JP2000174225A5 - - Google Patents

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Publication number
JP2000174225A5
JP2000174225A5 JP1998341599A JP34159998A JP2000174225A5 JP 2000174225 A5 JP2000174225 A5 JP 2000174225A5 JP 1998341599 A JP1998341599 A JP 1998341599A JP 34159998 A JP34159998 A JP 34159998A JP 2000174225 A5 JP2000174225 A5 JP 2000174225A5
Authority
JP
Japan
Prior art keywords
mis transistor
integrated circuit
circuit device
semiconductor integrated
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998341599A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000174225A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10341599A priority Critical patent/JP2000174225A/ja
Priority claimed from JP10341599A external-priority patent/JP2000174225A/ja
Priority to TW088119931A priority patent/TW462126B/zh
Priority to KR1019990052132A priority patent/KR100712972B1/ko
Priority to US09/452,173 priority patent/US6734479B1/en
Publication of JP2000174225A publication Critical patent/JP2000174225A/ja
Publication of JP2000174225A5 publication Critical patent/JP2000174225A5/ja
Pending legal-status Critical Current

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JP10341599A 1998-12-01 1998-12-01 半導体集積回路装置およびその製造方法 Pending JP2000174225A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP10341599A JP2000174225A (ja) 1998-12-01 1998-12-01 半導体集積回路装置およびその製造方法
TW088119931A TW462126B (en) 1998-12-01 1999-11-16 Semiconductor integrated circuit apparatus and its manufacturing method
KR1019990052132A KR100712972B1 (ko) 1998-12-01 1999-11-23 반도체 집적회로 장치 및 그 제조방법
US09/452,173 US6734479B1 (en) 1998-12-01 1999-12-01 Semiconductor integrated circuit device and the method of producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10341599A JP2000174225A (ja) 1998-12-01 1998-12-01 半導体集積回路装置およびその製造方法

Publications (2)

Publication Number Publication Date
JP2000174225A JP2000174225A (ja) 2000-06-23
JP2000174225A5 true JP2000174225A5 (https=) 2004-11-25

Family

ID=18347333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10341599A Pending JP2000174225A (ja) 1998-12-01 1998-12-01 半導体集積回路装置およびその製造方法

Country Status (4)

Country Link
US (1) US6734479B1 (https=)
JP (1) JP2000174225A (https=)
KR (1) KR100712972B1 (https=)
TW (1) TW462126B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6232168B1 (en) * 2000-08-25 2001-05-15 Micron Technology, Inc. Memory circuitry and method of forming memory circuitry
JP2003031684A (ja) * 2001-07-11 2003-01-31 Hitachi Ltd 半導体集積回路装置およびその製造方法
JP4068340B2 (ja) 2001-12-17 2008-03-26 エルピーダメモリ株式会社 半導体集積回路装置
US6921692B2 (en) * 2003-07-07 2005-07-26 Micron Technology, Inc. Methods of forming memory circuitry
US7838369B2 (en) * 2005-08-29 2010-11-23 National Semiconductor Corporation Fabrication of semiconductor architecture having field-effect transistors especially suitable for analog applications
KR101116361B1 (ko) * 2010-02-26 2012-03-09 주식회사 하이닉스반도체 반도체 장치 제조 방법
US8785271B2 (en) * 2011-01-31 2014-07-22 GlobalFoundries, Inc. DRAM cell based on conductive nanochannel plate
JP5930650B2 (ja) 2011-10-07 2016-06-08 キヤノン株式会社 半導体装置の製造方法
US11264323B2 (en) * 2019-10-08 2022-03-01 Nanya Technology Corporation Semiconductor device and method for fabricating the same
TWI870393B (zh) * 2020-03-17 2025-01-21 聯華電子股份有限公司 半導體元件及其製作方法
KR20230106849A (ko) * 2022-01-07 2023-07-14 삼성전자주식회사 반도체 장치
KR20230144284A (ko) 2022-04-07 2023-10-16 삼성전자주식회사 반도체 장치

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02214155A (ja) 1989-02-15 1990-08-27 Hitachi Ltd 半導体装置
JPH0458556A (ja) 1990-06-28 1992-02-25 Sony Corp 半導体装置
JPH0936318A (ja) 1995-07-18 1997-02-07 Fujitsu Ltd ダイナミックメモリ
JP3272979B2 (ja) * 1997-01-08 2002-04-08 株式会社東芝 半導体装置
JP3466851B2 (ja) * 1997-01-20 2003-11-17 株式会社東芝 半導体装置及びその製造方法
JPH1168105A (ja) * 1997-08-26 1999-03-09 Mitsubishi Electric Corp 半導体装置

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