HK1253585A1 - 用於曝光和基板相關操作的裝置和方法 - Google Patents
用於曝光和基板相關操作的裝置和方法Info
- Publication number
- HK1253585A1 HK1253585A1 HK18112791.6A HK18112791A HK1253585A1 HK 1253585 A1 HK1253585 A1 HK 1253585A1 HK 18112791 A HK18112791 A HK 18112791A HK 1253585 A1 HK1253585 A1 HK 1253585A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- exposure
- substrate
- operations related
- operations
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67748—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a single workpiece
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US27297909P | 2009-11-27 | 2009-11-27 | |
US27297809P | 2009-11-27 | 2009-11-27 | |
US12/954,760 US20110141448A1 (en) | 2009-11-27 | 2010-11-26 | Substrate carrier device, substrate carrying method, substrate supporting member, substrate holding device, exposure apparatus, exposure method and device manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1253585A1 true HK1253585A1 (zh) | 2019-06-21 |
Family
ID=43736207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK18112791.6A HK1253585A1 (zh) | 2009-11-27 | 2018-10-08 | 用於曝光和基板相關操作的裝置和方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20110141448A1 (zh) |
JP (4) | JP5761190B2 (zh) |
KR (2) | KR102139920B1 (zh) |
CN (2) | CN108008603A (zh) |
HK (1) | HK1253585A1 (zh) |
TW (3) | TWI537197B (zh) |
WO (1) | WO2011065589A2 (zh) |
Families Citing this family (52)
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JP5843161B2 (ja) * | 2011-05-13 | 2016-01-13 | 株式会社ニコン | 露光装置、フラットパネルディスプレイの製造方法、及びデバイス製造方法 |
WO2012157231A1 (ja) * | 2011-05-13 | 2012-11-22 | 株式会社ニコン | 基板の交換装置 |
TWI647779B (zh) * | 2011-08-30 | 2019-01-11 | 日商尼康股份有限公司 | 物體搬送裝置、物體處理裝置、曝光裝置、平板顯示器之製造方法、元件製造方法、物體之搬送方法、及物體交換方法 |
JP5943588B2 (ja) * | 2011-11-29 | 2016-07-05 | 株式会社ディスコ | 洗浄装置 |
KR101414830B1 (ko) * | 2011-11-30 | 2014-07-03 | 다이닛뽕스크린 세이조오 가부시키가이샤 | 얼라이먼트 방법, 전사 방법 및 전사장치 |
WO2013150787A1 (ja) * | 2012-04-04 | 2013-10-10 | 株式会社ニコン | 物体搬送システム、露光装置、フラットパネルディスプレイの製造方法、デバイス製造方法、物体保持装置、物体搬送装置、物体搬送方法、及び物体交換方法 |
JP6243898B2 (ja) | 2012-04-19 | 2017-12-06 | インテヴァック インコーポレイテッド | 太陽電池製造のための2重マスク装置 |
JP6231078B2 (ja) | 2012-04-26 | 2017-11-15 | インテヴァック インコーポレイテッド | 真空プロセスのためのシステム構成 |
US10062600B2 (en) | 2012-04-26 | 2018-08-28 | Intevac, Inc. | System and method for bi-facial processing of substrates |
DE202012102102U1 (de) * | 2012-06-08 | 2012-07-03 | De-Sta-Co Europe Gmbh | Verbindungselement |
US9694990B2 (en) * | 2012-06-14 | 2017-07-04 | Evatec Ag | Transport and handing-over arrangement for disc-shaped substrates, vacuum treatment installation and method for manufacture treated substrates |
KR101971453B1 (ko) * | 2012-11-12 | 2019-04-24 | 주식회사 원익아이피에스 | 기판처리모듈 및 그를 가지는 기판처리시스템 |
CN102963578B (zh) * | 2012-11-23 | 2015-07-01 | 深圳市华星光电技术有限公司 | 面板解包方法及解包装置 |
JP6079529B2 (ja) * | 2013-09-18 | 2017-02-15 | 三星ダイヤモンド工業株式会社 | 支持機構および搬送装置 |
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CN103708713A (zh) * | 2013-12-26 | 2014-04-09 | 深圳市华星光电技术有限公司 | 夹持机构、液晶面板切割机以及液晶面板切割工艺 |
CN104051311B (zh) * | 2014-07-08 | 2017-06-09 | 深圳市华星光电技术有限公司 | 基板传送装置及适用于湿制程的强酸或强碱刻蚀工艺 |
TWI662646B (zh) * | 2014-08-05 | 2019-06-11 | 美商因特瓦克公司 | 植入用遮罩及其對準 |
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JP6679157B2 (ja) * | 2015-10-27 | 2020-04-15 | 株式会社ディスコ | 加工装置の搬送機構 |
CN205674219U (zh) * | 2016-05-13 | 2016-11-09 | 鄂尔多斯市源盛光电有限责任公司 | 机械手手臂、机械手及承载装置 |
CN105824200B (zh) * | 2016-05-31 | 2017-08-29 | 京东方科技集团股份有限公司 | 一种基板支撑结构及曝光机 |
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JP6791665B2 (ja) * | 2016-06-30 | 2020-11-25 | 日本電産サンキョー株式会社 | 搬送システム |
CN106044232B (zh) * | 2016-07-26 | 2018-09-04 | 京东方科技集团股份有限公司 | 取片装置 |
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CN106783710B (zh) * | 2016-12-31 | 2024-01-12 | 上海新阳半导体材料股份有限公司 | 晶圆转移装置 |
EP3361316A1 (de) * | 2017-02-14 | 2018-08-15 | VAT Holding AG | Pneumatische stifthubvorrichtung und pneumatischer hubzylinder |
CN106773553B (zh) * | 2017-03-06 | 2018-11-30 | 重庆京东方光电科技有限公司 | 承载装置和曝光设备 |
CN107298283A (zh) * | 2017-08-08 | 2017-10-27 | 惠科股份有限公司 | 显示面板检查设备和显示面板检测方法 |
TWI791036B (zh) * | 2017-10-05 | 2023-02-01 | 日商索尼股份有限公司 | 光源裝置及投射型顯示裝置 |
CN108328070A (zh) * | 2018-03-29 | 2018-07-27 | 苏州聚力电机有限公司 | 一种音圈马达下弹片的放置载具 |
US10535495B2 (en) * | 2018-04-10 | 2020-01-14 | Bae Systems Information And Electronic Systems Integration Inc. | Sample manipulation for nondestructive sample imaging |
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JP7205966B2 (ja) * | 2018-06-29 | 2023-01-17 | 川崎重工業株式会社 | 基板搬送装置及びその運転方法 |
CN109384062B (zh) * | 2018-09-19 | 2020-02-18 | 武汉华星光电技术有限公司 | 一种曝光机及其传送基板的方法 |
CN109625970B (zh) * | 2019-01-23 | 2020-10-30 | 深圳市华星光电技术有限公司 | 基板搬运机械手 |
JP7212558B2 (ja) | 2019-03-15 | 2023-01-25 | キヤノン株式会社 | 基板処理装置、決定方法及び物品の製造方法 |
JP7404348B2 (ja) * | 2019-03-29 | 2023-12-25 | Hoya株式会社 | マスクブランク用基板、多層反射膜付き基板、反射型マスクブランク、反射型マスク、透過型マスクブランク、透過型マスク、及び半導体装置の製造方法 |
JP7207096B2 (ja) * | 2019-03-29 | 2023-01-18 | 株式会社ニコン | 基板搬送装置、露光装置、フラットパネルディスプレイ製造方法、デバイス製造方法、及び露光方法 |
JP7278854B2 (ja) * | 2019-04-24 | 2023-05-22 | 株式会社ニューフレアテクノロジー | ステージ機構及びテーブル高さ位置の調整方法 |
US11340179B2 (en) | 2019-10-21 | 2022-05-24 | Bae Systems Information And Electronic System Integration Inc. | Nanofabricated structures for sub-beam resolution and spectral enhancement in tomographic imaging |
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CN112944121B (zh) * | 2021-01-23 | 2022-10-11 | 上海中中龙达智能科技有限公司 | 一种可防止歪斜挤压的监控用旋转式倾斜摄像装置 |
TW202340877A (zh) * | 2022-03-31 | 2023-10-16 | 日商尼康股份有限公司 | 搬送裝置、曝光裝置、搬送方法、曝光方法及對準標記 |
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-
2010
- 2010-11-26 US US12/954,760 patent/US20110141448A1/en not_active Abandoned
- 2010-11-29 KR KR1020197020776A patent/KR102139920B1/ko active IP Right Grant
- 2010-11-29 CN CN201711171295.9A patent/CN108008603A/zh active Pending
- 2010-11-29 KR KR1020127016666A patent/KR102002764B1/ko active IP Right Grant
- 2010-11-29 TW TW099141197A patent/TWI537197B/zh active
- 2010-11-29 JP JP2012523144A patent/JP5761190B2/ja active Active
- 2010-11-29 TW TW108107874A patent/TWI740113B/zh active
- 2010-11-29 TW TW105113428A patent/TW201643092A/zh unknown
- 2010-11-29 WO PCT/JP2010/071762 patent/WO2011065589A2/en active Application Filing
- 2010-11-29 CN CN201080053764.7A patent/CN102696099B/zh active Active
-
2015
- 2015-06-11 JP JP2015117902A patent/JP2015165599A/ja active Pending
-
2017
- 2017-03-01 JP JP2017037933A patent/JP6555546B2/ja active Active
-
2018
- 2018-10-08 HK HK18112791.6A patent/HK1253585A1/zh unknown
-
2019
- 2019-07-12 JP JP2019130402A patent/JP6885425B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
TW201643092A (zh) | 2016-12-16 |
KR102002764B1 (ko) | 2019-07-23 |
KR102139920B1 (ko) | 2020-07-31 |
JP6885425B2 (ja) | 2021-06-16 |
CN102696099A (zh) | 2012-09-26 |
JP5761190B2 (ja) | 2015-08-12 |
KR20190087662A (ko) | 2019-07-24 |
KR20120098822A (ko) | 2012-09-05 |
TWI537197B (zh) | 2016-06-11 |
TW201927666A (zh) | 2019-07-16 |
US20110141448A1 (en) | 2011-06-16 |
CN108008603A (zh) | 2018-05-08 |
JP2017108169A (ja) | 2017-06-15 |
WO2011065589A3 (en) | 2011-10-06 |
CN102696099B (zh) | 2017-12-15 |
TW201206802A (en) | 2012-02-16 |
JP2013512552A (ja) | 2013-04-11 |
JP2019216243A (ja) | 2019-12-19 |
JP6555546B2 (ja) | 2019-08-07 |
TWI740113B (zh) | 2021-09-21 |
JP2015165599A (ja) | 2015-09-17 |
WO2011065589A2 (en) | 2011-06-03 |
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