JPH1194754A5 - - Google Patents

Info

Publication number
JPH1194754A5
JPH1194754A5 JP1997255164A JP25516497A JPH1194754A5 JP H1194754 A5 JPH1194754 A5 JP H1194754A5 JP 1997255164 A JP1997255164 A JP 1997255164A JP 25516497 A JP25516497 A JP 25516497A JP H1194754 A5 JPH1194754 A5 JP H1194754A5
Authority
JP
Japan
Prior art keywords
substrate
inspected
unit
observation
observation unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1997255164A
Other languages
English (en)
Japanese (ja)
Other versions
JP3907797B2 (ja
JPH1194754A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25516497A priority Critical patent/JP3907797B2/ja
Priority claimed from JP25516497A external-priority patent/JP3907797B2/ja
Publication of JPH1194754A publication Critical patent/JPH1194754A/ja
Publication of JPH1194754A5 publication Critical patent/JPH1194754A5/ja
Application granted granted Critical
Publication of JP3907797B2 publication Critical patent/JP3907797B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP25516497A 1997-09-19 1997-09-19 基板検査装置 Expired - Fee Related JP3907797B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25516497A JP3907797B2 (ja) 1997-09-19 1997-09-19 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25516497A JP3907797B2 (ja) 1997-09-19 1997-09-19 基板検査装置

Publications (3)

Publication Number Publication Date
JPH1194754A JPH1194754A (ja) 1999-04-09
JPH1194754A5 true JPH1194754A5 (enrdf_load_stackoverflow) 2005-06-16
JP3907797B2 JP3907797B2 (ja) 2007-04-18

Family

ID=17274960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25516497A Expired - Fee Related JP3907797B2 (ja) 1997-09-19 1997-09-19 基板検査装置

Country Status (1)

Country Link
JP (1) JP3907797B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001194311A (ja) * 1999-10-25 2001-07-19 Olympus Optical Co Ltd 基板検査装置
JP2003014649A (ja) * 2001-06-27 2003-01-15 Hitachi Kokusai Electric Inc 板状物体検査装置
KR100590614B1 (ko) 2004-08-28 2006-06-19 주식회사 디이엔티 대형 유리기판의 매크로/마이크로 검사장치
JP2011009244A (ja) * 2007-10-25 2011-01-13 Nikon Corp 観察装置および観察方法、並びに検査装置および検査方法

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