HUE031482T2 - Eljárás hordozó bevonatolására, valamint fémötvözet-vákuumgõzölõ berendezés - Google Patents

Eljárás hordozó bevonatolására, valamint fémötvözet-vákuumgõzölõ berendezés Download PDF

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Publication number
HUE031482T2
HUE031482T2 HUE08787802A HUE08787802A HUE031482T2 HU E031482 T2 HUE031482 T2 HU E031482T2 HU E08787802 A HUE08787802 A HU E08787802A HU E08787802 A HUE08787802 A HU E08787802A HU E031482 T2 HUE031482 T2 HU E031482T2
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HU
Hungary
Prior art keywords
eszközök
ities
substrate
coating
metal
Prior art date
Application number
HUE08787802A
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English (en)
Inventor
Patrick Choquet
Eric Silberberg
Bruno Schmitz
Daniel Chaleix
Original Assignee
Arcelormittal
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First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38370938&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=HUE031482(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Arcelormittal filed Critical Arcelormittal
Publication of HUE031482T2 publication Critical patent/HUE031482T2/hu

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45563—Gas nozzles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating By Spraying Or Casting (AREA)

Claims (2)

  1. SXdébd' 20:::μί«-Μ^«δ|·:Κ is :i»t :Rec<;ss;^ :to: gó beyosyl §sm 1¾ order ίο have És level of seslxíssnee ís> «sxroskas íhas is regssiseb io snsksgsötólea or boiidfep, o^ecioHjo Is is gooomlíy posa&amp;le b> ussj a íbfcfeíossíim1$ of S pssi for applioatiosn so susíomobskos, :?8rfemw$6«: oí Inebístrsál aosts sbews t|ssi deposltkm S>y íhls method mííKxss h: possible ts> ohM» » high dbposiímonsfe. being possible ίρ ύψ&amp;&amp; a S-usst eostitsg of lísMg alloy sava bor rsnatóa&amp;at 10 mtmin 8«d;*?ídv« maWíM yMd:öf:sas>sa?:íMyM%:by viíls-e of tbs ^«ssá-srfestsílöS'öft-Öie |£t J%4fc§n«őr^ ds« layers ol'soaiisstg svbsssmed have excdien; eossvpacioess due ks a higher vapour energy. Figure 4 accordingly shows ihe microstruclure sef a: liigycoaílísg: ohlnMg alloy deposited sa si obld-'mltgd lowyssgbcm sleek lu iiMS SIOÍ0ÖXÓ Bgv0pAtíH:ásÁ:Iávk.nn.aMlhT^^^^^ Szabadetm igéxypi’rtok i, Eljáráslöstloyo (S> bevonatolásárs, spelyssek kétesében a hordozóra (S; vákuumgőzóíó hereadezássd (I. 11, 21} <1 és 20 sbmegH közé esd ekVc megess; ás%>x« ss-amovlségh ssvagíséesosoos s&amp;síohsmve dnk alapú iPssdbrossmkegsi vMmmtk i«: lulyíssnssbssa, also! «· '^m^iessB 4fak alapig klauSoláskor a tsmigsézlbnsd: léklssívedO áss S0 idsneghé Mre ese előre: tsteghaíátnKshsnensyfeágü síapázmsnot tartalmazó: sbíssOlrdő páröinghítsisával nyess gbe saoisfe ssbessbggel mm® italozóm í$): boosásáaik ishmbvé mé gbaasgas-as: Ssv^s^tó' sskife* "'(%. W látt#»&amp;s» vbtmato&amp;Nmto* kméuiM rnmé^rnn mmíym0 s rnrnmmM ummé®· alkalmas, w^okgmmzkmk· 0, blvaszíon IbrssOívöxeítel v&amp;ió ellásásásss szolgáló esstkbabkkei áliassd;> értékes) íststltsk. % Az Ív Igéssygoríí seaslbíl ö|isoís,:íy5elyaek kérőiébenialsotdozbs's v4és 18 íOsseg/S kbxé esö elbsx iisegsiasstpexsii sssenoylxégű ssnsgs-ed-aroos sanaSrss&amp;xS csssk alapa 4®soöívdgoí:íeíéget válasglsiak lé Eslyaosaíosssn egy esők alapú és sasiairnasg ahol &amp; hisáii|fei%ft«í»t>'iee.get'a hsvonsdöiás soráts állandó eríeksss sarsjök. I. 1, vágj' SS. 2. igénypessl szeriniiveprás, stssdynél 0,1 M2® smr ksgöb lávó sasíógságö íómöívökgöéíeget vjllssztiSTií; le. ; 4, <% 1>3, ig^psjotófevbáílhíi^ihf ájíeWhti ipslb aspelyfibi a isosysoyp· etössybsesr asréisz&amp;lag képed. :S- A: 4 HÉíypootsl': sxerbki elikfás, '^lyn#.f..féa«Slagstskl^^ kerpanyeab („bakó- harsionbvg'·'} acél képesti. éi Béresklestés kis 31} legalább két aibalailp isorooxosas {^tóltddósfolyp^.ösJev^pZíáí^afchíholy bes'osrdeaes vákusösr-gó^íóskamrá? (*λ sovabbá egy :á borílpvií: a ksísyrkss (2) ás sryáöfeíisS pBvkbypsaeíate^ bcsxasdsofe (1,21} tartssb-ssss Ssrvábbá - ssBó’dkíi.'i gOzsugaras hevooatolO esséközt-C?), valatskevs . a ímrnmálő eszközt (7¾ a Jeplbb élőmet előre meghátárbzölt #: i$WW im0W saztalmazó gőzzel ellátó eszközöket, - s. bevöMidtó eszlíöK (?) ellátásához S fotoeS: ölcnrieket igrtateaxO ^teótvő&amp;aid»it>4· ^fosnogiaib m%KMkm gfejMtonmef éMioíi páírölögtaíMst. Φ- Mm> ^ 8 pÁvúmMmmt m szabályozott 0l.vA1Íi^lkó2^^ Ólláíö eszközök: οίζϊίίίΜΙδkemebeét tÓX x8n*»«^aák,.;MÍ íé^bS*|:^#Mlááám::-áteföw ésZközzél vas Összekapcsolva és Ι(ΰ«·ϊ^>#^ίτ®1 vaa «iláivs, ahol m uláíkölfo kenrenee (S) ás ál^iá-li^Mítpkóiógtaíóüáö^l (3) v&amp;n öSszókíhjesoivai ·.- a :íémö:fo:tfoeí:tisrdö: összetételének beállításává sMtjjg&amp;ó eszközöket.: tttalyek időbért <0.·&amp;ϊκ1ö összetétel fetntaríásáí teszik lehetővé és a; párologtató eszközöket (3) szabllyózotr öN·* t^nSívóze^l ellátó eszközöket mrtahosxíiKk, - a totóé folyamatos kéílögtstéséZé szolgáló, g :|>áífo.ogiaióügÖt (3) és az mániáké kemencet tó) össZékapesölé vissáitó^ne|;íáiüi":áá^ (ő) foégy&amp;lógisó&amp;t eáKz:özÖk®h a páröíógtaíóüaé (3) a vákbutóksmrábsn: (2)í:helye#8bik el, továbbá M atámöltó: keitiesee^ ió) s vakyomkiosrazr (2) kivid helyezkedik el
  2. 7, Béréntfozá (3 1: 21) legalább kés fémes elemet tartalmazó iemötvőzafoöi lévő bevonatok áthaladó hordozóra p) történő folyathatok leváitsszíásárfo lovál>ba; égy a hordozót (S) a kámeán (12) ás továbbító eszközt tartalmaz·: a berendezés továbbá - szentkút; stözsog&amp;fas bevonatok» eszközt (t: js. vídammt - a Ibevorittfoíö eszközt (17): a tepfobb két fotrseS: «lémet élőre .megteütözott és átlanőó arányba» s:zrtsií»ozb gézzel eílátfoeszközökeí, - a bevonatéig eszköz (t?) slíátáséböz a fémes femeket tartalmazó fémötyözetfofoőt péfofogtatb: eszközöket (lő), méfvöket#tdél«foéh?l ellátóit: pamfogifoobst (13}'|#p?js shol sipáíologtatósíssfotylőa szabályozott: összeíáfoltr olvadt: fépfotvözetiei éliátó eszközök utántöltő ke shéntfoi (ló): tahaimirkbak;, «») :&amp;mhugákbetáplálásáraalkaíoíSK eszközzel van összekapcsolva és fűtőrendszerrel van ellátva, ahol az kmtmm (IS) az általa táplált sfoolögfoióhsttiei (13) *m összeknpesolvg, ·· a forasfoözetfordő összetételének beállítására szolgáló eszközökét,: melyek:: kiében állandó összetétel foböíariását teszik leietóvé ás á páröíéfíaió eszközökéi (3) szabályozott ŐsszeSáteii ölyadt: foshbívözéttel ellátó eszközöket tart&amp;baaznak, alibi az títántöltÖ kemence (15) ék g párblbgtatóöst (13) égjahás btbllelí yaríbak: elrendezve és közös íiiíiákUir) fobdelkéZisek, *®Φ· ®.rnm Π3) alja fotelt legálább «g^ :átmeifo :ayílás (19) van kiképezve éá ahol a psrologiotohst (13) egy zárt kamrában Π S) helyezkedik éí, továbbá a:··'.:htártl:öltö:keme:nee:(l S) a zárt katntán (t á t beivezxedík e·.
HUE08787802A 2007-03-20 2008-03-19 Eljárás hordozó bevonatolására, valamint fémötvözet-vákuumgõzölõ berendezés HUE031482T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07290342A EP1972699A1 (fr) 2007-03-20 2007-03-20 Procede de revetement d'un substrat et installation de depot sous vide d'alliage metallique

Publications (1)

Publication Number Publication Date
HUE031482T2 true HUE031482T2 (hu) 2017-07-28

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HUE08787802A HUE031482T2 (hu) 2007-03-20 2008-03-19 Eljárás hordozó bevonatolására, valamint fémötvözet-vákuumgõzölõ berendezés

Country Status (16)

Country Link
US (3) US8481120B2 (hu)
EP (2) EP1972699A1 (hu)
JP (1) JP5873621B2 (hu)
KR (1) KR101453583B1 (hu)
CN (1) CN101680080B (hu)
BR (1) BRPI0809194B1 (hu)
CA (1) CA2681329C (hu)
ES (1) ES2599364T3 (hu)
HU (1) HUE031482T2 (hu)
MA (1) MA31417B1 (hu)
MX (1) MX2009009914A (hu)
PL (1) PL2129810T3 (hu)
RU (1) RU2456372C2 (hu)
UA (1) UA99280C2 (hu)
WO (1) WO2008142222A1 (hu)
ZA (1) ZA200906306B (hu)

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