JP2000058237A - セラミックヒ―タ及びそれを用いた酸素センサ - Google Patents

セラミックヒ―タ及びそれを用いた酸素センサ

Info

Publication number
JP2000058237A
JP2000058237A JP11068394A JP6839499A JP2000058237A JP 2000058237 A JP2000058237 A JP 2000058237A JP 11068394 A JP11068394 A JP 11068394A JP 6839499 A JP6839499 A JP 6839499A JP 2000058237 A JP2000058237 A JP 2000058237A
Authority
JP
Japan
Prior art keywords
heating resistor
ceramic heater
ceramic
heating
electric resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11068394A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000058237A5 (https=
Inventor
Yoshiro Noda
芳朗 野田
Toshihiko Aoyama
俊彦 青山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP11068394A priority Critical patent/JP2000058237A/ja
Priority to DE69927433T priority patent/DE69927433T2/de
Priority to US09/325,173 priority patent/US6169275B1/en
Priority to EP99304357A priority patent/EP0963137B1/en
Publication of JP2000058237A publication Critical patent/JP2000058237A/ja
Publication of JP2000058237A5 publication Critical patent/JP2000058237A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/286—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an organic material, e.g. plastic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • H05B3/265—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/28—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
    • H05B3/283—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/013—Heaters using resistive films or coatings
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017—Manufacturing methods or apparatus for heaters
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/027—Heaters specially adapted for glow plug igniters

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Resistance Heating (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Surface Heating Bodies (AREA)
JP11068394A 1998-06-05 1999-03-15 セラミックヒ―タ及びそれを用いた酸素センサ Pending JP2000058237A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11068394A JP2000058237A (ja) 1998-06-05 1999-03-15 セラミックヒ―タ及びそれを用いた酸素センサ
DE69927433T DE69927433T2 (de) 1998-06-05 1999-06-03 Keramisches Heizelement und dasselbe benützender Sauerstoffühler
US09/325,173 US6169275B1 (en) 1998-06-05 1999-06-03 Ceramic heater and oxygen sensor using the same
EP99304357A EP0963137B1 (en) 1998-06-05 1999-06-03 Ceramic heater and oxygen sensor using the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-173960 1998-06-05
JP17396098 1998-06-05
JP11068394A JP2000058237A (ja) 1998-06-05 1999-03-15 セラミックヒ―タ及びそれを用いた酸素センサ

Publications (2)

Publication Number Publication Date
JP2000058237A true JP2000058237A (ja) 2000-02-25
JP2000058237A5 JP2000058237A5 (https=) 2004-12-16

Family

ID=26409622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11068394A Pending JP2000058237A (ja) 1998-06-05 1999-03-15 セラミックヒ―タ及びそれを用いた酸素センサ

Country Status (4)

Country Link
US (1) US6169275B1 (https=)
EP (1) EP0963137B1 (https=)
JP (1) JP2000058237A (https=)
DE (1) DE69927433T2 (https=)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181764A (ja) * 2000-12-08 2002-06-26 Denso Corp 積層型ガスセンサ及びそれを用いたガス濃度検出装置
JP2007042615A (ja) * 2005-06-29 2007-02-15 Kyocera Corp セラミックヒータおよびその製造方法、並びにガスセンサ素子
US8841589B2 (en) 2011-08-30 2014-09-23 Denso Corporation Ceramic heater and gas sensor element
JP2015010861A (ja) * 2013-06-27 2015-01-19 日本特殊陶業株式会社 ヒータおよびガスセンサ素子
CN108781482A (zh) * 2016-03-16 2018-11-09 日本特殊陶业株式会社 陶瓷加热器
JP2019533287A (ja) * 2016-10-27 2019-11-14 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングＨｅｒａｅｕｓ Ｎｏｂｌｅｌｉｇｈｔ ＧｍｂＨ 赤外線放射器

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000277240A (ja) * 1999-03-26 2000-10-06 Ibiden Co Ltd セラミックヒーター
DE10012245A1 (de) * 2000-03-14 2001-10-04 Bosch Gmbh Robert Keramischer Grünkörper mit einer platinhaltigen, photostrukturierbaren Funktionsschicht und Verfahren zu dessen Herstellung
JP3516392B2 (ja) * 2000-06-16 2004-04-05 イビデン株式会社 半導体製造・検査装置用ホットプレート
DE10052948A1 (de) * 2000-10-25 2002-05-08 Dittrich Elektronic Gmbh & Co Heizelement
US20040040847A1 (en) * 2002-08-28 2004-03-04 Denso Corporation Gas sensor element and method of manufacturing same
US20040222210A1 (en) * 2003-05-08 2004-11-11 Hongy Lin Multi-zone ceramic heating system and method of manufacture thereof
DE10359569A1 (de) * 2003-12-18 2005-07-28 Robert Bosch Gmbh Keramischer Schichtverbund
KR20080108372A (ko) * 2003-12-24 2008-12-12 쿄세라 코포레이션 세라믹 히터 및 그 제조 방법
US7999211B2 (en) * 2006-09-01 2011-08-16 Hewlett-Packard Development Company, L.P. Heating element structure with isothermal and localized output
JP4826461B2 (ja) * 2006-12-15 2011-11-30 株式会社デンソー セラミックヒータ及びこれを用いたガスセンサ素子
KR100963224B1 (ko) * 2009-02-03 2010-06-10 (주) 더몰론코리아 물 또는 공기 중에서 겸용 사용이 가능한 세라믹 코팅 히터
BR112013008969A2 (pt) * 2010-10-12 2016-07-05 Mack Trucks elemento de sensor aquecido para ambientes de gás e líquido misturados
US8546732B2 (en) * 2010-11-10 2013-10-01 Lam Research Corporation Heating plate with planar heater zones for semiconductor processing
WO2013029824A1 (de) * 2011-08-26 2013-03-07 Robert Bosch Gmbh Sensorelement zur erfassung mindestens einer eigenschaft eines gases in einem messgasraum
CN104185317B (zh) * 2014-08-14 2016-09-07 厦门格睿伟业电子科技有限公司 一种双层包压陶瓷发热管
US10712307B2 (en) 2015-08-21 2020-07-14 Ngk Insulators, Ltd. Ceramic heater, sensor element, and gas sensor
JP6769650B2 (ja) * 2015-08-21 2020-10-14 日本碍子株式会社 セラミックスヒータ，センサ素子及びガスセンサ
JP6796358B2 (ja) 2015-08-21 2020-12-09 日本碍子株式会社 セラミックスヒータ，センサ素子及びガスセンサ
DE102015223493A1 (de) 2015-11-26 2017-06-01 E.G.O. Elektro-Gerätebau GmbH Heizeinrichtung
EP3516680A1 (de) * 2016-09-22 2019-07-31 Heraeus Noblelight GmbH Infrarot-strahler
DE102016118137A1 (de) * 2016-09-26 2018-03-29 Heraeus Noblelight Gmbh Infrarotflächenstrahler
JP6792539B2 (ja) * 2017-10-31 2020-11-25 日本特殊陶業株式会社 流体加熱用のセラミックヒータ
GB201800548D0 (en) * 2018-01-12 2018-02-28 Project Paradise Ltd A Method of printing an electric heating element, and an electric heating element produced thereby
CN207869432U (zh) * 2018-03-07 2018-09-14 东莞市国研电热材料有限公司 一种多温区陶瓷发热体
US11937342B2 (en) * 2019-09-23 2024-03-19 Battelle Memorial Institute Spot heater
JP7422024B2 (ja) * 2020-07-07 2024-01-25 新光電気工業株式会社 セラミックス構造体、静電チャック、基板固定装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3875413A (en) * 1973-10-09 1975-04-01 Hewlett Packard Co Infrared radiation source
JPS61109289A (ja) * 1984-11-01 1986-05-27 日本碍子株式会社 セラミツクヒ−タおよびその製造方法
JPH01194282A (ja) * 1988-01-28 1989-08-04 Ngk Insulators Ltd セラミック・ヒータ及び電気化学的素子並びに酸素分析装置
JP2535372B2 (ja) * 1988-03-09 1996-09-18 日本碍子株式会社 セラミック・ヒ―タ及び電気化学的素子並びに酸素分析装置
JPH01313362A (ja) * 1988-06-09 1989-12-18 Ngk Spark Plug Co Ltd セラミック発熱体およびその製造方法
DE68921124T2 (de) * 1988-08-25 1995-07-20 Toshiba Lighting & Technology Heizstreifen.
JP3020013B2 (ja) 1991-08-02 2000-03-15 日本特殊陶業株式会社 酸素センサ用セラミックヒータ
JP3016669B2 (ja) 1992-12-17 2000-03-06 日本特殊陶業株式会社 セラミックヒータ
US5705261A (en) * 1993-10-28 1998-01-06 Saint-Gobain/Norton Industrial Ceramics Corporation Active metal metallization of mini-igniters by silk screening
JP2828575B2 (ja) * 1993-11-12 1998-11-25 京セラ株式会社 窒化珪素質セラミックヒータ
JP3523937B2 (ja) * 1994-07-06 2004-04-26 日本特殊陶業株式会社 センサ用セラミックヒータ及び酸素センサ
US5895591A (en) * 1994-07-06 1999-04-20 Ngk Spark Plug Co., Ltd. Ceramic heater and oxygen sensor
JP3230793B2 (ja) * 1995-01-24 2001-11-19 富士電機株式会社 セラミックス発熱体
JP3110974B2 (ja) 1995-05-16 2000-11-20 日本特殊陶業株式会社 メタライズ発熱層を有するアルミナ質セラミックヒータ
JPH0949818A (ja) 1995-08-07 1997-02-18 Ngk Spark Plug Co Ltd ガス検出センサ用ヒータ及び電力制御装置
JP3182639B2 (ja) 1995-08-10 2001-07-03 日本特殊陶業株式会社 セラミックヒータ及びその製造方法
DE69707642T2 (de) * 1996-01-26 2002-07-11 Saint-Gobain Industrial Ceramics, Inc. Keramischer zünder und verfahren zu seiner verwendung
JPH09266059A (ja) 1996-03-29 1997-10-07 Ngk Spark Plug Co Ltd セラミックヒータ及びその製造方法
JPH10104067A (ja) * 1996-09-27 1998-04-24 Fuji Electric Co Ltd 二珪化モリブデン複合セラミックス赤外線光源もしくは発熱源

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002181764A (ja) * 2000-12-08 2002-06-26 Denso Corp 積層型ガスセンサ及びそれを用いたガス濃度検出装置
JP2007042615A (ja) * 2005-06-29 2007-02-15 Kyocera Corp セラミックヒータおよびその製造方法、並びにガスセンサ素子
US8841589B2 (en) 2011-08-30 2014-09-23 Denso Corporation Ceramic heater and gas sensor element
JP2015010861A (ja) * 2013-06-27 2015-01-19 日本特殊陶業株式会社 ヒータおよびガスセンサ素子
US9594048B2 (en) 2013-06-27 2017-03-14 Ngk Spark Plug Co., Ltd. Heater and gas sensor element
CN108781482A (zh) * 2016-03-16 2018-11-09 日本特殊陶业株式会社 陶瓷加热器
JP2019533287A (ja) * 2016-10-27 2019-11-14 ヘレーウス ノーブルライト ゲゼルシャフト ミット ベシュレンクテルハフツングＨｅｒａｅｕｓ Ｎｏｂｌｅｌｉｇｈｔ ＧｍｂＨ 赤外線放射器

Also Published As

Publication number Publication date
DE69927433D1 (de) 2006-02-09
US6169275B1 (en) 2001-01-02
EP0963137A3 (en) 2001-10-10
EP0963137B1 (en) 2005-09-28
DE69927433T2 (de) 2006-06-22
EP0963137A2 (en) 1999-12-08

Similar Documents

Publication Publication Date Title
JP2000058237A (ja) セラミックヒ―タ及びそれを用いた酸素センサ
US5756215A (en) Ceramic heater
EP1524882A2 (en) Ceramic heater
EP2343949A1 (en) Ceramic heater
US5997998A (en) Resistance element
EP1734788B1 (en) Ceramic-metal assembly and ceramic heater
JP3078418B2 (ja) セラミック発熱体
JP2002146465A (ja) 金属抵抗体及びこの金属抵抗体を有するヒータ並びにガスセンサ
JPH11273837A (ja) セラミックヒータの製造方法
JPH10308301A (ja) 抵抗型温度センサー
JP3929882B2 (ja) 平板状セラミックヒータおよびこれを用いた検出素子
JP3874691B2 (ja) ガスセンサ素子及びガスセンサ
JP3685623B2 (ja) セラミックヒータ
JP3016669B2 (ja) セラミックヒータ
JP4163840B2 (ja) ガスセンサ
JPH11273839A (ja) セラミックヒータの製造方法
JPH07106055A (ja) 急速昇温発熱素子およびその製造方法
JP2005005057A (ja) セラミックヒータ、並びにセラミックヒータ構造体
JP2001266639A (ja) 金属抵抗体及び該金属抵抗体を有するヒータ並びに該ヒータを備えるガスセンサ
JPH10144503A (ja) 抵抗型温度センサ及びその製造方法
JPH11354255A (ja) セラミックヒータの製造方法
JP2000021555A (ja) セラミックヒータ及びその製造方法
JP3847074B2 (ja) セラミックヒータおよびこれを用いた酸素センサ
JP3425097B2 (ja) 抵抗素子
JP2002075596A (ja) セラミックヒーター及びその製造方法

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20031226

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20031226

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20040412

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20040518

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040720

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20041102