JP2000077772A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2000077772A5 JP2000077772A5 JP1999216916A JP21691699A JP2000077772A5 JP 2000077772 A5 JP2000077772 A5 JP 2000077772A5 JP 1999216916 A JP1999216916 A JP 1999216916A JP 21691699 A JP21691699 A JP 21691699A JP 2000077772 A5 JP2000077772 A5 JP 2000077772A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- refractive index
- semiconductor
- iii
- semiconductor compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 description 28
- 150000001875 compounds Chemical class 0.000 description 18
- 239000002019 doping agent Substances 0.000 description 13
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 9
- 229910052749 magnesium Inorganic materials 0.000 description 9
- 239000011777 magnesium Substances 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US144,355 | 1998-08-31 | ||
| US09/144,355 US6301281B1 (en) | 1998-08-31 | 1998-08-31 | Semiconductor laser having co-doped distributed bragg reflectors |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000077772A JP2000077772A (ja) | 2000-03-14 |
| JP2000077772A5 true JP2000077772A5 (enExample) | 2006-09-21 |
| JP4608040B2 JP4608040B2 (ja) | 2011-01-05 |
Family
ID=22508224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21691699A Expired - Fee Related JP4608040B2 (ja) | 1998-08-31 | 1999-07-30 | 半導体レーザ装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6301281B1 (enExample) |
| JP (1) | JP4608040B2 (enExample) |
| KR (1) | KR100647934B1 (enExample) |
| DE (2) | DE19964244C2 (enExample) |
| GB (1) | GB2341275B (enExample) |
| SG (1) | SG84522A1 (enExample) |
| TW (1) | TW410495B (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6560265B2 (en) * | 2001-09-11 | 2003-05-06 | Applied Optoelectronics, Inc. | Method and apparatus for polarizing light in a VCSEL |
| JP4066654B2 (ja) * | 2001-12-19 | 2008-03-26 | 富士ゼロックス株式会社 | 面発光型半導体レーザ装置及びその製造方法 |
| US6850548B2 (en) | 2001-12-28 | 2005-02-01 | Finisar Corporation | Assymmetric distributed Bragg reflector for vertical cavity surface emitting lasers |
| DE10262373B3 (de) * | 2002-04-30 | 2013-01-17 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung |
| DE10219345B4 (de) * | 2002-04-30 | 2011-05-19 | Osram Opto Semiconductors Gmbh | Strahlungsemittierendes Halbleiterbauelement mit Co-Dotierung |
| US6931045B1 (en) | 2002-08-12 | 2005-08-16 | Sandia Corporation | Distributed Bragg reflectors with reduced optical absorption |
| US20060215720A1 (en) * | 2005-03-24 | 2006-09-28 | Corzine Scott W | Quantum cascade laser with grating formed by a periodic variation in doping |
| KR101228108B1 (ko) * | 2005-11-09 | 2013-01-31 | 삼성전자주식회사 | 펌프 빔 반사층을 갖는 외부 공진기형 면발광 레이저 |
| JP2010114214A (ja) * | 2008-11-05 | 2010-05-20 | Fuji Xerox Co Ltd | 面発光型半導体レーザ素子、面発光型半導体レーザ素子の製造方法、および光送信装置 |
| AT511270B1 (de) | 2012-05-24 | 2015-07-15 | Avl List Gmbh | Verfahren und eine Vorrichtung zur Prüfung von elektrischen Energiespeichersystemen für den Antrieb von Fahrzeugen |
| CN109462143A (zh) * | 2018-09-30 | 2019-03-12 | 中科芯电半导体科技(北京)有限公司 | 一种应用于vcsel中的dbr生长方法、分布式布拉格反射镜和垂直腔面发射激光器 |
| KR20200049026A (ko) | 2018-10-31 | 2020-05-08 | 엘지이노텍 주식회사 | 표면발광 레이저소자 및 이를 포함하는 발광장치 |
| CN118630577A (zh) * | 2024-08-13 | 2024-09-10 | 深圳技术大学 | 基于相变材料超透镜阵列的可控变焦距激光器 |
| CN119403314B (zh) * | 2025-01-02 | 2025-04-22 | 南昌凯迅光电股份有限公司 | 一种红光led外延片及其制备方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5688388A (en) * | 1979-12-19 | 1981-07-17 | Matsushita Electric Ind Co Ltd | Semiconductor laser device |
| US5018157A (en) | 1990-01-30 | 1991-05-21 | At&T Bell Laboratories | Vertical cavity semiconductor lasers |
| US5115442A (en) * | 1990-04-13 | 1992-05-19 | At&T Bell Laboratories | Top-emitting surface emitting laser structures |
| EP0495301A1 (en) | 1990-12-14 | 1992-07-22 | AT&T Corp. | Method for making a semiconductor laser |
| US5208820A (en) | 1991-01-08 | 1993-05-04 | Nec Corporation | Optical device with low-resistive multi-level reflecting structure |
| US5226055A (en) * | 1991-09-30 | 1993-07-06 | At&T Bell Laboratories | Devices having repetitive layers |
| US5170407A (en) * | 1991-10-11 | 1992-12-08 | At&T Bell Laboratories | Elimination of heterojunction band discontinuities |
| US5212703A (en) * | 1992-02-18 | 1993-05-18 | Eastman Kodak Company | Surface emitting lasers with low resistance bragg reflectors |
| US5212701A (en) * | 1992-03-25 | 1993-05-18 | At&T Bell Laboratories | Semiconductor surface emitting laser having enhanced optical confinement |
| US5351257A (en) * | 1993-03-08 | 1994-09-27 | Motorola, Inc. | VCSEL with vertical offset operating region providing a lateral waveguide and current limiting and method of fabrication |
| JP3668979B2 (ja) * | 1993-08-31 | 2005-07-06 | ソニー株式会社 | 光電子集積回路装置の製造方法 |
| US5513202A (en) * | 1994-02-25 | 1996-04-30 | Matsushita Electric Industrial Co., Ltd. | Vertical-cavity surface-emitting semiconductor laser |
| JPH07249581A (ja) * | 1994-03-09 | 1995-09-26 | Fujitsu Ltd | Iii −v族化合物半導体結晶成長法 |
| DE19523181A1 (de) * | 1994-07-05 | 1996-01-11 | Motorola Inc | Verfahren zum P-Dotieren einer Licht emittierenden Vorrichtung |
| US5530715A (en) * | 1994-11-29 | 1996-06-25 | Motorola, Inc. | Vertical cavity surface emitting laser having continuous grading |
| JP3645343B2 (ja) * | 1994-12-28 | 2005-05-11 | 三井化学株式会社 | 半導体レーザ素子 |
| CA2208999C (en) * | 1994-12-28 | 2001-02-13 | Tsuyoshi Fujimoto | Semiconductor laser device |
| US5574744A (en) * | 1995-02-03 | 1996-11-12 | Motorola | Optical coupler |
| US5568499A (en) | 1995-04-07 | 1996-10-22 | Sandia Corporation | Optical device with low electrical and thermal resistance bragg reflectors |
| US5557627A (en) * | 1995-05-19 | 1996-09-17 | Sandia Corporation | Visible-wavelength semiconductor lasers and arrays |
| US5724376A (en) | 1995-11-30 | 1998-03-03 | Hewlett-Packard Company | Transparent substrate vertical cavity surface emitting lasers fabricated by semiconductor wafer bonding |
| US5706306A (en) * | 1996-03-15 | 1998-01-06 | Motorola | VCSEL with distributed Bragg reflectors for visible light |
| JPH09260770A (ja) * | 1996-03-22 | 1997-10-03 | Nippon Telegr & Teleph Corp <Ntt> | 面発光レーザ |
| JPH10173294A (ja) * | 1996-10-07 | 1998-06-26 | Canon Inc | 窒素を含む化合物半導体多層膜ミラー及びそれを用いた面型発光デバイス |
| EP0865124B1 (en) * | 1997-03-12 | 2003-01-22 | BRITISH TELECOMMUNICATIONS public limited company | Mirrors for VCSEL |
| JPH10261839A (ja) * | 1997-03-19 | 1998-09-29 | Nippon Telegr & Teleph Corp <Ntt> | 半導体薄膜及びその製造方法 |
| JP3245545B2 (ja) * | 1997-05-07 | 2002-01-15 | シャープ株式会社 | Iii−v族化合物半導体発光素子 |
| DE19723677A1 (de) * | 1997-06-05 | 1998-12-10 | Siemens Ag | Optoelektronisches Halbleiterbauelement |
| GB2333895B (en) | 1998-01-31 | 2003-02-26 | Mitel Semiconductor Ab | Pre-fusion oxidized and wafer-bonded vertical cavity laser |
-
1998
- 1998-08-31 US US09/144,355 patent/US6301281B1/en not_active Expired - Lifetime
-
1999
- 1999-03-18 SG SG9901204A patent/SG84522A1/en unknown
- 1999-03-19 TW TW088104358A patent/TW410495B/zh not_active IP Right Cessation
- 1999-04-28 DE DE19964244A patent/DE19964244C2/de not_active Expired - Fee Related
- 1999-04-28 DE DE19919382A patent/DE19919382C2/de not_active Expired - Fee Related
- 1999-07-30 JP JP21691699A patent/JP4608040B2/ja not_active Expired - Fee Related
- 1999-08-27 GB GB9920420A patent/GB2341275B/en not_active Expired - Fee Related
- 1999-08-30 KR KR1019990036243A patent/KR100647934B1/ko not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2000077772A5 (enExample) | ||
| JP2007036298A5 (enExample) | ||
| KR960019885A (ko) | 연속적인 그레이딩을 가진 수직 캐비티의 표면 발산 레이저 | |
| WO2002097904A3 (en) | Group iii nitride based light emitting diode structures with a quantum well and superlattice | |
| EP1022827A3 (en) | Semiconductor laser device and fabrication method | |
| WO2003041234A1 (en) | Semiconductor element | |
| KR960003000A (ko) | 패턴화 미러 수직 공동 표면 방출 레이저(vcsel) 및 그 제조 방법 | |
| WO2002025746A1 (en) | Nitride semiconductor light emitting element and optical device containing it | |
| ATE546869T1 (de) | Oberflächenemissionslaser | |
| JP2001168385A5 (enExample) | ||
| WO2003054353A3 (en) | Vertical cavity surface emitting laser including indium, antimony and nitrogen in the active region | |
| JP2000133883A5 (enExample) | ||
| JPH1174607A5 (enExample) | ||
| EP1146614A3 (en) | Semiconductor laser element having increased light confinement and method for fabrication | |
| JP2003204122A5 (enExample) | ||
| JP2004342719A5 (enExample) | ||
| KR100576718B1 (ko) | 실리콘 발광 소자 | |
| JP2000101142A5 (enExample) | ||
| JP2004179657A5 (enExample) | ||
| JP2004509478A5 (enExample) | ||
| EP1220393B8 (en) | Semiconductor laser device having InGaAs compressive-strain active layer, GaAsP tensile-strain barrier layers and InGaP optical waveguide layers | |
| EP1081815A3 (en) | Semiconductor laser element having resonator surface coated with oxygen gettering layer and high thermal conductivity layer | |
| JP2005294306A5 (enExample) | ||
| JP2002261393A5 (enExample) | ||
| JP2000277852A5 (enExample) |