JP2000343476A5 - - Google Patents

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Publication number
JP2000343476A5
JP2000343476A5 JP1999162623A JP16262399A JP2000343476A5 JP 2000343476 A5 JP2000343476 A5 JP 2000343476A5 JP 1999162623 A JP1999162623 A JP 1999162623A JP 16262399 A JP16262399 A JP 16262399A JP 2000343476 A5 JP2000343476 A5 JP 2000343476A5
Authority
JP
Japan
Prior art keywords
fiber
reinforced plastic
layer
carbon fiber
core layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1999162623A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000343476A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP16262399A priority Critical patent/JP2000343476A/ja
Priority claimed from JP16262399A external-priority patent/JP2000343476A/ja
Priority to KR1020000031629A priority patent/KR100760168B1/ko
Publication of JP2000343476A publication Critical patent/JP2000343476A/ja
Priority to US09/955,178 priority patent/US6893712B2/en
Publication of JP2000343476A5 publication Critical patent/JP2000343476A5/ja
Pending legal-status Critical Current

Links

JP16262399A 1999-06-09 1999-06-09 搬送用部材 Pending JP2000343476A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP16262399A JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材
KR1020000031629A KR100760168B1 (ko) 1999-06-09 2000-06-09 반송용 부재
US09/955,178 US6893712B2 (en) 1999-06-09 2001-09-19 Transport member

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16262399A JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材
US09/955,178 US6893712B2 (en) 1999-06-09 2001-09-19 Transport member

Publications (2)

Publication Number Publication Date
JP2000343476A JP2000343476A (ja) 2000-12-12
JP2000343476A5 true JP2000343476A5 (enExample) 2004-12-02

Family

ID=29585894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16262399A Pending JP2000343476A (ja) 1999-06-09 1999-06-09 搬送用部材

Country Status (2)

Country Link
US (1) US6893712B2 (enExample)
JP (1) JP2000343476A (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020077179A (ko) 2001-03-29 2002-10-11 니폰 미쓰비시 오일 코포레이션 로봇 핸드 부재 및 그 제조 방법
KR100511546B1 (ko) * 2001-07-05 2005-08-31 (주)애드컴텍 복합재료 로보트 암
TWI276194B (en) * 2001-12-03 2007-03-11 Du Pont Transfer member with electric conductivity and its manufacturing method
TW200511473A (en) * 2003-03-31 2005-03-16 Nippon Oil Co Ltd Dummy wafer
WO2005102618A1 (ja) * 2004-04-20 2005-11-03 Nippon Oil Corporation ロボットハンド部材、その製造方法及びロボットハンド
JP2005340480A (ja) * 2004-05-26 2005-12-08 Nippon Oil Corp 基板カセット用サポートバー
JP2006173363A (ja) * 2004-12-16 2006-06-29 Dainippon Printing Co Ltd 搬送体
KR100674881B1 (ko) * 2005-07-22 2007-01-29 주식회사 디엠에스 기판 이송용 핸드
JP4586162B2 (ja) * 2005-08-05 2010-11-24 トーカロ株式会社 基板処理装置用回転部材
JP2007281251A (ja) * 2006-04-07 2007-10-25 E I Du Pont De Nemours & Co サポートバーおよび基板カセット
JP4278677B2 (ja) * 2006-11-30 2009-06-17 株式会社ジャムコ サンドイッチパネル
US20080247857A1 (en) * 2007-04-05 2008-10-09 Ichiro Yuasa End effector and robot for transporting substrate
DE102008023071A1 (de) * 2008-05-09 2009-11-12 Multivac Sepp Haggenmüller Gmbh & Co. Kg Roboterstrukturelement, insbesondere für einer Verpackungsmaschine zugeordnete Roboter
JP2009285823A (ja) * 2008-05-28 2009-12-10 Meian Kokusai Gigyo Kofun Yugenkoshi ロボットアーム、並びに、その保持手段の構成材及び該構成材の製造方法
JP2011110682A (ja) * 2009-11-30 2011-06-09 Jx Nippon Oil & Energy Corp ロボットハンド及びその製造方法
US8827339B2 (en) * 2010-03-04 2014-09-09 Jx Nippon Oil & Energy Corporation Robot hand
EP2674265A4 (en) * 2011-02-07 2014-08-06 Jx Nippon Oil & Energy Corp SHAPED TUBE BODY
EP2610165B1 (en) * 2011-12-28 2017-02-08 AIRBUS HELICOPTERS DEUTSCHLAND GmbH Composite gusset filler and method of manufacture of said composite gusset filler
KR102177156B1 (ko) * 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
JP6397205B2 (ja) * 2014-04-01 2018-09-26 Ｊｘｔｇエネルギー株式会社 プリプレグ、炭素繊維強化複合材料、ロボットハンド部材及びその原料樹脂組成物
US20150290815A1 (en) * 2014-04-11 2015-10-15 Varian Semiconductor Equipment Associates, Inc. Planar end effector and method of making a planar end effector
JP6344982B2 (ja) * 2014-06-04 2018-06-20 三菱重工業株式会社 複合材構造
KR102471763B1 (ko) * 2015-03-10 2022-11-25 화이바 레인포스드 써모플라스틱스 비.브이. 섬유-강화 복합체
KR102030729B1 (ko) * 2016-09-12 2019-11-08 세메스 주식회사 핸드 제조 방법 및 기판 처리 방법
KR102883702B1 (ko) * 2021-04-28 2025-11-10 삼성전자주식회사 이송 유닛을 갖는 반도체 제조 장치 및 반도체 소자 형성 방법

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
EP0167533B1 (en) * 1984-01-09 1990-02-07 The Boeing Company Composite material structure with integral fire protection
US4680216A (en) * 1984-09-04 1987-07-14 United Technologies Corporation Method for stabilizing thick honeycomb core composite articles
US5085928A (en) * 1989-04-06 1992-02-04 E. I. Dupont De Nemours And Company Fiber reinforced composites comprising uni-directional fiber layers and aramid spunlaced fabric layers
US5106668A (en) * 1989-06-07 1992-04-21 Hexcel Corporation Multi-layer honeycomb structure
JP2980325B2 (ja) * 1989-07-31 1999-11-22 株式会社東芝 ハニカム構造体
JPH04215599A (ja) * 1990-12-10 1992-08-06 Mitsubishi Electric Corp 超軽量サンドイッチパネル
US5204033A (en) * 1991-10-21 1993-04-20 Brunswick Corporation Method of fabricating a preform in a resin transfer molding process
JPH06190847A (ja) * 1992-12-25 1994-07-12 Nippon Oil Co Ltd 炭素繊維強化プラスチック成形体の製造方法
JP3393955B2 (ja) 1995-04-18 2003-04-07 株式会社ダイヘン 薄板状ワーク搬送用ハンド
US5653331A (en) * 1996-03-05 1997-08-05 Voith Sulzer Papiermaschinen Gmbh Paper roll guide
JP3529009B2 (ja) * 1996-10-14 2004-05-24 新日本石油株式会社 炭素繊維強化複合材
JPH11354608A (ja) * 1998-06-10 1999-12-24 Mitsubishi Chemical Corp 搬送装置用ハンド
JP2001044259A (ja) 1999-07-30 2001-02-16 Fujikura Rubber Ltd 半導体搬送腕
US6815037B2 (en) * 2001-09-19 2004-11-09 Nippon Mitsubishi Oil Corporation Carrier member made of a UV resistant fiber-reinforced composite material and process for producing thereof

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