JP2000343476A - 搬送用部材 - Google Patents

搬送用部材

Info

Publication number
JP2000343476A
JP2000343476A JP16262399A JP16262399A JP2000343476A JP 2000343476 A JP2000343476 A JP 2000343476A JP 16262399 A JP16262399 A JP 16262399A JP 16262399 A JP16262399 A JP 16262399A JP 2000343476 A JP2000343476 A JP 2000343476A
Authority
JP
Japan
Prior art keywords
prepreg
layer
carbon fiber
cfrp
volume
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16262399A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000343476A5 (enExample
Inventor
Kenichi Aoyanagi
健一 青柳
Takashi Kobayashi
孝至 小林
Daisuke Uchida
大介 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eneos Corp
Original Assignee
Nippon Mitsubishi Oil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mitsubishi Oil Corp filed Critical Nippon Mitsubishi Oil Corp
Priority to JP16262399A priority Critical patent/JP2000343476A/ja
Priority to KR1020000031629A priority patent/KR100760168B1/ko
Publication of JP2000343476A publication Critical patent/JP2000343476A/ja
Priority to US09/955,178 priority patent/US6893712B2/en
Publication of JP2000343476A5 publication Critical patent/JP2000343476A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B5/00—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts
    • B32B5/02—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer
    • B32B5/12—Layered products characterised by the non- homogeneity or physical structure, i.e. comprising a fibrous, filamentary, particulate or foam layer; Layered products characterised by having a layer differing constitutionally or physically in different parts characterised by structural features of a fibrous or filamentary layer characterised by the relative arrangement of fibres or filaments of different layers, e.g. the fibres or filaments being parallel or perpendicular to each other
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24149—Honeycomb-like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249924—Noninterengaged fiber-containing paper-free web or sheet which is not of specified porosity
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249924—Noninterengaged fiber-containing paper-free web or sheet which is not of specified porosity
    • Y10T428/24994—Fiber embedded in or on the surface of a polymeric matrix
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249962—Void-containing component has a continuous matrix of fibers only [e.g., porous paper, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y10T428/24998—Composite has more than two layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]

Landscapes

  • Laminated Bodies (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP16262399A 1999-06-09 1999-06-09 搬送用部材 Pending JP2000343476A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16262399A JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材
KR1020000031629A KR100760168B1 (ko) 1999-06-09 2000-06-09 반송용 부재
US09/955,178 US6893712B2 (en) 1999-06-09 2001-09-19 Transport member

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16262399A JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材
US09/955,178 US6893712B2 (en) 1999-06-09 2001-09-19 Transport member

Publications (2)

Publication Number Publication Date
JP2000343476A true JP2000343476A (ja) 2000-12-12
JP2000343476A5 JP2000343476A5 (enExample) 2004-12-02

Family

ID=29585894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16262399A Pending JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材

Country Status (2)

Country Link
US (1) US6893712B2 (enExample)
JP (1) JP2000343476A (enExample)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003049157A1 (en) * 2001-12-03 2003-06-12 E. I. Du Pont De Nemours And Company Transfer member with electric conductivity and its manufacturing method
KR100511546B1 (ko) * 2001-07-05 2005-08-31 (주)애드컴텍 복합재료 로보트 암
WO2005102618A1 (ja) * 2004-04-20 2005-11-03 Nippon Oil Corporation ロボットハンド部材、その製造方法及びロボットハンド
WO2005117100A1 (ja) * 2004-05-26 2005-12-08 Nippon Oil Corporation 基板カセット用サポートバー及び基板カセット
JP2006173363A (ja) * 2004-12-16 2006-06-29 Dainippon Printing Co Ltd 搬送体
KR100674881B1 (ko) * 2005-07-22 2007-01-29 주식회사 디엠에스 기판 이송용 핸드
JP2007042962A (ja) * 2005-08-05 2007-02-15 Tocalo Co Ltd 基板処理装置用回転部材
CN100402246C (zh) * 2001-03-29 2008-07-16 日石三菱株式会社 机器人手部件及其制造方法
EP1610360A4 (en) * 2003-03-31 2010-07-14 Nippon Oil Corp DUMMY WAFER
JP2010524241A (ja) * 2007-04-05 2010-07-15 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 基板を搬送するためのエンドエフェクタおよびロボット
WO2011065435A1 (ja) * 2009-11-30 2011-06-03 Ｊｘ日鉱日石エネルギー株式会社 ロボットハンド及びその製造方法
KR20170053107A (ko) * 2016-09-12 2017-05-15 세메스 주식회사 핸드 제조 방법 및 기판 처리 방법

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007281251A (ja) * 2006-04-07 2007-10-25 E I Du Pont De Nemours & Co サポートバーおよび基板カセット
JP4278677B2 (ja) * 2006-11-30 2009-06-17 株式会社ジャムコ サンドイッチパネル
DE102008023071A1 (de) * 2008-05-09 2009-11-12 Multivac Sepp Haggenmüller Gmbh & Co. Kg Roboterstrukturelement, insbesondere für einer Verpackungsmaschine zugeordnete Roboter
JP2009285823A (ja) * 2008-05-28 2009-12-10 Meian Kokusai Gigyo Kofun Yugenkoshi ロボットアーム、並びに、その保持手段の構成材及び該構成材の製造方法
US8827339B2 (en) * 2010-03-04 2014-09-09 Jx Nippon Oil & Energy Corporation Robot hand
EP2674265A4 (en) * 2011-02-07 2014-08-06 Jx Nippon Oil & Energy Corp SHAPED TUBE BODY
EP2610165B1 (en) * 2011-12-28 2017-02-08 AIRBUS HELICOPTERS DEUTSCHLAND GmbH Composite gusset filler and method of manufacture of said composite gusset filler
KR102177156B1 (ko) * 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
JP6397205B2 (ja) * 2014-04-01 2018-09-26 Ｊｘｔｇエネルギー株式会社 プリプレグ、炭素繊維強化複合材料、ロボットハンド部材及びその原料樹脂組成物
US20150290815A1 (en) * 2014-04-11 2015-10-15 Varian Semiconductor Equipment Associates, Inc. Planar end effector and method of making a planar end effector
JP6344982B2 (ja) * 2014-06-04 2018-06-20 三菱重工業株式会社 複合材構造
KR102471763B1 (ko) * 2015-03-10 2022-11-25 화이바 레인포스드 써모플라스틱스 비.브이. 섬유-강화 복합체
KR102883702B1 (ko) * 2021-04-28 2025-11-10 삼성전자주식회사 이송 유닛을 갖는 반도체 제조 장치 및 반도체 소자 형성 방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0167533B1 (en) * 1984-01-09 1990-02-07 The Boeing Company Composite material structure with integral fire protection
US4680216A (en) * 1984-09-04 1987-07-14 United Technologies Corporation Method for stabilizing thick honeycomb core composite articles
US5085928A (en) * 1989-04-06 1992-02-04 E. I. Dupont De Nemours And Company Fiber reinforced composites comprising uni-directional fiber layers and aramid spunlaced fabric layers
US5106668A (en) * 1989-06-07 1992-04-21 Hexcel Corporation Multi-layer honeycomb structure
JP2980325B2 (ja) * 1989-07-31 1999-11-22 株式会社東芝 ハニカム構造体
JPH04215599A (ja) * 1990-12-10 1992-08-06 Mitsubishi Electric Corp 超軽量サンドイッチパネル
US5204033A (en) * 1991-10-21 1993-04-20 Brunswick Corporation Method of fabricating a preform in a resin transfer molding process
JPH06190847A (ja) * 1992-12-25 1994-07-12 Nippon Oil Co Ltd 炭素繊維強化プラスチック成形体の製造方法
JP3393955B2 (ja) 1995-04-18 2003-04-07 株式会社ダイヘン 薄板状ワーク搬送用ハンド
US5653331A (en) * 1996-03-05 1997-08-05 Voith Sulzer Papiermaschinen Gmbh Paper roll guide
JP3529009B2 (ja) * 1996-10-14 2004-05-24 新日本石油株式会社 炭素繊維強化複合材
JPH11354608A (ja) * 1998-06-10 1999-12-24 Mitsubishi Chemical Corp 搬送装置用ハンド
JP2001044259A (ja) 1999-07-30 2001-02-16 Fujikura Rubber Ltd 半導体搬送腕
US6815037B2 (en) * 2001-09-19 2004-11-09 Nippon Mitsubishi Oil Corporation Carrier member made of a UV resistant fiber-reinforced composite material and process for producing thereof

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7833455B2 (en) 2001-03-29 2010-11-16 Nippon Oil Corporation Robot hand member and method of producing the same
CN100402246C (zh) * 2001-03-29 2008-07-16 日石三菱株式会社 机器人手部件及其制造方法
KR100511546B1 (ko) * 2001-07-05 2005-08-31 (주)애드컴텍 복합재료 로보트 암
CN1332419C (zh) * 2001-12-03 2007-08-15 纳幕尔杜邦公司 具有电导的转移部件及其制造方法
WO2003049157A1 (en) * 2001-12-03 2003-06-12 E. I. Du Pont De Nemours And Company Transfer member with electric conductivity and its manufacturing method
EP1610360A4 (en) * 2003-03-31 2010-07-14 Nippon Oil Corp DUMMY WAFER
JPWO2005102618A1 (ja) * 2004-04-20 2008-03-13 新日本石油株式会社 産業ロボット用ハンド及びその製造方法
WO2005102618A1 (ja) * 2004-04-20 2005-11-03 Nippon Oil Corporation ロボットハンド部材、その製造方法及びロボットハンド
JP4980712B2 (ja) * 2004-04-20 2012-07-18 Ｊｘ日鉱日石エネルギー株式会社 ロボットハンド部材、その製造方法及びロボットハンド
WO2005117100A1 (ja) * 2004-05-26 2005-12-08 Nippon Oil Corporation 基板カセット用サポートバー及び基板カセット
JP2006173363A (ja) * 2004-12-16 2006-06-29 Dainippon Printing Co Ltd 搬送体
KR100674881B1 (ko) * 2005-07-22 2007-01-29 주식회사 디엠에스 기판 이송용 핸드
JP2007042962A (ja) * 2005-08-05 2007-02-15 Tocalo Co Ltd 基板処理装置用回転部材
JP2010524241A (ja) * 2007-04-05 2010-07-15 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー 基板を搬送するためのエンドエフェクタおよびロボット
WO2011065435A1 (ja) * 2009-11-30 2011-06-03 Ｊｘ日鉱日石エネルギー株式会社 ロボットハンド及びその製造方法
KR20170053107A (ko) * 2016-09-12 2017-05-15 세메스 주식회사 핸드 제조 방법 및 기판 처리 방법
KR102030729B1 (ko) 2016-09-12 2019-11-08 세메스 주식회사 핸드 제조 방법 및 기판 처리 방법

Also Published As

Publication number Publication date
US6893712B2 (en) 2005-05-17
US20030170440A1 (en) 2003-09-11

Similar Documents

Publication Publication Date Title
JP2000343476A (ja) 搬送用部材
JP5189843B2 (ja) Ｃｆｒｐ製搬送用部材及びそれを用いたロボットハンド
CN101652852B (zh) 用于传送基底的机械手及其末端执行器
WO2005117100A1 (ja) 基板カセット用サポートバー及び基板カセット
JP3632841B2 (ja) ロボットハンド部材の製造方法
JP4980712B2 (ja) ロボットハンド部材、その製造方法及びロボットハンド
US5916682A (en) Carbon fiber reinforced composite material
WO2000064668A1 (fr) Materiau composite a base de resine renforcee par des fibres, et possedant un coefficient reduit d'expansion lineaire
JP2020099991A (ja) アーム部材用繊維強化複合材料、アーム部材およびアーム部材の製造方法
JP3632842B2 (ja) ロボットハンド部材の製造方法
KR101307627B1 (ko) Ｃｆｒｐ 제 반송용 부재 및 그것을 사용한 로봇 핸드
US7338703B2 (en) Metallic-polymeric composite materials
TWI779294B (zh) 碳纖維強化塑料板以及碳纖維強化塑料板的製造方法
JP3632846B2 (ja) ロボットハンド部材及びその製造方法
KR100760168B1 (ko) 반송용 부재
JP3841219B2 (ja) 炭素繊維強化複合材製板状成形体
JP7236245B2 (ja) 複合成形品
JP3864751B2 (ja) 炭素繊維強化複合材料用樹脂組成物、プリプレグおよび炭素繊維強化複合材料
Biggerstaff et al. Directional damping material for integrally damped composite plates
JP2011183563A (ja) 炭素繊維強化プラスチック成形体
Kosmatka The Development of Directional Damping Techniques in Integrally Damped Laminated Composite Plates to Control Specific Mode Behavior
JP2002347148A (ja) 繊維強化複合材料製管状体およびそれを用いてなるゴルフクラブシャフト
JP2000024151A (ja) 管状成形体、ゴルフクラブ用シャフト及び釣竿用ロッド
JP2012201067A (ja) ロボットフォーク用プリプレグおよびその製造方法、ならびにロボットフォークの製造方法
JP2005054541A (ja) 炭素繊維強化プラスチック製梁部材および炭素繊維により補強した梁部材

Legal Events

Date Code Title Description
A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20040413

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040609

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040806

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20041020

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20041220

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050204

RD13 Notification of appointment of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7433

Effective date: 20050204

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20050204

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20050308

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20050708