GB1440349A - Method of manufacturing etched patterns - Google Patents

Method of manufacturing etched patterns

Info

Publication number
GB1440349A
GB1440349A GB4637673A GB4637673A GB1440349A GB 1440349 A GB1440349 A GB 1440349A GB 4637673 A GB4637673 A GB 4637673A GB 4637673 A GB4637673 A GB 4637673A GB 1440349 A GB1440349 A GB 1440349A
Authority
GB
United Kingdom
Prior art keywords
layer
mask
edge profile
etched
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4637673A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1440349A publication Critical patent/GB1440349A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4083—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by their behaviours during the lithography processes, e.g. soluble masks or redeposited masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
GB4637673A 1972-10-07 1973-10-04 Method of manufacturing etched patterns Expired GB1440349A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213625A NL7213625A (enExample) 1972-10-07 1972-10-07

Publications (1)

Publication Number Publication Date
GB1440349A true GB1440349A (en) 1976-06-23

Family

ID=19817096

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4637673A Expired GB1440349A (en) 1972-10-07 1973-10-04 Method of manufacturing etched patterns

Country Status (7)

Country Link
US (1) US3919066A (enExample)
JP (1) JPS5232954B2 (enExample)
CA (1) CA1020494A (enExample)
FR (1) FR2202369B2 (enExample)
GB (1) GB1440349A (enExample)
IT (1) IT1055539B (enExample)
NL (1) NL7213625A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4057831A (en) * 1972-09-05 1977-11-08 U.S. Philips Corporation Video record disc manufactured by a process involving chemical or sputter etching
DE2547792C3 (de) * 1974-10-25 1978-08-31 Hitachi, Ltd., Tokio Verfahren zur Herstellung eines Halbleiterbauelementes
JPS5210080A (en) * 1975-07-15 1977-01-26 Nippon Telegr & Teleph Corp <Ntt> Method for manufacturing semiconductor device
NL7607298A (nl) * 1976-07-02 1978-01-04 Philips Nv Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd volgens de werkwijze.
JPS5381110A (en) * 1976-12-25 1978-07-18 Toshiba Corp Manufacture of magnetic film head
JPS5539646A (en) * 1978-09-12 1980-03-19 Nec Corp Ion taper etching
US4534826A (en) * 1983-12-29 1985-08-13 Ibm Corporation Trench etch process for dielectric isolation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2117199C3 (de) * 1971-04-08 1974-08-22 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung geätzter Muster in dünnen Schichten mit definierten Kantenprofilen
US3723277A (en) * 1971-07-14 1973-03-27 Molekularelektronik Method for the production of masks in the manufacture of semiconductor components

Also Published As

Publication number Publication date
IT1055539B (it) 1982-01-11
FR2202369B2 (enExample) 1976-10-01
CA1020494A (en) 1977-11-08
AU6103973A (en) 1975-04-10
US3919066A (en) 1975-11-11
JPS5232954B2 (enExample) 1977-08-25
DE2348779A1 (de) 1974-04-11
JPS4974483A (enExample) 1974-07-18
NL7213625A (enExample) 1974-04-09
FR2202369A2 (enExample) 1974-05-03
DE2348779B2 (de) 1976-05-26

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee