JP1741513S - - Google Patents
Info
- Publication number
- JP1741513S JP1741513S JP2022019755F JP2022019755F JP1741513S JP 1741513 S JP1741513 S JP 1741513S JP 2022019755 F JP2022019755 F JP 2022019755F JP 2022019755 F JP2022019755 F JP 2022019755F JP 1741513 S JP1741513 S JP 1741513S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022019755F JP1741513S (enExample) | 2022-09-14 | 2022-09-14 | |
| TW112300493F TWD231193S (zh) | 2022-09-14 | 2023-02-07 | 基板處理裝置用基板保持具之部分 |
| US29/885,256 USD1078667S1 (en) | 2022-09-14 | 2023-02-22 | Wafer support of semiconductor manufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022019755F JP1741513S (enExample) | 2022-09-14 | 2022-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1741513S true JP1741513S (enExample) | 2023-04-11 |
Family
ID=85802426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022019755F Active JP1741513S (enExample) | 2022-09-14 | 2022-09-14 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD1078667S1 (enExample) |
| JP (1) | JP1741513S (enExample) |
| TW (1) | TWD231193S (enExample) |
Family Cites Families (43)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD291413S (en) * | 1984-07-30 | 1987-08-18 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
| USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
| USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
| USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
| JP3122364B2 (ja) * | 1996-02-06 | 2001-01-09 | 東京エレクトロン株式会社 | ウエハボート |
| USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
| KR20000002833A (ko) * | 1998-06-23 | 2000-01-15 | 윤종용 | 반도체 웨이퍼 보트 |
| JP3487497B2 (ja) * | 1998-06-24 | 2004-01-19 | 岩手東芝エレクトロニクス株式会社 | 被処理体収容治具及びこれを用いた熱処理装置 |
| US6225594B1 (en) * | 1999-04-15 | 2001-05-01 | Integrated Materials, Inc. | Method and apparatus for securing components of wafer processing fixtures |
| US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
| US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
| US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
| US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
| US6727191B2 (en) * | 2001-02-26 | 2004-04-27 | Integrated Materials, Inc. | High temperature hydrogen anneal of silicon wafers supported on a silicon fixture |
| JP4467028B2 (ja) * | 2001-05-11 | 2010-05-26 | 信越石英株式会社 | 縦型ウェーハ支持治具 |
| US6811040B2 (en) * | 2001-07-16 | 2004-11-02 | Rohm And Haas Company | Wafer holding apparatus |
| JP4506125B2 (ja) * | 2003-07-16 | 2010-07-21 | 信越半導体株式会社 | 熱処理用縦型ボート及びその製造方法 |
| TWD119911S1 (zh) * | 2006-05-01 | 2007-11-11 | 東京威力科創股份有限公司 | 晶舟 |
| TWD119910S1 (zh) * | 2006-05-01 | 2007-11-11 | 東京威力科創股份有限公司 | 晶舟 |
| TWD130137S1 (zh) * | 2006-10-25 | 2009-08-01 | 東京威力科創股份有限公司 | 晶舟 |
| USD763807S1 (en) * | 2014-05-22 | 2016-08-16 | Hzo, Inc. | Boat for a deposition apparatus |
| USD703161S1 (en) * | 2012-10-15 | 2014-04-22 | Sumitomo Electric Industries, Ltd. | Wafer holder for ion implantation |
| TWD161688S (zh) * | 2012-12-27 | 2014-07-11 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| TWD166332S (zh) * | 2013-03-22 | 2015-03-01 | 日立國際電氣股份有限公司 | 基板處理裝置用晶舟之部分 |
| TWD163542S (zh) * | 2013-03-22 | 2014-10-11 | 日立國際電氣股份有限公司 | 基板處理裝置用晶舟 |
| TWD165429S (zh) * | 2013-07-29 | 2015-01-11 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| TWD168827S (zh) * | 2013-07-29 | 2015-07-01 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| TWD167988S (zh) * | 2013-07-29 | 2015-05-21 | 日立國際電氣股份有限公司 | 半導體製造裝置用晶舟 |
| JP1537630S (enExample) * | 2014-11-20 | 2015-11-09 | ||
| JP1537312S (enExample) * | 2014-11-20 | 2015-11-09 | ||
| JP1537629S (enExample) * | 2014-11-20 | 2015-11-09 | ||
| JP1537313S (enExample) * | 2014-11-20 | 2015-11-09 | ||
| JP1563649S (enExample) * | 2016-02-12 | 2016-11-21 | ||
| JP1597807S (enExample) * | 2017-08-21 | 2018-02-19 | ||
| USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
| JP1638282S (enExample) | 2018-09-20 | 2019-08-05 | ||
| JP1640260S (enExample) * | 2018-11-19 | 2019-09-02 | ||
| JP1665228S (enExample) * | 2019-11-28 | 2020-08-03 | ||
| JP1678278S (ja) * | 2020-03-19 | 2021-02-01 | 基板処理装置用ボート | |
| JP1700777S (ja) * | 2021-03-15 | 2021-11-29 | 基板処理装置用ボート |
-
2022
- 2022-09-14 JP JP2022019755F patent/JP1741513S/ja active Active
-
2023
- 2023-02-07 TW TW112300493F patent/TWD231193S/zh unknown
- 2023-02-22 US US29/885,256 patent/USD1078667S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD1078667S1 (en) | 2025-06-10 |
| TWD231193S (zh) | 2024-05-11 |
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