JP4256974B2 - 基板検査装置 - Google Patents

基板検査装置 Download PDF

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Publication number
JP4256974B2
JP4256974B2 JP07671799A JP7671799A JP4256974B2 JP 4256974 B2 JP4256974 B2 JP 4256974B2 JP 07671799 A JP07671799 A JP 07671799A JP 7671799 A JP7671799 A JP 7671799A JP 4256974 B2 JP4256974 B2 JP 4256974B2
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Japan
Prior art keywords
inspected
substrate
observation
support
observation unit
Prior art date
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Expired - Fee Related
Application number
JP07671799A
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English (en)
Japanese (ja)
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JP2000266638A5 (enrdf_load_stackoverflow
JP2000266638A (ja
Inventor
斉 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
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Olympus Corp
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Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP07671799A priority Critical patent/JP4256974B2/ja
Publication of JP2000266638A publication Critical patent/JP2000266638A/ja
Publication of JP2000266638A5 publication Critical patent/JP2000266638A5/ja
Application granted granted Critical
Publication of JP4256974B2 publication Critical patent/JP4256974B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP07671799A 1999-03-19 1999-03-19 基板検査装置 Expired - Fee Related JP4256974B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07671799A JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07671799A JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Publications (3)

Publication Number Publication Date
JP2000266638A JP2000266638A (ja) 2000-09-29
JP2000266638A5 JP2000266638A5 (enrdf_load_stackoverflow) 2006-05-18
JP4256974B2 true JP4256974B2 (ja) 2009-04-22

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ID=13613321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07671799A Expired - Fee Related JP4256974B2 (ja) 1999-03-19 1999-03-19 基板検査装置

Country Status (1)

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JP (1) JP4256974B2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100590614B1 (ko) 2004-08-28 2006-06-19 주식회사 디이엔티 대형 유리기판의 매크로/마이크로 검사장치
JP4700365B2 (ja) * 2005-02-09 2011-06-15 オリンパス株式会社 基板検査装置
JP2007219327A (ja) * 2006-02-18 2007-08-30 Seiko Instruments Inc 両面表示検査の検査方法及び表示検査装置
JP4835535B2 (ja) * 2007-08-08 2011-12-14 株式会社ダイフク 板状体検査設備
CN103995000B (zh) * 2014-05-15 2017-01-11 京东方科技集团股份有限公司 一种显示基板的检查装置及检查系统
CN111816603A (zh) * 2020-07-09 2020-10-23 上海精测半导体技术有限公司 一种基板承载装置及检测装置
CN112326209B (zh) * 2020-11-26 2022-08-19 李妍 一种眼镜片光学质量测量装置
CN115876801B (zh) * 2022-12-15 2024-01-26 杭州邦齐州科技有限公司 一种微纳光栅阴极组件产品检验治具
CN115931900A (zh) * 2022-12-28 2023-04-07 江苏康迅数控装备科技有限公司 一种六面钻板材加工用工艺检测装置

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Publication number Publication date
JP2000266638A (ja) 2000-09-29

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