JP2000266638A5 - - Google Patents

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Publication number
JP2000266638A5
JP2000266638A5 JP1999076717A JP7671799A JP2000266638A5 JP 2000266638 A5 JP2000266638 A5 JP 2000266638A5 JP 1999076717 A JP1999076717 A JP 1999076717A JP 7671799 A JP7671799 A JP 7671799A JP 2000266638 A5 JP2000266638 A5 JP 2000266638A5
Authority
JP
Japan
Prior art keywords
substrate
substrate holding
holding means
inspected
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999076717A
Other languages
English (en)
Japanese (ja)
Other versions
JP4256974B2 (ja
JP2000266638A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP07671799A priority Critical patent/JP4256974B2/ja
Priority claimed from JP07671799A external-priority patent/JP4256974B2/ja
Publication of JP2000266638A publication Critical patent/JP2000266638A/ja
Publication of JP2000266638A5 publication Critical patent/JP2000266638A5/ja
Application granted granted Critical
Publication of JP4256974B2 publication Critical patent/JP4256974B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP07671799A 1999-03-19 1999-03-19 基板検査装置 Expired - Fee Related JP4256974B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07671799A JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07671799A JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Publications (3)

Publication Number Publication Date
JP2000266638A JP2000266638A (ja) 2000-09-29
JP2000266638A5 true JP2000266638A5 (enrdf_load_stackoverflow) 2006-05-18
JP4256974B2 JP4256974B2 (ja) 2009-04-22

Family

ID=13613321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07671799A Expired - Fee Related JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Country Status (1)

Country Link
JP (1) JP4256974B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590614B1 (ko) 2004-08-28 2006-06-19 주식회사 디이엔티 대형 유리기판의 매크로/마이크로 검사장치
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
JP2007219327A (ja) * 2006-02-18 2007-08-30 Seiko Instruments Inc 両面表示検査の検査方法及び表示検査装置
JP4835535B2 (ja) * 2007-08-08 2011-12-14 株式会社ダイフク 板状体検査設備
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
CN111816603A (zh) * 2020-07-09 2020-10-23 上海精测半导体技术有限公司 一种基板承载装置及检测装置
CN112326209B (zh) * 2020-11-26 2022-08-19 李妍 一种眼镜片光学质量测量装置
CN115876801B (zh) * 2022-12-15 2024-01-26 杭州邦齐州科技有限公司 一种微纳光栅阴极组件产品检验治具
CN115931900A (zh) * 2022-12-28 2023-04-07 江苏康迅数控装备科技有限公司 一种六面钻板材加工用工艺检测装置

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