JPS55115330A - Manufacturing method of semiconductor device - Google Patents
Manufacturing method of semiconductor deviceInfo
- Publication number
- JPS55115330A JPS55115330A JP2270379A JP2270379A JPS55115330A JP S55115330 A JPS55115330 A JP S55115330A JP 2270379 A JP2270379 A JP 2270379A JP 2270379 A JP2270379 A JP 2270379A JP S55115330 A JPS55115330 A JP S55115330A
- Authority
- JP
- Japan
- Prior art keywords
- front surface
- substrate
- oxide film
- electrode
- back surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate deterioration of characteristic of substrate through elimination of contamination on a substrate by forming a back surface electrode before formation of a front surface electrode of a semiconductor substrate.
CONSTITUTION: A base layer and a emitter layer are formed utilizing opened window on the oxide film of a semiconductor substrate and a front surface is covered with a oxide film. Next thereto the back surface electrode is grinded or etched away to a specific thickness and an ohmic electrode is formed on it. After the preceding process the selectively opened windows are formed on the front surface of a substrate and furthermore contamination emerged during formation of the back surface electrode can be removed completely by etching away few hundred Å of the front surface oxide film. After the preceding process an ohmic electrode is formed and thus deterioration of characteristic is prevented.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2270379A JPS55115330A (en) | 1979-02-28 | 1979-02-28 | Manufacturing method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2270379A JPS55115330A (en) | 1979-02-28 | 1979-02-28 | Manufacturing method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55115330A true JPS55115330A (en) | 1980-09-05 |
Family
ID=12090214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2270379A Pending JPS55115330A (en) | 1979-02-28 | 1979-02-28 | Manufacturing method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55115330A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017107930A (en) * | 2015-12-08 | 2017-06-15 | 豊田合成株式会社 | Semiconductor device manufacturing method |
-
1979
- 1979-02-28 JP JP2270379A patent/JPS55115330A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017107930A (en) * | 2015-12-08 | 2017-06-15 | 豊田合成株式会社 | Semiconductor device manufacturing method |
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