 | 表示パネル及びその製造方法 |
| EP2284891B1 (en) * | 2009-08-07 | 2019-07-24 | Semiconductor Energy Laboratory Co, Ltd. | Semiconductor device and manufacturing method thereof |
| JP5531720B2 (ja) * | 2010-03-30 | 2014-06-25 | ソニー株式会社 | 表示装置、表示装置の製造方法、及び、電子機器 |
| CN102473737B (zh) | 2010-06-22 | 2014-07-23 | 松下电器产业株式会社 | 发光显示装置及其制造方法 |
| TWI624936B (zh) * | 2013-06-05 | 2018-05-21 | 半導體能源研究所股份有限公司 | 顯示裝置 |
| JP5770236B2 (ja) * | 2013-09-18 | 2015-08-26 | 株式会社ジャパンディスプレイ | 表示装置 |
| CN109427820B (zh) | 2017-08-31 | 2021-02-23 | 京东方科技集团股份有限公司 | 一种显示装置用基板及其制备方法、显示面板 |
| JP6715312B2 (ja) * | 2018-12-04 | 2020-07-01 | 三星ディスプレイ株式會社Samsung Display Co.,Ltd. | 表示装置 |
| WO2020217959A1 (ja) | 2019-04-23 | 2020-10-29 | 京セラ株式会社 | マイクロled素子基板および表示装置 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5151632A (en) * | 1991-03-22 | 1992-09-29 | General Motors Corporation | Flat panel emissive display with redundant circuit |
| JPH0595115A (ja) * | 1991-10-01 | 1993-04-16 | Nippon Telegr & Teleph Corp <Ntt> | Mosトランジスタの製造方法 |
| JPH0945930A (ja) * | 1995-07-28 | 1997-02-14 | Sony Corp | 薄膜トランジスタ及びその製造方法 |
| JP3188167B2 (ja) * | 1995-12-15 | 2001-07-16 | 三洋電機株式会社 | 薄膜トランジスタ |
| JP3593212B2 (ja) * | 1996-04-27 | 2004-11-24 | 株式会社半導体エネルギー研究所 | 表示装置 |
| WO1998013811A1 (fr) * | 1996-09-26 | 1998-04-02 | Seiko Epson Corporation | Dispositif d'affichage |
| US6462722B1 (en) * | 1997-02-17 | 2002-10-08 | Seiko Epson Corporation | Current-driven light-emitting display apparatus and method of producing the same |
| JP4397439B2 (ja) * | 1997-09-30 | 2010-01-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
| JP4397438B2 (ja) * | 1997-09-29 | 2010-01-13 | 株式会社半導体エネルギー研究所 | 半導体装置 |
-
2000
- 2000-06-02 JP JP2000166749A patent/JP3904807B2/ja not_active Expired - Fee Related
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