JP2000275140A5 - - Google Patents

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Publication number
JP2000275140A5
JP2000275140A5 JP1999080030A JP8003099A JP2000275140A5 JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5 JP 1999080030 A JP1999080030 A JP 1999080030A JP 8003099 A JP8003099 A JP 8003099A JP 2000275140 A5 JP2000275140 A5 JP 2000275140A5
Authority
JP
Japan
Prior art keywords
substrate
holding means
inspection apparatus
substrate holding
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999080030A
Other languages
English (en)
Japanese (ja)
Other versions
JP4121662B2 (ja
JP2000275140A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP08003099A priority Critical patent/JP4121662B2/ja
Priority claimed from JP08003099A external-priority patent/JP4121662B2/ja
Publication of JP2000275140A publication Critical patent/JP2000275140A/ja
Publication of JP2000275140A5 publication Critical patent/JP2000275140A5/ja
Application granted granted Critical
Publication of JP4121662B2 publication Critical patent/JP4121662B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08003099A 1999-03-24 1999-03-24 基板検査装置 Expired - Fee Related JP4121662B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08003099A JP4121662B2 (ja) 1999-03-24 1999-03-24 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08003099A JP4121662B2 (ja) 1999-03-24 1999-03-24 基板検査装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007333290A Division JP2008116470A (ja) 2007-12-25 2007-12-25 基板検査装置

Publications (3)

Publication Number Publication Date
JP2000275140A JP2000275140A (ja) 2000-10-06
JP2000275140A5 true JP2000275140A5 (enrdf_load_stackoverflow) 2006-04-27
JP4121662B2 JP4121662B2 (ja) 2008-07-23

Family

ID=13706884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08003099A Expired - Fee Related JP4121662B2 (ja) 1999-03-24 1999-03-24 基板検査装置

Country Status (1)

Country Link
JP (1) JP4121662B2 (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003006971A1 (fr) * 2001-07-02 2003-01-23 Olympus Optical Co., Ltd. Dispositif de support de substrat
KR100641817B1 (ko) * 2002-05-30 2006-11-02 삼성코닝정밀유리 주식회사 유리기판용 핸들러
TWI393875B (zh) * 2004-09-27 2013-04-21 Olympus Corp 基板檢測裝置之固持器及基板檢測裝置
JP2006133099A (ja) * 2004-11-08 2006-05-25 Micronics Japan Co Ltd 表示用パネルの検査装置
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
KR100748106B1 (ko) * 2005-09-05 2007-08-09 코리아테크노(주) 포토마스크 육안검사장치
KR100743427B1 (ko) 2006-08-07 2007-07-30 (주)오엘케이 평판 디스플레이 패널 매크로 검사장치
KR100813117B1 (ko) 2006-10-17 2008-03-17 최보경 디스플레이 표시모듈의 지지수단을 갖는 팔레트
KR100783618B1 (ko) 2006-10-31 2007-12-07 (주)오엘케이 매크로 검사장치
KR100881631B1 (ko) 2007-07-02 2009-02-04 주식회사 에이디피엔지니어링 전자빔 검사 시스템 및 검사 방법
KR101077898B1 (ko) 2009-09-15 2011-10-31 태산엘시디 주식회사 패널 안착기
CN112816486A (zh) * 2020-12-31 2021-05-18 立讯智造(浙江)有限公司 检测治具

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