HK1123010A1 - Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components - Google Patents
Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable componentsInfo
- Publication number
- HK1123010A1 HK1123010A1 HK09100228.5A HK09100228A HK1123010A1 HK 1123010 A1 HK1123010 A1 HK 1123010A1 HK 09100228 A HK09100228 A HK 09100228A HK 1123010 A1 HK1123010 A1 HK 1123010A1
- Authority
- HK
- Hong Kong
- Prior art keywords
- recovery
- reusable components
- abrasive slurries
- exhausted abrasive
- treating exhausted
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/007—Use, recovery or regeneration of abrasive mediums
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/0012—Settling tanks making use of filters, e.g. by floating layers of particulate material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/009—Heating or cooling mechanisms specially adapted for settling tanks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/0093—Mechanisms for taking out of action one or more units of a multi-unit settling mechanism
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D21/00—Separation of suspended solid particles from liquids by sedimentation
- B01D21/26—Separation of sediment aided by centrifugal force or centripetal force
- B01D21/262—Separation of sediment aided by centrifugal force or centripetal force by using a centrifuge
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/04—Processes using organic exchangers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03B—SEPARATING SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS
- B03B9/00—General arrangement of separating plant, e.g. flow sheets
- B03B9/06—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
- B04B—CENTRIFUGES
- B04B5/00—Other centrifuges
- B04B5/10—Centrifuges combined with other apparatus, e.g. electrostatic separators; Sets or systems of several centrifuges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B04—CENTRIFUGAL APPARATUS OR MACHINES FOR CARRYING-OUT PHYSICAL OR CHEMICAL PROCESSES
- B04C—APPARATUS USING FREE VORTEX FLOW, e.g. CYCLONES
- B04C7/00—Apparatus not provided for in group B04C1/00, B04C3/00, or B04C5/00; Multiple arrangements not provided for in one of the groups B04C1/00, B04C3/00, or B04C5/00; Combinations of apparatus covered by two or more of the groups B04C1/00, B04C3/00, or B04C5/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/12—Devices for exhausting mist of oil or coolant; Devices for collecting or recovering materials resulting from grinding or polishing, e.g. of precious metals, precious stones, diamonds or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Silicon Compounds (AREA)
- Treatment Of Sludge (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT000329A ITRM20050329A1 (it) | 2005-06-24 | 2005-06-24 | Procedimento per il trattamento di sospensioni abrasive esauste per il recupero delle loro componenti riciclabili e relativo impianto. |
PCT/IT2006/000461 WO2006137098A1 (en) | 2005-06-24 | 2006-06-16 | Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components |
Publications (1)
Publication Number | Publication Date |
---|---|
HK1123010A1 true HK1123010A1 (en) | 2009-06-05 |
Family
ID=37027925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
HK09100228.5A HK1123010A1 (en) | 2005-06-24 | 2009-01-09 | Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components |
Country Status (20)
Country | Link |
---|---|
US (1) | US8512577B2 (ru) |
EP (1) | EP1893385B1 (ru) |
JP (1) | JP5015920B2 (ru) |
KR (1) | KR101512516B1 (ru) |
CN (1) | CN101218068B (ru) |
AU (1) | AU2006260482A1 (ru) |
CA (1) | CA2613475C (ru) |
CY (1) | CY1113474T1 (ru) |
ES (1) | ES2392455T3 (ru) |
HK (1) | HK1123010A1 (ru) |
IL (1) | IL188247A (ru) |
IT (1) | ITRM20050329A1 (ru) |
MY (1) | MY150107A (ru) |
NO (1) | NO20076488L (ru) |
PL (1) | PL1893385T3 (ru) |
PT (1) | PT1893385E (ru) |
RU (1) | RU2403139C2 (ru) |
TW (1) | TWI444249B (ru) |
UA (1) | UA96263C2 (ru) |
WO (1) | WO2006137098A1 (ru) |
Families Citing this family (68)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7820126B2 (en) | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
CA2619547C (en) * | 2007-02-06 | 2016-05-17 | Smith International, Inc. | Polycrystalline diamond constructions having improved thermal stability |
US7942219B2 (en) | 2007-03-21 | 2011-05-17 | Smith International, Inc. | Polycrystalline diamond constructions having improved thermal stability |
JP5509518B2 (ja) * | 2007-09-07 | 2014-06-04 | パナソニック株式会社 | 半導体研磨用スラリー異物検査方法 |
US8940174B2 (en) * | 2007-10-30 | 2015-01-27 | Pall Corporation | Method for treating spent abrasive slurry |
US9297211B2 (en) | 2007-12-17 | 2016-03-29 | Smith International, Inc. | Polycrystalline diamond construction with controlled gradient metal content |
ITRM20070677A1 (it) * | 2007-12-27 | 2009-06-28 | Garbo S R L | Procedimento per la separazione e il recupero dei sospendenti contenuti nelle sospensioni esauste provenienti dalle lavorazioni meccaniche del silicio. |
JP5090191B2 (ja) * | 2008-01-24 | 2012-12-05 | 三和油化工業株式会社 | 遊離砥粒スラリー廃液からの分散媒の回収方法 |
CN101244823B (zh) * | 2008-02-20 | 2010-06-23 | 江南大学 | 从硅片切割加工副产物中回收碳化硅的方法 |
US20110059002A1 (en) | 2008-04-11 | 2011-03-10 | John Allan Fallavollita | Methods and apparatus for recovery of silicon and silicon carbide from spent wafer-sawing slurry |
DE102008022237A1 (de) * | 2008-05-06 | 2009-11-19 | Scholz Recycling Gmbh Nl Erfurt | Verfahren zur Aufbereitung von Slurry |
US8425639B2 (en) * | 2008-05-30 | 2013-04-23 | Cabot Microelectronics Corporation | Wire saw slurry recycling process |
JP5173945B2 (ja) * | 2008-07-02 | 2013-04-03 | シャープ株式会社 | クーラント再生方法およびスラリー再生方法 |
CN102143910B (zh) * | 2008-07-09 | 2014-07-16 | 加宝有限公司 | 纯化和压实用于光伏应用的原料的方法 |
DE102008041051B4 (de) | 2008-08-06 | 2023-04-06 | Leibniz-Institut Für Polymerforschung Dresden E.V. | Verfahren zur Fest-Flüssig-Trennung von Feststoffen aus überwiegend nichtwässrigen Flüssigkeiten |
JP2010167551A (ja) * | 2008-12-26 | 2010-08-05 | Nomura Micro Sci Co Ltd | 使用済みスラリーの再生方法 |
EP2382291A2 (en) * | 2008-12-31 | 2011-11-02 | MEMC Singapore Pte. Ltd. | Methods to recover and purify silicon particles from saw kerf |
JP5280218B2 (ja) * | 2009-01-15 | 2013-09-04 | 株式会社安永 | スラリー再生処理装置及び方法 |
US20110293506A1 (en) * | 2009-02-13 | 2011-12-01 | Kobelco Eco-Solutions Co., Ltd. | Method for processing waste water containing fluorine and silicon, method for producing calcium fluoride, and facility for processing fluorine-containing waste water |
JP2010221337A (ja) * | 2009-03-24 | 2010-10-07 | Ngk Insulators Ltd | 使用済み研削液の再利用方法 |
JP5358266B2 (ja) * | 2009-04-24 | 2013-12-04 | 野村マイクロ・サイエンス株式会社 | 排スラリー中の有用固形成分の回収方法 |
DE102009020143A1 (de) | 2009-05-04 | 2010-11-11 | Pv Silicon Forschungs- Und Produktionsgesellschaft Mbh | Verfahren zur Aufbereitung von Sägeabfällen zur Rückgewinnung von Silizium für die Herstellung von Solarsilizium |
JP2011005561A (ja) * | 2009-06-23 | 2011-01-13 | Shin Etsu Handotai Co Ltd | シリコンインゴットの切断方法および切断システム |
DE102009034949A1 (de) * | 2009-07-09 | 2011-01-13 | Akw Apparate + Verfahren Gmbh | Verfahren zur Aufbereitung einer Suspension |
WO2011016996A2 (en) * | 2009-07-27 | 2011-02-10 | Memc Electronic Materials, Inc. | Methods and systems for processing abrasive slurry |
EP2473327B1 (de) * | 2009-09-02 | 2016-10-12 | Guntram Krettek | Verfahren zur wiederaufbereitung von verbrauchten bearbeitungsslurries |
DE102009054076B8 (de) * | 2009-11-20 | 2012-07-05 | Erwin Junker Maschinenfabrik Gmbh | Verfahren zum Abtrennen von Schleiföl aus Schleifschlämmen; Trennstation zur Durchführung des Verfahrens und verfahrenstechnische Anlage |
DE102009054348A1 (de) | 2009-11-24 | 2011-06-30 | Coenen, Wolfgang, Dipl.-Ing., 28879 | Verfahren und Vorrichtung zum Behandeln von Si/SiC-haltigen Schleifschlämmen |
KR101171799B1 (ko) * | 2010-06-29 | 2012-08-13 | 고려대학교 산학협력단 | 실리카 에칭 폐기물을 재활용하는 방법 및 메조다공성 물질을 제조하는 방법 |
DE102010025606A1 (de) | 2010-06-30 | 2012-01-05 | Schott Solar Ag | Verfahren zur Wiederaufbereitung von verbrauchten Sägeflüssigkeiten aus der Herstellung von Siliziumwafern |
DE102010026923A1 (de) | 2010-07-12 | 2012-01-12 | Centrotherm Sitec Gmbh | Verfahren zur Rückgewinnung von Silizium aus einer Sägesuspension |
GB2484348A (en) | 2010-10-08 | 2012-04-11 | Rec Wafer Norway As | Abrasive slurry and method of production of photovoltaic wafers |
CN102173419B (zh) * | 2011-02-28 | 2012-10-10 | 白瑜皎 | 从硅片切割废砂浆中回收硅粉的方法 |
EP2571340A4 (en) * | 2011-04-27 | 2014-01-08 | Panasonic Corp | METHOD FOR PRODUCING CONDUCTOR PLATES |
US8734751B2 (en) * | 2011-06-12 | 2014-05-27 | Taiwan Water Recycle Technology Co., Ltd. | Method and apparatus for recycling and treating wastes of silicon wafer cutting and polishing processes |
JP5802609B2 (ja) * | 2011-09-07 | 2015-10-28 | ジー・フォースジャパン株式会社 | クーラント再生方法 |
DE102011115081B4 (de) | 2011-09-19 | 2017-08-31 | Baufeld-Mineralölraffinerie GmbH | Verfahren zur Gewinnung von Solarsilizium aus Sägeabfällen |
US8696404B2 (en) * | 2011-12-21 | 2014-04-15 | WD Media, LLC | Systems for recycling slurry materials during polishing processes |
CN104010770B (zh) * | 2011-12-22 | 2017-07-21 | 柯尼卡美能达株式会社 | 研磨材料再生方法及再生研磨材料 |
CN104023915B (zh) * | 2011-12-27 | 2017-07-21 | 柯尼卡美能达株式会社 | 研磨材料分离方法及再生研磨材料 |
CN104114324B (zh) * | 2012-02-17 | 2017-11-28 | 柯尼卡美能达株式会社 | 研磨材料再生方法 |
TW201312638A (zh) * | 2012-03-03 | 2013-03-16 | Hong Tung Resource Co Ltd | 矽晶圓切割廢料之處理方法 |
DE102012004497A1 (de) * | 2012-03-06 | 2013-09-12 | Gea Mechanical Equipment Gmbh | Verfahren und Anlage zur Aufarbeitung von Rohgülle und/oder Gärresten aus der Biogaserzeugung |
JP2013219307A (ja) * | 2012-04-12 | 2013-10-24 | Japan Cabot Microelectronics Corp | Cmpスラリー再生装置およびcmpスラリー再生方法 |
WO2014017534A1 (ja) * | 2012-07-25 | 2014-01-30 | コニカミノルタ株式会社 | 研磨材再生方法 |
CA2886896C (en) | 2012-10-12 | 2020-03-10 | Blue Sky Mines Ltd. | Methods of and systems for treating incinerated waste |
TWI461258B (zh) * | 2012-11-09 | 2014-11-21 | Sino American Silicon Prod Inc | 研磨漿料回收利用方法及運用在該研磨漿料回收利用方法的研磨漿料回收利用設備 |
DE102013202960A1 (de) | 2013-02-22 | 2014-08-28 | Geltz Umwelt-Technologie GmbH | Verfahren und Vorrichtung zur Trennung von zwei Gruppen von Partikeln aus einer Suspension |
JP6085500B2 (ja) * | 2013-03-08 | 2017-02-22 | 株式会社Ihi回転機械 | ワイヤソースラリのクーラント回収装置 |
JP6265974B2 (ja) * | 2013-04-04 | 2018-01-24 | 株式会社クラレ | スラリー再生装置、スラリー再生方法及び再生スラリー |
WO2015059522A1 (en) * | 2013-10-24 | 2015-04-30 | Metallkraft As | Non-chemical method and system for recovering silicon carbide particles |
SG11201606000VA (en) * | 2014-01-31 | 2016-09-29 | Hoya Corp | Method for regenerating used polishing slurry, and method for manufacturing magnetic-disk glass substrate |
JP6172030B2 (ja) * | 2014-04-03 | 2017-08-02 | 信越半導体株式会社 | ワークの切断方法及び加工液 |
CN104391433A (zh) * | 2014-12-05 | 2015-03-04 | 合肥鑫晟光电科技有限公司 | 一种喷淋系统及其使用方法 |
US9738542B2 (en) * | 2014-12-09 | 2017-08-22 | Kronos International, Inc. | Method for the further processing of iron sulfate heptahydrate |
EP3250507A1 (en) * | 2015-01-27 | 2017-12-06 | Metallkraft AS | Non-chemical method and system for recovering silicon carbide particles and glycol from a slurry |
JP5850192B1 (ja) * | 2015-03-19 | 2016-02-03 | コニカミノルタ株式会社 | 研磨材の回収方法 |
CN105001969B (zh) * | 2015-07-07 | 2017-12-01 | 阳光硅峰电子科技有限公司 | 一种基于温度敏感性的高效分离砂浆的方法 |
CZ2015961A3 (cs) * | 2015-12-31 | 2017-02-15 | PTV, spol. s r.o. | Způsob recyklace abraziva z řezání vysokotlakým vodním paprskem z řezacího kalu a zařízení k provádění tohoto způsobu |
CN105922143B (zh) * | 2016-05-20 | 2018-05-15 | 金堆城钼业股份有限公司 | 一种水切割废砂的循环再利用方法 |
CN106819357A (zh) * | 2017-01-23 | 2017-06-13 | 信阳山信生物食品科技有限公司 | 一种谷物糠粕蛋白提取工艺 |
CN107020201B (zh) * | 2017-06-14 | 2023-07-25 | 淮南矿业(集团)有限责任公司 | 一种浓缩机底流粗煤泥回收系统 |
CN107324340B (zh) * | 2017-08-14 | 2019-04-12 | 大连理工大学 | 一种回收金刚线切割硅粉废料的设备和方法 |
WO2020124207A1 (en) * | 2018-12-18 | 2020-06-25 | Sepro Mineral Systems Corp. | Recovery of material from wet incinerator bottom ash |
CN110561274B (zh) * | 2019-09-29 | 2020-10-09 | 广州大学 | 一种可实现持续加工的轴承强化研磨设备 |
JP2021094674A (ja) * | 2019-12-19 | 2021-06-24 | 株式会社ディスコ | 廃液処理装置及び加工水再生システム |
CN112707571A (zh) * | 2020-12-30 | 2021-04-27 | 杭州上拓环境科技股份有限公司 | 一种含硅废水资源化处理工艺 |
CN114193329B (zh) * | 2021-12-09 | 2023-03-21 | 中环领先半导体材料有限公司 | 一种磨片在线回收的浆液利用方法 |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3997359A (en) * | 1972-11-07 | 1976-12-14 | Joseph Daniel Dankoff | Reclamation of components from grinding swarf |
US3929639A (en) * | 1973-07-23 | 1975-12-30 | Gaston County Dyeing Mach | Filtering apparatus and process |
DE3639958A1 (de) * | 1986-01-10 | 1987-07-16 | Amberger Kaolinwerke Gmbh | Mehrstufige anordnung zur gegenstromwaschung, sowie zugehoerige verfahrensmassnahmen |
JPH02182986A (ja) * | 1988-12-28 | 1990-07-17 | Mitsubishi Paper Mills Ltd | ハイドロサイクロン分離方法 |
US4872975A (en) * | 1989-01-31 | 1989-10-10 | Ingersoll-Rand Company | System for separating abrasive material from a fluid used in fluid jet cutting |
JPH0741535B2 (ja) * | 1991-04-10 | 1995-05-10 | 中小企業事業団 | ラップ加工装置の砥粒液再生・循環装置 |
US5403490A (en) * | 1992-11-23 | 1995-04-04 | Desai; Satish | Process and apparatus for removing solutes from solutions |
DE4405829A1 (de) * | 1994-02-23 | 1995-08-31 | Wacker Chemitronic | Verfahren zur Rückgewinnung von Schneidkorn |
JP2606156B2 (ja) * | 1994-10-14 | 1997-04-30 | 栗田工業株式会社 | 研磨剤粒子の回収方法 |
JP3199159B2 (ja) * | 1996-01-26 | 2001-08-13 | 信越半導体株式会社 | 油性スラリー廃液の再利用システム |
JP3249373B2 (ja) * | 1996-02-21 | 2002-01-21 | 信越半導体株式会社 | 水溶性スラリー廃液の再利用システム |
DE19642908A1 (de) * | 1996-10-17 | 1998-04-23 | Wacker Siltronic Halbleitermat | Sägesuspension und Verfahren zum Abtrennen von Scheiben von einem Kristall |
US5928492A (en) * | 1997-06-05 | 1999-07-27 | Lucid Treatment Systems, Inc. | Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization |
JP3996686B2 (ja) * | 1997-12-15 | 2007-10-24 | 石川島汎用機サービス株式会社 | ワイヤソー砥粒スラリーの再生方法及び装置 |
JP3408979B2 (ja) * | 1997-12-26 | 2003-05-19 | 株式会社日平トヤマ | スラリ管理システム |
CN1305393A (zh) * | 1998-06-18 | 2001-07-25 | 卢西德处理系统公司 | 回收化学和机械平整化所用水与浆料研磨剂的方法和设备 |
JP4449185B2 (ja) * | 2000-07-13 | 2010-04-14 | 株式会社新菱 | 砥粒の回収方法 |
JP2002239906A (ja) * | 2001-02-13 | 2002-08-28 | Ishikawajima Hanyoki Service Co Ltd | ラップ砥粒スラリーの再生方法及び装置 |
US7223344B2 (en) | 2001-05-29 | 2007-05-29 | Memc Electronic Materials, Spa | Method for treating an exhausted glycol-based slurry |
JP2003103465A (ja) * | 2001-09-27 | 2003-04-08 | Tokuji Umehara | 磁場配列を利用した研削用砥粒体の再生方法及び再生装置 |
JP3768891B2 (ja) * | 2002-01-31 | 2006-04-19 | 三益半導体工業株式会社 | 廃スラッジの再利用システム |
JP4369095B2 (ja) * | 2002-05-24 | 2009-11-18 | シャープ株式会社 | スラリ再生方法 |
JP3950391B2 (ja) * | 2002-08-26 | 2007-08-01 | 石川島汎用機サービス株式会社 | ワイヤソーのスラリー管理装置 |
DE10251792A1 (de) * | 2002-11-07 | 2004-05-19 | Industriebetriebe Heinrich Meyer-Werke Breloh Gmbh & Co. Kg | Verfahren zur Regenerierung von Filtermitteln, insbesondere Kieselgur |
JP2005313030A (ja) * | 2004-04-27 | 2005-11-10 | Sharp Corp | スラリ再生方法 |
US7820126B2 (en) * | 2006-08-18 | 2010-10-26 | Iosil Energy Corporation | Method and apparatus for improving the efficiency of purification and deposition of polycrystalline silicon |
-
2005
- 2005-06-24 IT IT000329A patent/ITRM20050329A1/it unknown
-
2006
- 2006-06-16 JP JP2008517703A patent/JP5015920B2/ja not_active Expired - Fee Related
- 2006-06-16 PT PT06766344T patent/PT1893385E/pt unknown
- 2006-06-16 CN CN2006800227907A patent/CN101218068B/zh not_active Expired - Fee Related
- 2006-06-16 RU RU2007148011/02A patent/RU2403139C2/ru not_active IP Right Cessation
- 2006-06-16 UA UAA200714479A patent/UA96263C2/ru unknown
- 2006-06-16 KR KR1020087000000A patent/KR101512516B1/ko not_active IP Right Cessation
- 2006-06-16 PL PL06766344T patent/PL1893385T3/pl unknown
- 2006-06-16 CA CA2613475A patent/CA2613475C/en not_active Expired - Fee Related
- 2006-06-16 US US11/993,633 patent/US8512577B2/en not_active Expired - Fee Related
- 2006-06-16 WO PCT/IT2006/000461 patent/WO2006137098A1/en active Application Filing
- 2006-06-16 EP EP06766344A patent/EP1893385B1/en not_active Not-in-force
- 2006-06-16 ES ES06766344T patent/ES2392455T3/es active Active
- 2006-06-16 AU AU2006260482A patent/AU2006260482A1/en not_active Abandoned
- 2006-06-21 TW TW095122193A patent/TWI444249B/zh not_active IP Right Cessation
- 2006-06-23 MY MYPI20062982A patent/MY150107A/en unknown
-
2007
- 2007-12-18 NO NO20076488A patent/NO20076488L/no unknown
- 2007-12-19 IL IL188247A patent/IL188247A/en not_active IP Right Cessation
-
2009
- 2009-01-09 HK HK09100228.5A patent/HK1123010A1/xx not_active IP Right Cessation
-
2012
- 2012-10-12 CY CY20121100951T patent/CY1113474T1/el unknown
Also Published As
Publication number | Publication date |
---|---|
CA2613475C (en) | 2013-12-03 |
ITRM20050329A1 (it) | 2006-12-25 |
ES2392455T3 (es) | 2012-12-10 |
KR20080021110A (ko) | 2008-03-06 |
PT1893385E (pt) | 2012-11-05 |
NO20076488L (no) | 2008-01-21 |
US8512577B2 (en) | 2013-08-20 |
CN101218068A (zh) | 2008-07-09 |
WO2006137098A1 (en) | 2006-12-28 |
MY150107A (en) | 2013-11-29 |
CN101218068B (zh) | 2013-01-02 |
EP1893385B1 (en) | 2012-08-22 |
JP2008546548A (ja) | 2008-12-25 |
RU2007148011A (ru) | 2009-06-27 |
IL188247A0 (en) | 2008-04-13 |
TWI444249B (zh) | 2014-07-11 |
CA2613475A1 (en) | 2006-12-28 |
TW200720022A (en) | 2007-06-01 |
PL1893385T3 (pl) | 2012-12-31 |
AU2006260482A1 (en) | 2006-12-28 |
EP1893385A1 (en) | 2008-03-05 |
CY1113474T1 (el) | 2016-06-22 |
JP5015920B2 (ja) | 2012-09-05 |
RU2403139C2 (ru) | 2010-11-10 |
IL188247A (en) | 2012-09-24 |
KR101512516B1 (ko) | 2015-04-15 |
US20080250723A1 (en) | 2008-10-16 |
UA96263C2 (ru) | 2011-10-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
HK1123010A1 (en) | Process and apparatus for treating exhausted abrasive slurries for the recovery of their reusable components | |
EP1910234A4 (en) | APPARATUS AND METHOD FOR TREATING PURGE LIQUIDS FOR DESULFURIZING COMBUSTION GASES OR SIMILAR LIQUIDS | |
IL204119A0 (en) | Apparatus for treating solutions of high osmotic strength | |
EP2136872A4 (en) | DEVICE AND METHOD FOR THE TREATMENT OF HEADACHE | |
EP1933608A4 (en) | METHOD AND DEVICE FOR PLASMA PROCESSING OF POROUS MATERIAL | |
PL1896774T3 (pl) | Sposób i urządzenie do oczyszczania odpadów | |
GB0512184D0 (en) | Method and apparatus for the treatment of a component | |
HK1119485A1 (en) | Apparatus for removing foreign material from substrate and method for removing foreign material from substrate | |
TWI349304B (en) | Method for removing material from semiconductor wafer and apparatus for performing the same | |
PL2133134T3 (pl) | Urządzenie i sposób obróbki gazu wylotowego | |
PL1688518T3 (pl) | Sposób i urządzenie do elektrochemicznej obróbki elementów w liniach do pracy ciągłej | |
EP1876171A4 (en) | DEVICE FOR UREA SYNTHESIS AND METHOD FOR IMPROVING THEREOF | |
EP2191056A4 (en) | CLOTHING TREATMENT DEVICE AND ASSOCIATED METHOD | |
EP2144683A4 (en) | METHOD AND APPARATUS FOR TREATING MATERIALS WITH LAMPS WITHOUT ELECTRODE | |
TWI369342B (en) | Process for removing water and apparatus for removing water | |
EP2212245A4 (en) | METHOD AND APPARATUS FOR TREATING A GAS CONTAINING A POLLUTANT | |
ZA201006628B (en) | Method and apparatus for the plasma processing of filter material | |
EP1973991A4 (en) | DEVICE FOR TREATING MATERIALS | |
ZA200706448B (en) | Process for production of energy and apparatus for carrying out the same | |
ZA200700018B (en) | Apparatus for cleaning textiles and method of using the same | |
EP1879675A4 (en) | PROCESS AND DEVICE FOR PROCESSING LIME MILK FOR DESSABLAGE | |
EP1853520A4 (en) | METAL ADSORPTION METHOD AND ADSORPTION MATERIAL USED IN THIS METHOD AND METHOD OF REUSING THE ADSORPTION MATERIAL | |
IL196050A0 (en) | Method and apparatus for polishing diamond and composites | |
PT1957423T (pt) | Método e aparelho para tratar lama de cal | |
GB0602415D0 (en) | Apparatus and methods for filtering liquid |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PC | Patent ceased (i.e. patent has lapsed due to the failure to pay the renewal fee) |
Effective date: 20170616 |