ITMI911121A1 - Dispositivo transistore di potenza presentante una regione ultra-profonda, a maggior concentrazione - Google Patents

Dispositivo transistore di potenza presentante una regione ultra-profonda, a maggior concentrazione

Info

Publication number
ITMI911121A1
ITMI911121A1 IT001121A ITMI911121A ITMI911121A1 IT MI911121 A1 ITMI911121 A1 IT MI911121A1 IT 001121 A IT001121 A IT 001121A IT MI911121 A ITMI911121 A IT MI911121A IT MI911121 A1 ITMI911121 A1 IT MI911121A1
Authority
IT
Italy
Prior art keywords
ultra
power transistor
transistor device
greater concentration
deep region
Prior art date
Application number
IT001121A
Other languages
English (en)
Inventor
Herbert J Gould
Perry Merril
Original Assignee
Int Rectifier Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Int Rectifier Corp filed Critical Int Rectifier Corp
Publication of ITMI911121A0 publication Critical patent/ITMI911121A0/it
Publication of ITMI911121A1 publication Critical patent/ITMI911121A1/it
Application granted granted Critical
Publication of IT1247293B publication Critical patent/IT1247293B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66234—Bipolar junction transistors [BJT]
    • H01L29/66325—Bipolar junction transistors [BJT] controlled by field-effect, e.g. insulated gate bipolar transistors [IGBT]
    • H01L29/66333—Vertical insulated gate bipolar transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/739—Transistor-type devices, i.e. able to continuously respond to applied control signals controlled by field-effect, e.g. bipolar static induction transistors [BSIT]
    • H01L29/7393—Insulated gate bipolar mode transistors, i.e. IGBT; IGT; COMFET
    • H01L29/7395—Vertical transistors, e.g. vertical IGBT
    • H01L29/7398—Vertical transistors, e.g. vertical IGBT with both emitter and collector contacts in the same substrate side
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843—Source or drain regions of field-effect devices
    • H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Thyristors (AREA)
  • Bipolar Transistors (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Light Receiving Elements (AREA)
ITMI911121A 1990-05-09 1991-04-23 Dispositivo transistore di potenza presentante una regione ultra-profonda, a maggior concentrazione IT1247293B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52117790A 1990-05-09 1990-05-09

Publications (3)

Publication Number Publication Date
ITMI911121A0 ITMI911121A0 (it) 1991-04-23
ITMI911121A1 true ITMI911121A1 (it) 1992-10-23
IT1247293B IT1247293B (it) 1994-12-12

Family

ID=24075680

Family Applications (1)

Application Number Title Priority Date Filing Date
ITMI911121A IT1247293B (it) 1990-05-09 1991-04-23 Dispositivo transistore di potenza presentante una regione ultra-profonda, a maggior concentrazione

Country Status (9)

Country Link
US (2) US5661314A (it)
JP (1) JP3004077B2 (it)
KR (1) KR950011019B1 (it)
AT (1) AT404525B (it)
CA (1) CA2042069A1 (it)
DE (1) DE4114174A1 (it)
FR (1) FR2662025A1 (it)
GB (1) GB2243952B (it)
IT (1) IT1247293B (it)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5766966A (en) * 1996-02-09 1998-06-16 International Rectifier Corporation Power transistor device having ultra deep increased concentration region
DE19534388B4 (de) * 1994-09-19 2009-03-19 International Rectifier Corp., El Segundo IGBT-Transistorbauteil
DE69512021T2 (de) 1995-03-31 2000-05-04 Consorzio Per La Ricerca Sulla Microelettronica Nel Mezzogiorno, Catania DMOS-Anordnung-Struktur und Verfahren zur Herstellung
JP3581447B2 (ja) * 1995-08-22 2004-10-27 三菱電機株式会社 高耐圧半導体装置
US6008092A (en) * 1996-02-12 1999-12-28 International Rectifier Corporation Short channel IGBT with improved forward voltage drop and improved switching power loss
US6040599A (en) 1996-03-12 2000-03-21 Mitsubishi Denki Kabushiki Kaisha Insulated trench semiconductor device with particular layer structure
US6043112A (en) * 1996-07-25 2000-03-28 International Rectifier Corp. IGBT with reduced forward voltage drop and reduced switching loss
EP0837508A3 (en) * 1996-10-18 1999-01-20 Hitachi, Ltd. Semiconductor device and electric power conversion apparatus therewith
DE19730759C1 (de) * 1997-07-17 1998-09-03 Siemens Ag Vertikaler Leistungs-MOSFET
US6072216A (en) * 1998-05-01 2000-06-06 Siliconix Incorporated Vertical DMOS field effect transistor with conformal buried layer for reduced on-resistance
US6677626B1 (en) * 1998-11-11 2004-01-13 Fuji Electric Co., Ltd. Semiconductor device with alternating conductivity type layer and method of manufacturing the same
US6563169B1 (en) 1999-04-09 2003-05-13 Shindengen Electric Manufacturing Co., Ltd. Semiconductor device with high withstand voltage and a drain layer having a highly conductive region connectable to a diffused source layer by an inverted layer
US6137139A (en) * 1999-06-03 2000-10-24 Intersil Corporation Low voltage dual-well MOS device having high ruggedness, low on-resistance, and improved body diode reverse recovery
AU5475100A (en) * 1999-06-09 2000-12-28 International Rectifier Corporation Dual epitaxial layer for high voltage vertical conduction power mosfet devices
JP4169879B2 (ja) 1999-08-20 2008-10-22 新電元工業株式会社 高耐圧トランジスタ
US6246090B1 (en) 2000-03-14 2001-06-12 Intersil Corporation Power trench transistor device source region formation using silicon spacer
US8314002B2 (en) * 2000-05-05 2012-11-20 International Rectifier Corporation Semiconductor device having increased switching speed
US7485920B2 (en) * 2000-06-14 2009-02-03 International Rectifier Corporation Process to create buried heavy metal at selected depth
US6784486B2 (en) * 2000-06-23 2004-08-31 Silicon Semiconductor Corporation Vertical power devices having retrograded-doped transition regions therein
US6781194B2 (en) * 2001-04-11 2004-08-24 Silicon Semiconductor Corporation Vertical power devices having retrograded-doped transition regions and insulated trench-based electrodes therein
US6333253B1 (en) * 2000-08-24 2001-12-25 Advanced Micro Devices, Inc. Pattern-block flux deposition
US6635926B2 (en) 2000-08-30 2003-10-21 Shindengen Electric Manufacturing Co., Ltd. Field effect transistor with high withstand voltage and low resistance
WO2002022278A2 (de) * 2000-09-15 2002-03-21 Häcker Automation Verfahren und vorrichtung zum aufbringen fluider stoffe
JP3708014B2 (ja) * 2000-10-20 2005-10-19 株式会社東芝 半導体装置
GB2373634B (en) * 2000-10-31 2004-12-08 Fuji Electric Co Ltd Semiconductor device
JP2002246595A (ja) * 2001-02-19 2002-08-30 Shindengen Electric Mfg Co Ltd トランジスタ
EP1396030B1 (en) * 2001-04-11 2011-06-29 Silicon Semiconductor Corporation Vertical power semiconductor device and method of making the same
JP5023423B2 (ja) * 2001-09-27 2012-09-12 サンケン電気株式会社 縦型絶縁ゲート型電界効果トランジスタおよびその製造方法
US6781203B2 (en) * 2001-11-09 2004-08-24 International Rectifier Corporation MOSFET with reduced threshold voltage and on resistance and process for its manufacture
JP3973934B2 (ja) * 2002-03-15 2007-09-12 株式会社東芝 高耐圧半導体装置
DE10330571B8 (de) * 2003-07-07 2007-03-08 Infineon Technologies Ag Vertikale Leistungshalbleiterbauelemente mit Injektionsdämpfungsmittel im Rand bereich und Herstellungsverfahren dafür
US7180152B2 (en) * 2004-07-08 2007-02-20 International Rectifier Corporation Process for resurf diffusion for high voltage MOSFET
KR100722909B1 (ko) * 2005-08-30 2007-05-30 닛산 지도우샤 가부시키가이샤 반도체 장치
JP5116225B2 (ja) * 2005-09-06 2013-01-09 キヤノン株式会社 酸化物半導体デバイスの製造方法
US7655977B2 (en) * 2005-10-18 2010-02-02 International Rectifier Corporation Trench IGBT for highly capacitive loads
US7956419B2 (en) * 2005-11-02 2011-06-07 International Rectifier Corporation Trench IGBT with depletion stop layer
US8933466B2 (en) 2012-03-23 2015-01-13 Panasonic Corporation Semiconductor element
WO2014013821A1 (ja) * 2012-07-18 2014-01-23 富士電機株式会社 半導体装置および半導体装置の製造方法
WO2014030457A1 (ja) 2012-08-22 2014-02-27 富士電機株式会社 半導体装置および半導体装置の製造方法
US9263271B2 (en) * 2012-10-25 2016-02-16 Infineon Technologies Ag Method for processing a semiconductor carrier, a semiconductor chip arrangement and a method for manufacturing a semiconductor device
US9530844B2 (en) 2012-12-28 2016-12-27 Cree, Inc. Transistor structures having reduced electrical field at the gate oxide and methods for making same
US10115815B2 (en) 2012-12-28 2018-10-30 Cree, Inc. Transistor structures having a deep recessed P+ junction and methods for making same
US9331197B2 (en) 2013-08-08 2016-05-03 Cree, Inc. Vertical power transistor device
US10600903B2 (en) 2013-09-20 2020-03-24 Cree, Inc. Semiconductor device including a power transistor device and bypass diode
US10868169B2 (en) 2013-09-20 2020-12-15 Cree, Inc. Monolithically integrated vertical power transistor and bypass diode
CN104517837B (zh) * 2013-09-29 2017-10-10 无锡华润上华科技有限公司 一种绝缘栅双极型晶体管的制造方法
US20150263145A1 (en) * 2014-03-14 2015-09-17 Cree, Inc. Igbt structure for wide band-gap semiconductor materials
US9337284B2 (en) * 2014-04-07 2016-05-10 Alpha And Omega Semiconductor Incorporated Closed cell lateral MOSFET using silicide source and body regions
DE102014005879B4 (de) * 2014-04-16 2021-12-16 Infineon Technologies Ag Vertikale Halbleitervorrichtung
US20150311325A1 (en) * 2014-04-23 2015-10-29 Cree, Inc. Igbt structure on sic for high performance
JP6706786B2 (ja) * 2015-10-30 2020-06-10 一般財団法人電力中央研究所 エピタキシャルウェハの製造方法、エピタキシャルウェハ、半導体装置の製造方法及び半導体装置
DE102016015475B3 (de) * 2016-12-28 2018-01-11 3-5 Power Electronics GmbH IGBT Halbleiterstruktur
US11489069B2 (en) 2017-12-21 2022-11-01 Wolfspeed, Inc. Vertical semiconductor device with improved ruggedness
US10615274B2 (en) 2017-12-21 2020-04-07 Cree, Inc. Vertical semiconductor device with improved ruggedness

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR569811A (fr) * 1923-08-20 1924-04-18 Suspension compensée pour véhicules à moteurs
DE940699C (de) * 1952-12-18 1956-03-22 Kurt Koerber & Co K G Vorrichtung zum Durchschneiden von Filterstaeben zur Herstellung von Filtermundstueckzigaretten
US4206540A (en) * 1978-06-02 1980-06-10 International Rectifier Corporation Schottky device and method of manufacture using palladium and platinum intermetallic alloys and titanium barrier
DK157272C (da) * 1978-10-13 1990-04-30 Int Rectifier Corp Mosfet med hoej effekt
JPS5553462A (en) * 1978-10-13 1980-04-18 Int Rectifier Corp Mosfet element
US4364073A (en) * 1980-03-25 1982-12-14 Rca Corporation Power MOSFET with an anode region
US4593302B1 (en) * 1980-08-18 1998-02-03 Int Rectifier Corp Process for manufacture of high power mosfet laterally distributed high carrier density beneath the gate oxide
US4398344A (en) * 1982-03-08 1983-08-16 International Rectifier Corporation Method of manufacture of a schottky using platinum encapsulated between layers of palladium sintered into silicon surface
JPS59149058A (ja) * 1983-02-15 1984-08-25 Matsushita Electric Works Ltd Ｍｏｓ型トランジスタ
JPS59167066A (ja) * 1983-03-14 1984-09-20 Nissan Motor Co Ltd 縦形ｍｏｓｆｅｔ
JPS6010677A (ja) * 1983-06-30 1985-01-19 Nissan Motor Co Ltd 縦型ｍｏｓトランジスタ
JP2644989B2 (ja) * 1984-05-09 1997-08-25 株式会社東芝 導電変調型ｍｏｓｆｅｔ
US4672407A (en) * 1984-05-30 1987-06-09 Kabushiki Kaisha Toshiba Conductivity modulated MOSFET
JPS61150378A (ja) * 1984-12-25 1986-07-09 Toshiba Corp 電界効果トランジスタ
EP0222326A2 (en) * 1985-11-12 1987-05-20 General Electric Company Method of fabricating an improved insulated gate semiconductor device
JPS62115873A (ja) * 1985-11-15 1987-05-27 Matsushita Electronics Corp 縦型ｍｏｓ電界効果トランジスタ
JPH0834221B2 (ja) * 1986-03-21 1996-03-29 日本電装株式会社 電流検出機能付半導体装置
JP2751926B2 (ja) * 1986-12-22 1998-05-18 日産自動車株式会社 電導度変調形ｍｏｓｆｅｔ
JPS6449273A (en) * 1987-08-19 1989-02-23 Mitsubishi Electric Corp Semiconductor device and its manufacture
JP2771172B2 (ja) * 1988-04-01 1998-07-02 日本電気株式会社 縦型電界効果トランジスタ
JPH01287965A (ja) * 1988-05-13 1989-11-20 Mitsubishi Electric Corp 半導体装置の製造方法
JPH0237777A (ja) * 1988-07-27 1990-02-07 Nec Corp 縦型電界効果トランジスタ
JPH0247874A (ja) * 1988-08-10 1990-02-16 Fuji Electric Co Ltd Ｍｏｓ型半導体装置の製造方法
US4925812A (en) * 1989-09-21 1990-05-15 International Rectifier Corporation Platinum diffusion process

Also Published As

Publication number Publication date
IT1247293B (it) 1994-12-12
ITMI911121A0 (it) 1991-04-23
DE4114174A1 (de) 1991-11-14
KR950011019B1 (en) 1995-09-27
GB9110071D0 (en) 1991-07-03
JP3004077B2 (ja) 2000-01-31
KR910020923A (ko) 1991-12-20
ATA95691A (de) 1998-04-15
AT404525B (de) 1998-12-28
FR2662025A1 (fr) 1991-11-15
US5904510A (en) 1999-05-18
GB2243952A (en) 1991-11-13
GB2243952B (en) 1994-08-17
US5661314A (en) 1997-08-26
CA2042069A1 (en) 1991-11-10
JPH04229660A (ja) 1992-08-19

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Effective date: 19970423