JPS5232954B2 - - Google Patents

Info

Publication number
JPS5232954B2
JPS5232954B2 JP48112424A JP11242473A JPS5232954B2 JP S5232954 B2 JPS5232954 B2 JP S5232954B2 JP 48112424 A JP48112424 A JP 48112424A JP 11242473 A JP11242473 A JP 11242473A JP S5232954 B2 JPS5232954 B2 JP S5232954B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP48112424A
Other languages
Japanese (ja)
Other versions
JPS4974483A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4974483A publication Critical patent/JPS4974483A/ja
Publication of JPS5232954B2 publication Critical patent/JPS5232954B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10W74/40
    • H10P76/4083
    • H10P95/00
    • H10W74/43

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP48112424A 1972-10-07 1973-10-08 Expired JPS5232954B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7213625A NL7213625A (enExample) 1972-10-07 1972-10-07

Publications (2)

Publication Number Publication Date
JPS4974483A JPS4974483A (enExample) 1974-07-18
JPS5232954B2 true JPS5232954B2 (enExample) 1977-08-25

Family

ID=19817096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48112424A Expired JPS5232954B2 (enExample) 1972-10-07 1973-10-08

Country Status (7)

Country Link
US (1) US3919066A (enExample)
JP (1) JPS5232954B2 (enExample)
CA (1) CA1020494A (enExample)
FR (1) FR2202369B2 (enExample)
GB (1) GB1440349A (enExample)
IT (1) IT1055539B (enExample)
NL (1) NL7213625A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4057831A (en) * 1972-09-05 1977-11-08 U.S. Philips Corporation Video record disc manufactured by a process involving chemical or sputter etching
DE2547792C3 (de) * 1974-10-25 1978-08-31 Hitachi, Ltd., Tokio Verfahren zur Herstellung eines Halbleiterbauelementes
JPS5210080A (en) * 1975-07-15 1977-01-26 Nippon Telegr & Teleph Corp <Ntt> Method for manufacturing semiconductor device
NL7607298A (nl) * 1976-07-02 1978-01-04 Philips Nv Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd volgens de werkwijze.
JPS5381110A (en) * 1976-12-25 1978-07-18 Toshiba Corp Manufacture of magnetic film head
JPS5539646A (en) * 1978-09-12 1980-03-19 Nec Corp Ion taper etching
US4534826A (en) * 1983-12-29 1985-08-13 Ibm Corporation Trench etch process for dielectric isolation

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2117199C3 (de) * 1971-04-08 1974-08-22 Philips Patentverwaltung Gmbh, 2000 Hamburg Verfahren zur Herstellung geätzter Muster in dünnen Schichten mit definierten Kantenprofilen
US3723277A (en) * 1971-07-14 1973-03-27 Molekularelektronik Method for the production of masks in the manufacture of semiconductor components

Also Published As

Publication number Publication date
DE2348779A1 (de) 1974-04-11
JPS4974483A (enExample) 1974-07-18
AU6103973A (en) 1975-04-10
NL7213625A (enExample) 1974-04-09
FR2202369A2 (enExample) 1974-05-03
IT1055539B (it) 1982-01-11
FR2202369B2 (enExample) 1976-10-01
DE2348779B2 (de) 1976-05-26
US3919066A (en) 1975-11-11
GB1440349A (en) 1976-06-23
CA1020494A (en) 1977-11-08

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